CA2959203C - Measurement of acceleration - Google Patents
Measurement of acceleration Download PDFInfo
- Publication number
- CA2959203C CA2959203C CA2959203A CA2959203A CA2959203C CA 2959203 C CA2959203 C CA 2959203C CA 2959203 A CA2959203 A CA 2959203A CA 2959203 A CA2959203 A CA 2959203A CA 2959203 C CA2959203 C CA 2959203C
- Authority
- CA
- Canada
- Prior art keywords
- proof mass
- flexure
- flexures
- force
- displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000001133 acceleration Effects 0.000 title claims abstract description 29
- 238000005259 measurement Methods 0.000 title description 21
- 230000010355 oscillation Effects 0.000 claims abstract description 40
- 238000006073 displacement reaction Methods 0.000 claims abstract description 38
- 230000005484 gravity Effects 0.000 claims abstract description 29
- 230000007423 decrease Effects 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 13
- 230000008569 process Effects 0.000 claims description 10
- 230000003247 decreasing effect Effects 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 230000000694 effects Effects 0.000 abstract description 13
- 230000035945 sensitivity Effects 0.000 description 13
- 235000012431 wafers Nutrition 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 229910052710 silicon Inorganic materials 0.000 description 8
- 239000010703 silicon Substances 0.000 description 8
- 125000006850 spacer group Chemical group 0.000 description 7
- 230000008859 change Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 230000003534 oscillatory effect Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
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- 230000007246 mechanism Effects 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
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- 238000010899 nucleation Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
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- 230000003595 spectral effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V7/00—Measuring gravitational fields or waves; Gravimetric prospecting or detecting
- G01V7/005—Measuring gravitational fields or waves; Gravimetric prospecting or detecting using a resonating body or device, e.g. string
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V7/00—Measuring gravitational fields or waves; Gravimetric prospecting or detecting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V7/00—Measuring gravitational fields or waves; Gravimetric prospecting or detecting
- G01V7/02—Details
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
- G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
- G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geophysics (AREA)
- Pressure Sensors (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
- Geophysics And Detection Of Objects (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1415087.4 | 2014-08-26 | ||
| GBGB1415087.4A GB201415087D0 (en) | 2014-08-26 | 2014-08-26 | Measurement of acceleration |
| PCT/EP2015/069572 WO2016030435A1 (en) | 2014-08-26 | 2015-08-26 | Measurement of acceleration |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2959203A1 CA2959203A1 (en) | 2016-03-03 |
| CA2959203C true CA2959203C (en) | 2023-09-26 |
Family
ID=51727051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA2959203A Active CA2959203C (en) | 2014-08-26 | 2015-08-26 | Measurement of acceleration |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10802042B2 (enExample) |
| EP (1) | EP3186664B1 (enExample) |
| JP (1) | JP2017526919A (enExample) |
| CA (1) | CA2959203C (enExample) |
| GB (1) | GB201415087D0 (enExample) |
| WO (1) | WO2016030435A1 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017105596A2 (en) * | 2015-10-06 | 2017-06-22 | The Charles Stark Draper Laboratory, Inc. | Electric field detector system |
| WO2017105594A2 (en) * | 2015-10-06 | 2017-06-22 | The Charles Stark Draper Laboratory, Inc. | Magnetic field detector system |
| US10531805B2 (en) | 2016-09-30 | 2020-01-14 | The Charles Stark Draper Laboratory, Inc. | Biophysical sensing systems and methods using non-contact electric field detectors |
| CN107015287B (zh) | 2017-03-09 | 2018-12-11 | 中国科学院电工研究所 | 一种重力梯度测量装置及测量方法 |
| WO2018187307A1 (en) | 2017-04-04 | 2018-10-11 | The Charles Stark Draper Laboratory, Inc. | Miniature electric field detector |
| US11525870B2 (en) | 2017-10-05 | 2022-12-13 | The Charles Stark Draper Laboratory, Inc. | Electromagnetic gradiometers |
| US12089941B2 (en) | 2019-03-15 | 2024-09-17 | The Charles Stark Draper Laboratory, Inc. | Miniature electric field detector |
| US11054539B2 (en) * | 2019-10-30 | 2021-07-06 | Vadim Kukharev | Methods of searching for mineral resources by analyzing geochemical and other anomalies during gravitational resonances |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3209590A1 (de) | 1982-03-17 | 1983-09-29 | Bodenseewerk Geosystem GmbH, 7770 Überlingen | Gravimeter |
| US4851080A (en) | 1987-06-29 | 1989-07-25 | Massachusetts Institute Of Technology | Resonant accelerometer |
| US5165279A (en) | 1989-07-06 | 1992-11-24 | Sundstrand Corporation | Monolithic accelerometer with flexurally mounted force transducer |
| US6196067B1 (en) * | 1998-05-05 | 2001-03-06 | California Institute Of Technology | Silicon micromachined accelerometer/seismometer and method of making the same |
| US6776042B2 (en) | 2002-01-25 | 2004-08-17 | Kinemetrics, Inc. | Micro-machined accelerometer |
| US6799459B2 (en) | 2002-03-06 | 2004-10-05 | Lockheed Martin Corporation | Gravity gradiometer and method for calculating a gravity tensor with increased accuracy |
| JP2004340858A (ja) * | 2003-05-19 | 2004-12-02 | Sharp Corp | 物理量センサーおよびその製造方法 |
| US7305879B2 (en) | 2005-03-18 | 2007-12-11 | University Of Maryland | Cross-component superconducting gravity gradiometer with improved linearity and sensitivity and method for gravity gradient sensing |
| US7337671B2 (en) * | 2005-06-03 | 2008-03-04 | Georgia Tech Research Corp. | Capacitive microaccelerometers and fabrication methods |
| JP2007256236A (ja) * | 2006-03-27 | 2007-10-04 | Matsushita Electric Ind Co Ltd | 加速度センサ |
| US8026714B2 (en) * | 2008-03-06 | 2011-09-27 | Symphony Acoustics, Inc. | Accelerometer with enhanced DC stability |
| US8528405B2 (en) * | 2009-12-04 | 2013-09-10 | The Charles Stark Draper Laboratory, Inc. | Flexure assemblies and methods for manufacturing and using the same |
| JP2013213731A (ja) | 2012-04-02 | 2013-10-17 | Nippon Dempa Kogyo Co Ltd | 外力検出センサ及び外力検出装置 |
| JP2014119412A (ja) * | 2012-12-19 | 2014-06-30 | Seiko Epson Corp | 多軸物理量検出装置、多軸物理量検出装置の製造方法、電子機器および移動体 |
-
2014
- 2014-08-26 GB GBGB1415087.4A patent/GB201415087D0/en not_active Ceased
-
2015
- 2015-08-26 EP EP15812958.5A patent/EP3186664B1/en active Active
- 2015-08-26 WO PCT/EP2015/069572 patent/WO2016030435A1/en not_active Ceased
- 2015-08-26 CA CA2959203A patent/CA2959203C/en active Active
- 2015-08-26 JP JP2017511195A patent/JP2017526919A/ja active Pending
- 2015-08-26 US US15/506,675 patent/US10802042B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US10802042B2 (en) | 2020-10-13 |
| CA2959203A1 (en) | 2016-03-03 |
| GB201415087D0 (en) | 2014-10-08 |
| EP3186664B1 (en) | 2023-06-07 |
| JP2017526919A (ja) | 2017-09-14 |
| EP3186664C0 (en) | 2023-06-07 |
| WO2016030435A1 (en) | 2016-03-03 |
| US20170276697A1 (en) | 2017-09-28 |
| EP3186664A1 (en) | 2017-07-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request |
Effective date: 20200807 |
|
| EEER | Examination request |
Effective date: 20200807 |
|
| EEER | Examination request |
Effective date: 20200807 |
|
| EEER | Examination request |
Effective date: 20200807 |
|
| EEER | Examination request |
Effective date: 20200807 |
|
| EEER | Examination request |
Effective date: 20200807 |
|
| EEER | Examination request |
Effective date: 20200807 |
|
| EEER | Examination request |
Effective date: 20200807 |