CA853180A - Rf sputtering method and system - Google Patents

Rf sputtering method and system

Info

Publication number
CA853180A
CA853180A CA853180A CA853180DA CA853180A CA 853180 A CA853180 A CA 853180A CA 853180 A CA853180 A CA 853180A CA 853180D A CA853180D A CA 853180DA CA 853180 A CA853180 A CA 853180A
Authority
CA
Canada
Prior art keywords
sputtering method
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA853180A
Inventor
John H. Cash, Jr.
A. Cunningham James
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Publication date
Application granted granted Critical
Publication of CA853180A publication Critical patent/CA853180A/en
Expired legal-status Critical Current

Links

CA853180A Rf sputtering method and system Expired CA853180A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA853180T

Publications (1)

Publication Number Publication Date
CA853180A true CA853180A (en) 1970-10-06

Family

ID=36338804

Family Applications (1)

Application Number Title Priority Date Filing Date
CA853180A Expired CA853180A (en) Rf sputtering method and system

Country Status (1)

Country Link
CA (1) CA853180A (en)

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