CA2984214A1 - Integration de micro-dispositifs dans un substrat de systeme - Google Patents

Integration de micro-dispositifs dans un substrat de systeme Download PDF

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Publication number
CA2984214A1
CA2984214A1 CA2984214A CA2984214A CA2984214A1 CA 2984214 A1 CA2984214 A1 CA 2984214A1 CA 2984214 A CA2984214 A CA 2984214A CA 2984214 A CA2984214 A CA 2984214A CA 2984214 A1 CA2984214 A1 CA 2984214A1
Authority
CA
Canada
Prior art keywords
substrate
devices
layer
cartridge
micro
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA2984214A
Other languages
English (en)
Inventor
Gholamreza Chaji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Vuereal Inc
Original Assignee
Vuereal Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to CA2984214A priority Critical patent/CA2984214A1/fr
Application filed by Vuereal Inc filed Critical Vuereal Inc
Priority to PCT/IB2017/057310 priority patent/WO2018096455A1/fr
Priority to KR1020197017985A priority patent/KR102438882B1/ko
Priority to US15/820,683 priority patent/US10468472B2/en
Priority to KR1020227029727A priority patent/KR20220123750A/ko
Priority to CN201780072978.0A priority patent/CN110036492B/zh
Priority to US16/206,393 priority patent/US10916523B2/en
Publication of CA2984214A1 publication Critical patent/CA2984214A1/fr
Priority to US16/542,010 priority patent/US10978530B2/en
Priority to US16/542,019 priority patent/US10998352B2/en
Priority to US17/017,071 priority patent/US20200411471A1/en
Priority to US17/083,403 priority patent/US20210074573A1/en
Priority to US17/218,589 priority patent/US20210242287A1/en
Priority to US18/053,901 priority patent/US20230078708A1/en
Priority to US18/209,105 priority patent/US20230326937A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/075Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
    • H01L25/0753Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005Processes
    • H01L33/0093Wafer bonding; Removal of the growth substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005Processes
    • H01L33/0095Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/02Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Led Device Packages (AREA)
CA2984214A 2016-11-25 2017-10-30 Integration de micro-dispositifs dans un substrat de systeme Abandoned CA2984214A1 (fr)

Priority Applications (14)

Application Number Priority Date Filing Date Title
CA2984214A CA2984214A1 (fr) 2017-10-30 2017-10-30 Integration de micro-dispositifs dans un substrat de systeme
PCT/IB2017/057310 WO2018096455A1 (fr) 2016-11-25 2017-11-22 Intégration de micro-dispositifs dans un substrat de système
KR1020197017985A KR102438882B1 (ko) 2016-11-25 2017-11-22 시스템 기판으로의 마이크로 디바이스의 집적
US15/820,683 US10468472B2 (en) 2016-11-25 2017-11-22 Integration of micro-devices into system substrate
KR1020227029727A KR20220123750A (ko) 2016-11-25 2017-11-22 시스템 기판으로의 마이크로 디바이스의 집적
CN201780072978.0A CN110036492B (zh) 2016-11-25 2017-11-22 将微装置集成到系统衬底中
US16/206,393 US10916523B2 (en) 2016-11-25 2018-11-30 Microdevice transfer setup and integration of micro-devices into system substrate
US16/542,010 US10978530B2 (en) 2016-11-25 2019-08-15 Integration of microdevices into system substrate
US16/542,019 US10998352B2 (en) 2016-11-25 2019-08-15 Integration of microdevices into system substrate
US17/017,071 US20200411471A1 (en) 2016-11-25 2020-09-10 Microdevice transfer setup and integration of micro-devices into system substrate
US17/083,403 US20210074573A1 (en) 2016-11-25 2020-10-29 Integration of microdevices into system substrate
US17/218,589 US20210242287A1 (en) 2016-11-25 2021-03-31 Integration of microdevices into system substrate
US18/053,901 US20230078708A1 (en) 2016-11-25 2022-11-09 Integration of microdevices into system substrate
US18/209,105 US20230326937A1 (en) 2016-11-25 2023-06-13 Integration of microdevices into system substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA2984214A CA2984214A1 (fr) 2017-10-30 2017-10-30 Integration de micro-dispositifs dans un substrat de systeme

Publications (1)

Publication Number Publication Date
CA2984214A1 true CA2984214A1 (fr) 2019-04-30

Family

ID=66329164

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2984214A Abandoned CA2984214A1 (fr) 2016-11-25 2017-10-30 Integration de micro-dispositifs dans un substrat de systeme

Country Status (1)

Country Link
CA (1) CA2984214A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021108903A1 (fr) * 2019-12-02 2021-06-10 Vuereal Inc. Création de stadification dans un fond de panier pour l'intégration de micro-dispositifs
CN112967976A (zh) * 2020-06-19 2021-06-15 重庆康佳光电技术研究院有限公司 一种巨量转移装置及转移方法
US11777059B2 (en) 2019-11-20 2023-10-03 Lumileds Llc Pixelated light-emitting diode for self-aligned photoresist patterning

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11777059B2 (en) 2019-11-20 2023-10-03 Lumileds Llc Pixelated light-emitting diode for self-aligned photoresist patterning
WO2021108903A1 (fr) * 2019-12-02 2021-06-10 Vuereal Inc. Création de stadification dans un fond de panier pour l'intégration de micro-dispositifs
CN112967976A (zh) * 2020-06-19 2021-06-15 重庆康佳光电技术研究院有限公司 一种巨量转移装置及转移方法

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Legal Events

Date Code Title Description
FZDE Discontinued

Effective date: 20210831

FZDE Discontinued

Effective date: 20210831