CA890894A - Method for etching copper - Google Patents

Method for etching copper

Info

Publication number
CA890894A
CA890894A CA890894A CA890894DA CA890894A CA 890894 A CA890894 A CA 890894A CA 890894 A CA890894 A CA 890894A CA 890894D A CA890894D A CA 890894DA CA 890894 A CA890894 A CA 890894A
Authority
CA
Canada
Prior art keywords
etching copper
etching
copper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA890894A
Inventor
R. Franco Jack
A. Totta Paul
F. White James
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Publication date
Application granted granted Critical
Publication of CA890894A publication Critical patent/CA890894A/en
Expired legal-status Critical Current

Links

CA890894A Method for etching copper Expired CA890894A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA890894T

Publications (1)

Publication Number Publication Date
CA890894A true CA890894A (en) 1972-01-18

Family

ID=36397029

Family Applications (1)

Application Number Title Priority Date Filing Date
CA890894A Expired CA890894A (en) Method for etching copper

Country Status (1)

Country Link
CA (1) CA890894A (en)

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