CA822800A - Method and system for trimming thin films by electron beam - Google Patents

Method and system for trimming thin films by electron beam

Info

Publication number
CA822800A
CA822800A CA822800A CA822800DA CA822800A CA 822800 A CA822800 A CA 822800A CA 822800 A CA822800 A CA 822800A CA 822800D A CA822800D A CA 822800DA CA 822800 A CA822800 A CA 822800A
Authority
CA
Canada
Prior art keywords
electron beam
thin films
trimming thin
trimming
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA822800A
Inventor
Joseph W. Rovan, Sr.
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RTX Corp
Original Assignee
United Aircraft Corp
Publication date
Application granted granted Critical
Publication of CA822800A publication Critical patent/CA822800A/en
Expired legal-status Critical Current

Links

CA822800A Method and system for trimming thin films by electron beam Expired CA822800A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA822800T

Publications (1)

Publication Number Publication Date
CA822800A true CA822800A (en) 1969-09-09

Family

ID=36300213

Family Applications (1)

Application Number Title Priority Date Filing Date
CA822800A Expired CA822800A (en) Method and system for trimming thin films by electron beam

Country Status (1)

Country Link
CA (1) CA822800A (en)

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