CA832694A - Method for sputtering - Google Patents

Method for sputtering

Info

Publication number
CA832694A
CA832694A CA832694A CA832694DA CA832694A CA 832694 A CA832694 A CA 832694A CA 832694 A CA832694 A CA 832694A CA 832694D A CA832694D A CA 832694DA CA 832694 A CA832694 A CA 832694A
Authority
CA
Canada
Prior art keywords
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA832694A
Inventor
D. Davidse Pieter
I. Maissel Leon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Publication date
Application granted granted Critical
Publication of CA832694A publication Critical patent/CA832694A/en
Expired legal-status Critical Current

Links

CA832694A Method for sputtering Expired CA832694A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA832694T

Publications (1)

Publication Number Publication Date
CA832694A true CA832694A (en) 1970-01-20

Family

ID=36310154

Family Applications (1)

Application Number Title Priority Date Filing Date
CA832694A Expired CA832694A (en) Method for sputtering

Country Status (1)

Country Link
CA (1) CA832694A (en)

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