CA868525A - Electron beam circuit pattern generator - Google Patents

Electron beam circuit pattern generator

Info

Publication number
CA868525A
CA868525A CA868525A CA868525DA CA868525A CA 868525 A CA868525 A CA 868525A CA 868525 A CA868525 A CA 868525A CA 868525D A CA868525D A CA 868525DA CA 868525 A CA868525 A CA 868525A
Authority
CA
Canada
Prior art keywords
electron beam
circuit pattern
pattern generator
beam circuit
generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA868525A
Inventor
R. Wrenner Warren
Hermann Karl
V. Riley Joseph
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Publication date
Application granted granted Critical
Publication of CA868525A publication Critical patent/CA868525A/en
Expired legal-status Critical Current

Links

CA868525A Electron beam circuit pattern generator Expired CA868525A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA868525T

Publications (1)

Publication Number Publication Date
CA868525A true CA868525A (en) 1971-04-13

Family

ID=36354621

Family Applications (1)

Application Number Title Priority Date Filing Date
CA868525A Expired CA868525A (en) Electron beam circuit pattern generator

Country Status (1)

Country Link
CA (1) CA868525A (en)

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