CA857316A - Sputtering apparatus - Google Patents

Sputtering apparatus

Info

Publication number
CA857316A
CA857316A CA857316A CA857316DA CA857316A CA 857316 A CA857316 A CA 857316A CA 857316 A CA857316 A CA 857316A CA 857316D A CA857316D A CA 857316DA CA 857316 A CA857316 A CA 857316A
Authority
CA
Canada
Prior art keywords
sputtering apparatus
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA857316A
Inventor
Hayakawa Shigeru
Wasa Kiyotaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Publication date
Application granted granted Critical
Publication of CA857316A publication Critical patent/CA857316A/en
Expired legal-status Critical Current

Links

CA857316A Sputtering apparatus Expired CA857316A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA857316T

Publications (1)

Publication Number Publication Date
CA857316A true CA857316A (en) 1970-12-01

Family

ID=36342826

Family Applications (1)

Application Number Title Priority Date Filing Date
CA857316A Expired CA857316A (en) Sputtering apparatus

Country Status (1)

Country Link
CA (1) CA857316A (en)

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