CA2936523A1 - Micro dispositif selectif de transfert vers un substrat recepteur - Google Patents

Micro dispositif selectif de transfert vers un substrat recepteur Download PDF

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Publication number
CA2936523A1
CA2936523A1 CA2936523A CA2936523A CA2936523A1 CA 2936523 A1 CA2936523 A1 CA 2936523A1 CA 2936523 A CA2936523 A CA 2936523A CA 2936523 A CA2936523 A CA 2936523A CA 2936523 A1 CA2936523 A1 CA 2936523A1
Authority
CA
Canada
Prior art keywords
substrate
force
donor
micro devices
receiver
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA2936523A
Other languages
English (en)
Inventor
G. Reza Chaji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CA2936523A priority Critical patent/CA2936523A1/fr
Priority to US15/442,293 priority patent/US20170215280A1/en
Publication of CA2936523A1 publication Critical patent/CA2936523A1/fr
Priority to US17/222,506 priority patent/US20210243894A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/50—Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
    • B81C99/002—Apparatus for assembling MEMS, e.g. micromanipulators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93—Batch processes
    • H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/93—Batch processes
    • H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/005—Processes
    • H01L33/0093—Wafer bonding; Removal of the growth substrate

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
CA2936523A 2016-01-21 2016-07-19 Micro dispositif selectif de transfert vers un substrat recepteur Abandoned CA2936523A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CA2936523A CA2936523A1 (fr) 2016-07-19 2016-07-19 Micro dispositif selectif de transfert vers un substrat recepteur
US15/442,293 US20170215280A1 (en) 2016-01-21 2017-02-24 Selective transfer of micro devices
US17/222,506 US20210243894A1 (en) 2016-01-21 2021-04-05 Selective transfer of micro devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA2936523A CA2936523A1 (fr) 2016-07-19 2016-07-19 Micro dispositif selectif de transfert vers un substrat recepteur

Publications (1)

Publication Number Publication Date
CA2936523A1 true CA2936523A1 (fr) 2018-01-19

Family

ID=60989348

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2936523A Abandoned CA2936523A1 (fr) 2016-01-21 2016-07-19 Micro dispositif selectif de transfert vers un substrat recepteur

Country Status (1)

Country Link
CA (1) CA2936523A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022207083A1 (fr) * 2021-03-30 2022-10-06 Ev Group E. Thallner Gmbh Procédé de séparation de structures d'un substrat

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022207083A1 (fr) * 2021-03-30 2022-10-06 Ev Group E. Thallner Gmbh Procédé de séparation de structures d'un substrat

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Legal Events

Date Code Title Description
FZDE Discontinued

Effective date: 20190719

FZDE Discontinued

Effective date: 20190719