CA2674571C - Interferometer maintaining optical relationship between elements - Google Patents

Interferometer maintaining optical relationship between elements Download PDF

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Publication number
CA2674571C
CA2674571C CA2674571A CA2674571A CA2674571C CA 2674571 C CA2674571 C CA 2674571C CA 2674571 A CA2674571 A CA 2674571A CA 2674571 A CA2674571 A CA 2674571A CA 2674571 C CA2674571 C CA 2674571C
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CA
Canada
Prior art keywords
mirror
assembly
movable
movable assembly
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CA2674571A
Other languages
English (en)
French (fr)
Other versions
CA2674571A1 (en
Inventor
Gregg Ressler
Donald W. Sting
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Agilent Technologies Inc
Original Assignee
Agilent Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agilent Technologies Inc filed Critical Agilent Technologies Inc
Publication of CA2674571A1 publication Critical patent/CA2674571A1/en
Application granted granted Critical
Publication of CA2674571C publication Critical patent/CA2674571C/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G01J3/453—Interferometric spectrometry by correlation of the amplitudes
    • G01J3/4535—Devices with moving mirror
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0202—Mechanical elements; Supports for optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0286—Constructional arrangements for compensating for fluctuations caused by temperature, humidity or pressure, or using cooling or temperature stabilization of parts of the device; Controlling the atmosphere inside a spectrometer, e.g. vacuum

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
CA2674571A 2007-01-12 2007-12-07 Interferometer maintaining optical relationship between elements Active CA2674571C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/622,815 US7630081B2 (en) 2007-01-12 2007-01-12 Interferometer maintaining optical relationship between elements
US11/622,815 2007-01-12
PCT/US2007/086713 WO2008088620A1 (en) 2007-01-12 2007-12-07 Interferometer maintaining optical relationship between elements

Publications (2)

Publication Number Publication Date
CA2674571A1 CA2674571A1 (en) 2008-07-24
CA2674571C true CA2674571C (en) 2015-04-21

Family

ID=39295494

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2674571A Active CA2674571C (en) 2007-01-12 2007-12-07 Interferometer maintaining optical relationship between elements

Country Status (7)

Country Link
US (1) US7630081B2 (enExample)
JP (1) JP5111520B2 (enExample)
CN (1) CN101583857B (enExample)
CA (1) CA2674571C (enExample)
DE (1) DE112007003242B4 (enExample)
GB (1) GB2458412B (enExample)
WO (1) WO2008088620A1 (enExample)

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US8092030B2 (en) 2006-04-12 2012-01-10 Plx, Inc. Mount for an optical structure and method of mounting an optical structure using such mount
US7995208B2 (en) * 2008-08-06 2011-08-09 Ftrx Llc Monolithic interferometer with optics of different material
US9001334B2 (en) * 2010-11-11 2015-04-07 Thermo Electron Scientific Instruments Llc Interferometer velocity control of beamsplitter and moving mirrors
US9798051B2 (en) 2011-02-28 2017-10-24 Plx, Inc. Mount for an optical structure having a grooved protruding member and method of mounting an optical structure using such mount
US20130138226A1 (en) 2011-11-23 2013-05-30 Ftrx Llc Quasi-translator, fourier modulator, fourier spectrometer, motion control system and methods for controlling same, and signal processor circuit
US9013814B2 (en) 2012-07-27 2015-04-21 Plx, Inc. Interferometer and optical assembly having beamsplitter securing apparatus and method of mounting same
US8933406B2 (en) 2012-12-21 2015-01-13 Agilent Technologies, Inc. Interferometer having multiple scan carriages
US9377600B2 (en) 2013-02-21 2016-06-28 Plx, Inc. Mounts for an optical structure having a grooved protruding member with a damping ring disposed in or on the groove and methods of mounting an optical structure using such mounts
WO2014179213A2 (en) * 2013-05-01 2014-11-06 R Jackson Mechanism for movement of a mirror in an interferometer, an interferometer incorporating the same and a fourier transform spectrometer incorporating the same
US10677722B2 (en) 2016-04-05 2020-06-09 University Of Notre Dame Du Lac Photothermal imaging device and system
EP3867629A1 (en) 2016-09-27 2021-08-25 Purdue Research Foundation Depth-resolved mid-infrared photothermal imaging of living cells and organisms with sub-mciron spatial resolution
US12644833B2 (en) 2016-09-27 2026-06-02 Purdue Research Foundation Depth-resolved mid-infrared photothermal imaging of living cells and organisms with sub-micron spatial resolution
EP4790429A2 (en) 2016-11-29 2026-08-12 Photothermal Spectroscopy Corp. Method and apparatus for chemical imaging atomic force microscope infrared spectroscopy
KR101860347B1 (ko) * 2016-11-29 2018-05-23 국방과학연구소 마이켈슨 간섭계의 하우징 시스템
JP6461446B1 (ja) 2017-07-06 2019-01-30 浜松ホトニクス株式会社 ミラーユニット及び光モジュール
US10942116B2 (en) 2017-10-09 2021-03-09 Photothermal Spectroscopy Corp. Method and apparatus for enhanced photo-thermal imaging and spectroscopy
KR102082769B1 (ko) * 2017-10-31 2020-02-28 국방과학연구소 이동반사경 고정구조를 갖는 마이켈슨 간섭계
US11486761B2 (en) 2018-06-01 2022-11-01 Photothermal Spectroscopy Corp. Photothermal infrared spectroscopy utilizing spatial light manipulation
DE102019103814B3 (de) * 2019-02-14 2020-07-02 Hochschule Trier - Trier University of Applied Sciences Vorrichtung zum optischen Messen einer Oberfläche
JP7422413B2 (ja) * 2019-02-28 2024-01-26 国立大学法人 香川大学 分光測定装置
US11480518B2 (en) 2019-12-03 2022-10-25 Photothermal Spectroscopy Corp. Asymmetric interferometric optical photothermal infrared spectroscopy
WO2021155363A1 (en) 2020-01-31 2021-08-05 Photothermal Spectroscopy Corp. Method and apparatus for high performance wide field photothermal infrared spectroscopy and imaging
US12369778B2 (en) 2020-06-26 2025-07-29 Photothermal Spectroscopy Corp. Method and apparatus for fiber optic photothermal imaging and spectroscopy
US11519861B2 (en) 2020-07-20 2022-12-06 Photothermal Spectroscopy Corp Fluorescence enhanced photothermal infrared spectroscopy and confocal fluorescence imaging
CN112394529B (zh) * 2020-11-27 2022-12-30 南京大学 一种单元件分束合束干涉仪
JP7666138B2 (ja) * 2021-05-31 2025-04-22 株式会社島津製作所 赤外光源装置およびフーリエ変換赤外分光光度計
US12277731B2 (en) * 2022-07-21 2025-04-15 Canon U.S.A., Inc. Methods and systems for system self-diagnosis

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US4710001A (en) 1986-11-21 1987-12-01 Hewlett-Packard Company Support for a moving mirror in an interferometer
US4801366A (en) * 1987-03-18 1989-01-31 Godfrey Jamie E Apparatuses and methods for analyzing macro-ions at electrophoretic steady state
US4773757A (en) * 1987-08-19 1988-09-27 Laser Precision Corporation High resolution spectrometer interferometer having an integrated alignment unit
JPH0641145Y2 (ja) * 1988-02-29 1994-10-26 株式会社島津製作所 平行運動装置
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US5486917A (en) 1991-10-09 1996-01-23 On-Line Technologies Inc Flexture plate motion-transfer mechanism, beam-splitter assembly, and interferometer incorporating the same
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KR100358476B1 (ko) * 1995-02-09 2003-04-11 포스 일렉트릭 에이/에스 스펙트로미터표준화방법
US5883712A (en) * 1997-05-21 1999-03-16 Nicolet Instrument Corporation Interferometer of an infrared spectrometer with dynamic moving mirror alignment
WO1999002939A1 (en) * 1997-07-14 1999-01-21 Spectral Dimensions, Inc. Methods and devices for very rapid scan interferometry
US6322037B1 (en) 1999-10-26 2001-11-27 Yokogawa Electric Corporation Moving mirror support device for photo-interferometer
US20020149777A1 (en) * 2001-04-12 2002-10-17 Schreiber Kenneth C. Support for a movable mirror in an interferometer
US6943892B2 (en) * 2003-01-29 2005-09-13 Sarnoff Corporation Instrument having a multi-mode optical element and method
US7312859B2 (en) * 2004-01-30 2007-12-25 Promet International, Inc. Optical fiber inspection device

Also Published As

Publication number Publication date
JP2010515918A (ja) 2010-05-13
CN101583857A (zh) 2009-11-18
DE112007003242T5 (de) 2009-11-26
US7630081B2 (en) 2009-12-08
HK1136345A1 (en) 2010-06-25
CA2674571A1 (en) 2008-07-24
WO2008088620A1 (en) 2008-07-24
GB0912325D0 (en) 2009-08-26
US20080170231A1 (en) 2008-07-17
GB2458412A (en) 2009-09-23
DE112007003242B4 (de) 2016-07-07
JP5111520B2 (ja) 2013-01-09
CN101583857B (zh) 2012-02-01
GB2458412B (en) 2011-05-18

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