CA3041101C - Integrated mems switches for selectively coupling light in and out of a waveguide - Google Patents
Integrated mems switches for selectively coupling light in and out of a waveguide Download PDFInfo
- Publication number
- CA3041101C CA3041101C CA3041101A CA3041101A CA3041101C CA 3041101 C CA3041101 C CA 3041101C CA 3041101 A CA3041101 A CA 3041101A CA 3041101 A CA3041101 A CA 3041101A CA 3041101 C CA3041101 C CA 3041101C
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- optical
- waveguide
- optical switch
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0083—Optical properties
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/88—Lidar systems specially adapted for specific applications
- G01S17/89—Lidar systems specially adapted for specific applications for mapping or imaging
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4814—Constructional features, e.g. arrangements of optical elements of transmitters alone
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4816—Constructional features, e.g. arrangements of optical elements of receivers alone
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
- G01S7/481—Constructional features, e.g. arrangements of optical elements
- G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/007—Optical devices or arrangements for the control of light using movable or deformable optical elements the movable or deformable optical element controlling the colour, i.e. a spectral characteristic, of the light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3524—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being refractive
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3524—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being refractive
- G02B6/3526—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being refractive the optical element being a lens
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3534—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being diffractive, i.e. a grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
- G02B6/355—1x2 switch, i.e. one input and a selectable single output of two possible outputs
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04J—MULTIPLEX COMMUNICATION
- H04J14/00—Optical multiplex systems
- H04J14/02—Wavelength-division multiplex systems
- H04J14/0201—Add-and-drop multiplexing
- H04J14/0215—Architecture aspects
- H04J14/022—For interconnection of WDM optical networks
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04Q—SELECTING
- H04Q11/00—Selecting arrangements for multiplex systems
- H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
- H04Q11/0003—Details
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04Q—SELECTING
- H04Q11/00—Selecting arrangements for multiplex systems
- H04Q11/0001—Selecting arrangements for multiplex systems using optical switching
- H04Q11/0005—Switch and router aspects
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/045—Optical switches
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12145—Switch
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Computer Networks & Wireless Communication (AREA)
- Optics & Photonics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Astronomy & Astrophysics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Signal Processing (AREA)
- Electromagnetism (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Optical Communication System (AREA)
- Micromachines (AREA)
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662498158P | 2016-12-16 | 2016-12-16 | |
| US62/498,158 | 2016-12-16 | ||
| US201762450855P | 2017-01-26 | 2017-01-26 | |
| US62/450,855 | 2017-01-26 | ||
| US201762516602P | 2017-06-07 | 2017-06-07 | |
| US62/516,602 | 2017-06-07 | ||
| PCT/US2017/066885 WO2018112447A1 (en) | 2016-12-16 | 2017-12-16 | Integrated mems switches for selectively coupling light in and out of a waveguide |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA3041101A1 CA3041101A1 (en) | 2018-06-21 |
| CA3041101C true CA3041101C (en) | 2021-06-22 |
Family
ID=60972390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA3041101A Active CA3041101C (en) | 2016-12-16 | 2017-12-16 | Integrated mems switches for selectively coupling light in and out of a waveguide |
Country Status (6)
| Country | Link |
|---|---|
| US (3) | US10739520B2 (enExample) |
| EP (2) | EP3555681B1 (enExample) |
| JP (3) | JP6880190B2 (enExample) |
| KR (2) | KR102251273B1 (enExample) |
| CA (1) | CA3041101C (enExample) |
| WO (2) | WO2018112447A1 (enExample) |
Families Citing this family (50)
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| KR102251273B1 (ko) * | 2016-12-16 | 2021-05-14 | 더 차레스 스타크 드레이퍼 래보레이토리, 인코포레이티드 | 전 고체 광학 송/수신 단말기 |
| EP3635460B1 (en) * | 2017-06-07 | 2021-12-08 | The Charles Stark Draper Laboratory, Inc. | Integrated mems switches for selectively coupling light in and out of a waveguide |
| WO2019099470A1 (en) * | 2017-11-14 | 2019-05-23 | The Charles Stark Draper Laboratory, Inc. | Foveal patterned optical switches for mems lidar beam steering unit |
| US10838150B2 (en) | 2017-11-28 | 2020-11-17 | The Charles Stark Draper Laboratory, Inc. | Coupling lens aberration correction through grating design in a switched focal plane array |
| US10156770B1 (en) * | 2018-02-08 | 2018-12-18 | The Charles Stark Draper Laboratory, Inc. | Packaging and interconnect systems for edge-emitting light modulators based on surface acoustic wave (SAW) modulation |
| US10908372B2 (en) * | 2018-03-05 | 2021-02-02 | The Charles Stark Draper Laboratory, Inc. | Systems and methods for isolating excitation and signal paths for chip-scale LIDAR |
| US10848152B2 (en) | 2018-03-15 | 2020-11-24 | Analog Devices Global Unlimited Company | Optically isolated micromachined (MEMS) switches and related methods comprising a light transmitting adhesive layer between an optical receiver and a light source |
| US11441353B2 (en) * | 2018-06-19 | 2022-09-13 | The Regents Of The University Of California | Beam-steering system based on a MEMS-actuated vertical-coupler array |
| US11536805B2 (en) | 2018-06-25 | 2022-12-27 | Silc Technologies, Inc. | Optical switching for tuning direction of LIDAR output signals |
| US20200116842A1 (en) * | 2018-10-12 | 2020-04-16 | Silc Technologies, Inc. | Optical switching in lidar systems |
| WO2020087016A1 (en) * | 2018-10-26 | 2020-04-30 | The Charles Stark Draper Laboratory, Inc. | Adaptive lidar scanning techniques for improved frame rate and safety |
| WO2020097574A2 (en) | 2018-11-09 | 2020-05-14 | The Charles Stark Draper Laboratory, Inc. | Dual-polarization lidar systems and methods |
| DE102018222721A1 (de) | 2018-12-21 | 2020-06-25 | Robert Bosch Gmbh | LIDAR-Sensor für ein LIDAR-System |
| GB2583172B (en) * | 2019-02-06 | 2023-09-13 | Rockley Photonics Ltd | Optical components for imaging |
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| CN110233677A (zh) * | 2019-05-20 | 2019-09-13 | 电子科技大学 | 一种基于光正交码的激光通信测距装置及方法 |
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| US11906785B2 (en) * | 2019-07-01 | 2024-02-20 | University Of Central Florida Research Foundation, Inc. | Photonic integrated circuit outcoupling array for imaging-based beam steering |
| CN110333511B (zh) * | 2019-07-22 | 2021-10-22 | 西安知微传感技术有限公司 | 一种收发同步激光雷达光学系统 |
| CN112444916B (zh) * | 2019-08-27 | 2024-02-02 | 新加坡国立大学 | 多层波导装置及其制造方法 |
| US10823913B1 (en) | 2019-09-27 | 2020-11-03 | The Charles Stark Draper Laboratory, Inc. | Optical switch controllable by vertical motion MEMS structure |
| US11237335B1 (en) | 2019-09-27 | 2022-02-01 | The Charles Stark Draper Laboratory, Inc. | Optical switch controllable by vertical motion MEMS structure |
| EP4231089A3 (en) * | 2019-11-12 | 2024-03-13 | Pointcloud Inc. | Dual path light detection and ranging system |
| US11953625B2 (en) * | 2020-01-27 | 2024-04-09 | The Charles Stark Draper Laboratory, Inc. | Beamsplitter architecture for monostatic LiDAR |
| EP3907525B1 (en) | 2020-05-05 | 2023-07-05 | The Charles Stark Draper Laboratory, Inc. | Multi-mode signal lidar collection methods and systems |
| US11428785B2 (en) * | 2020-06-12 | 2022-08-30 | Ours Technology, Llc | Lidar pixel with active polarization control |
| US20220003842A1 (en) * | 2020-07-02 | 2022-01-06 | Robert Bosch Gmbh | Lidar Module With Monolithic Array |
| DE102021206988A1 (de) * | 2020-07-02 | 2022-01-05 | Robert Bosch Gesellschaft mit beschränkter Haftung | Mems-schalter für die optische kopplung |
| US11307483B2 (en) | 2020-07-02 | 2022-04-19 | Robert Bosch Gmbh | MEMS optical switch with dual cantilever couplers |
| US11360270B2 (en) | 2020-07-02 | 2022-06-14 | Robert Bosch Gmbh | MEMS optical switch with stop control |
| US11340399B2 (en) | 2020-07-02 | 2022-05-24 | Robert Bosch Gmbh | In-plane MEMS optical switch |
| CN115867840A (zh) * | 2020-07-10 | 2023-03-28 | 沃扬光电公司 | 发射器阵列 |
| US11699862B2 (en) | 2020-08-21 | 2023-07-11 | The Charles Stark Draper Laboratory, Inc. | Two-dimensional planar and crossover-free beamforming network architecture |
| CN112305676B (zh) * | 2020-09-23 | 2021-10-08 | 浙江大学 | 基于静电梳驱动的硅基mems光开关及n×n阵列 |
| CN114280575B (zh) * | 2020-09-27 | 2025-11-11 | 北京万集科技股份有限公司 | 一种基于微环光开关网络的激光雷达光学芯片 |
| WO2022103997A1 (en) * | 2020-11-15 | 2022-05-19 | Naiqian Han | Optical mems based intracranial pressure and intracranial temperature monitor |
| US20210133547A1 (en) * | 2020-11-17 | 2021-05-06 | Intel Corporation | High efficiency optical neural network |
| DE102020214458A1 (de) | 2020-11-18 | 2022-05-19 | Robert Bosch Gesellschaft mit beschränkter Haftung | Scanvorrichtung zum Aussenden von Lichtstrahlen einer Lichtquelle und/oder zum Abbilden von Lichtstrahlen auf einen Detektor, LiDAR-Sensor und Verfahren zur Ansteuerung einer Scanvorrichtung |
| KR102799813B1 (ko) * | 2021-01-26 | 2025-04-25 | 재단법인대구경북과학기술원 | 멀티캐스트 스위치 어레이 및 이를 이용한 빔 조향 장치 |
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| WO2022192539A1 (en) * | 2021-03-10 | 2022-09-15 | Neophotonics Corporation | Lidar with 4d object classification, solid state optical scanning arrays, and effective pixel designs |
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| CN117425837A (zh) | 2021-05-10 | 2024-01-19 | 奈伊系统公司 | 具有二维硅光子MEMS开关阵列的伪单站LiDAR |
| CN117597603A (zh) | 2021-05-19 | 2024-02-23 | 尼亚系统有限公司 | 具有微透镜阵列及集成光子开关阵列的lidar |
| EP4341733B1 (fr) * | 2021-09-06 | 2024-07-31 | Airbus Defence and Space SAS | Structure pour collecter de la lumiere |
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2017
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- 2017-12-16 EP EP17829428.6A patent/EP3555681B1/en active Active
- 2017-12-16 WO PCT/US2017/066885 patent/WO2018112447A1/en not_active Ceased
- 2017-12-16 EP EP17833029.6A patent/EP3555682B1/en active Active
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- 2017-12-16 WO PCT/US2017/000095 patent/WO2018111316A1/en not_active Ceased
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- 2017-12-16 US US15/844,527 patent/US10473862B2/en active Active
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| JP7133552B2 (ja) | 2022-09-08 |
| US20180172918A1 (en) | 2018-06-21 |
| WO2018111316A1 (en) | 2018-06-21 |
| US20180175961A1 (en) | 2018-06-21 |
| KR20190084311A (ko) | 2019-07-16 |
| JP6880190B2 (ja) | 2021-06-02 |
| WO2018112447A1 (en) | 2018-06-21 |
| KR20190093200A (ko) | 2019-08-08 |
| JP2020504834A (ja) | 2020-02-13 |
| KR102251273B1 (ko) | 2021-05-14 |
| EP3555681A1 (en) | 2019-10-23 |
| US10739520B2 (en) | 2020-08-11 |
| EP3555682B1 (en) | 2024-04-10 |
| JP2019537068A (ja) | 2019-12-19 |
| US20200041728A1 (en) | 2020-02-06 |
| US10473862B2 (en) | 2019-11-12 |
| EP3555682A1 (en) | 2019-10-23 |
| EP3555681B1 (en) | 2021-04-14 |
| JP2021012401A (ja) | 2021-02-04 |
| US10684420B2 (en) | 2020-06-16 |
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