CA3166712A1 - Laser-pumped plasma light source and plasma ignition method - Google Patents

Laser-pumped plasma light source and plasma ignition method Download PDF

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Publication number
CA3166712A1
CA3166712A1 CA3166712A CA3166712A CA3166712A1 CA 3166712 A1 CA3166712 A1 CA 3166712A1 CA 3166712 A CA3166712 A CA 3166712A CA 3166712 A CA3166712 A CA 3166712A CA 3166712 A1 CA3166712 A1 CA 3166712A1
Authority
CA
Canada
Prior art keywords
laser
plasma
light source
laser beam
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CA3166712A
Other languages
English (en)
French (fr)
Inventor
Dmitry Borisovich Abramenko
Robert Rafilevich Gayasov
Vladimir Mikhailovich KRIVTSUN
Aleksandr Andreevich LASH
Yurii Borisovich Kiryukhin
Denis Alexandrovich Glushkov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Isteq BV
RND ISAN Ltd
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from RU2020109782A external-priority patent/RU2732999C1/ru
Priority claimed from US16/814,317 external-priority patent/US10770282B1/en
Application filed by Individual filed Critical Individual
Publication of CA3166712A1 publication Critical patent/CA3166712A1/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02P—IGNITION, OTHER THAN COMPRESSION IGNITION, FOR INTERNAL-COMBUSTION ENGINES; TESTING OF IGNITION TIMING IN COMPRESSION-IGNITION ENGINES
    • F02P9/00—Electric spark ignition control, not otherwise provided for
    • F02P9/002—Control of spark intensity, intensifying, lengthening, suppression
    • F02P9/007—Control of spark intensity, intensifying, lengthening, suppression by supplementary electrical discharge in the pre-ionised electrode interspace of the sparking plug, e.g. plasma jet ignition

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Lasers (AREA)
  • Plasma Technology (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Glass Compositions (AREA)
CA3166712A 2020-03-05 2021-02-26 Laser-pumped plasma light source and plasma ignition method Pending CA3166712A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
RU2020109782 2020-03-05
RU2020109782A RU2732999C1 (ru) 2020-03-05 2020-03-05 Источник света с лазерной накачкой и способ зажигания плазмы
US16/814,317 2020-03-10
US16/814,317 US10770282B1 (en) 2020-03-10 2020-03-10 Laser-pumped plasma light source and plasma ignition method
PCT/RU2021/050049 WO2021177859A1 (en) 2020-03-05 2021-02-26 Laser-pumped plasma light source and plasma ignition method

Publications (1)

Publication Number Publication Date
CA3166712A1 true CA3166712A1 (en) 2021-09-10

Family

ID=75674911

Family Applications (1)

Application Number Title Priority Date Filing Date
CA3166712A Pending CA3166712A1 (en) 2020-03-05 2021-02-26 Laser-pumped plasma light source and plasma ignition method

Country Status (7)

Country Link
EP (1) EP4115441A1 (ja)
JP (1) JP6885636B1 (ja)
KR (1) KR20220133979A (ja)
CN (1) CN115210849A (ja)
CA (1) CA3166712A1 (ja)
IL (1) IL294983A (ja)
WO (1) WO2021177859A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230044314A (ko) * 2020-08-06 2023-04-03 아이에스티이큐 비.브이. 고휘도 레이저 펌핑 플라즈마 광원 및 수차 감소 방법

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5417349A (en) 1977-07-11 1979-02-08 Mitsubishi Aluminium Aluminum alloy brazing material for brazing used for fluxxfree brazing in high vacuum or nonoxidizable atomosphere
DD243629A3 (de) 1983-11-01 1987-03-11 Walter Gaertner Strahlungsquelle fuer optische geraete, insbesondere fuer fotolithografische abbildungssysteme
US6972421B2 (en) * 2000-06-09 2005-12-06 Cymer, Inc. Extreme ultraviolet light source
JP5557487B2 (ja) * 2009-07-30 2014-07-23 ウシオ電機株式会社 光源装置
RU2539970C2 (ru) 2012-12-17 2015-01-27 Общество с ограниченной ответственностью "РнД-ИСАН" Источник света с лазерной накачкой и способ генерации излучения
RU2534223C1 (ru) 2013-04-11 2014-11-27 Общество с ограниченной ответственностью "РнД-ИСАН" Источник света с лазерной накачкой и способ генерации излучения
KR102088363B1 (ko) * 2013-12-05 2020-04-14 삼성전자주식회사 플라즈마 광원 장치 및 플라즈마 광 생성 방법
KR102345537B1 (ko) * 2014-12-11 2021-12-30 삼성전자주식회사 플라즈마 광원, 및 그 광원을 포함하는 검사 장치
US10057973B2 (en) 2015-05-14 2018-08-21 Excelitas Technologies Corp. Electrodeless single low power CW laser driven plasma lamp
US10887974B2 (en) * 2015-06-22 2021-01-05 Kla Corporation High efficiency laser-sustained plasma light source
US10244613B2 (en) 2015-10-04 2019-03-26 Kla-Tencor Corporation System and method for electrodeless plasma ignition in laser-sustained plasma light source
US9865447B2 (en) * 2016-03-28 2018-01-09 Kla-Tencor Corporation High brightness laser-sustained plasma broadband source
KR20190034018A (ko) * 2017-09-22 2019-04-01 삼성전자주식회사 레이저 유도 플라즈마(lip) 기반 원자발광 분광장치, 그 장치를 포함한 반도체 제조설비, 및 그 장치를 이용한 반도체 소자 제조방법

Also Published As

Publication number Publication date
JP6885636B1 (ja) 2021-06-16
JP2021141037A (ja) 2021-09-16
CN115210849A (zh) 2022-10-18
WO2021177859A1 (en) 2021-09-10
KR20220133979A (ko) 2022-10-05
IL294983A (en) 2022-09-01
EP4115441A1 (en) 2023-01-11

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