CA836776A - Electron beam recording process - Google Patents

Electron beam recording process

Info

Publication number
CA836776A
CA836776A CA836776A CA836776DA CA836776A CA 836776 A CA836776 A CA 836776A CA 836776 A CA836776 A CA 836776A CA 836776D A CA836776D A CA 836776DA CA 836776 A CA836776 A CA 836776A
Authority
CA
Canada
Prior art keywords
electron beam
recording process
beam recording
electron
recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA836776A
Inventor
Berman Elliot
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northrop Grumman Guidance and Electronics Co Inc
Original Assignee
Itek Corp
Publication date
Application granted granted Critical
Publication of CA836776A publication Critical patent/CA836776A/en
Expired legal-status Critical Current

Links

CA836776A Electron beam recording process Expired CA836776A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA836776T

Publications (1)

Publication Number Publication Date
CA836776A true CA836776A (en) 1970-03-10

Family

ID=36320972

Family Applications (1)

Application Number Title Priority Date Filing Date
CA836776A Expired CA836776A (en) Electron beam recording process

Country Status (1)

Country Link
CA (1) CA836776A (en)

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