CA2652179A1 - Pressure sensor for a pressure transmitter - Google Patents
Pressure sensor for a pressure transmitter Download PDFInfo
- Publication number
- CA2652179A1 CA2652179A1 CA002652179A CA2652179A CA2652179A1 CA 2652179 A1 CA2652179 A1 CA 2652179A1 CA 002652179 A CA002652179 A CA 002652179A CA 2652179 A CA2652179 A CA 2652179A CA 2652179 A1 CA2652179 A1 CA 2652179A1
- Authority
- CA
- Canada
- Prior art keywords
- pressure
- layers
- sensor
- reflection
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 230000004044 response Effects 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 36
- 239000012530 fluid Substances 0.000 claims description 22
- 239000013307 optical fiber Substances 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 18
- 230000008569 process Effects 0.000 claims description 18
- 238000001228 spectrum Methods 0.000 claims description 14
- 238000002955 isolation Methods 0.000 claims description 10
- 229910052594 sapphire Inorganic materials 0.000 claims description 9
- 239000010980 sapphire Substances 0.000 claims description 9
- 230000008859 change Effects 0.000 claims description 8
- 238000004886 process control Methods 0.000 claims description 7
- 230000004927 fusion Effects 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000012780 transparent material Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims description 2
- 230000006870 function Effects 0.000 claims description 2
- 239000004020 conductor Substances 0.000 claims 1
- 239000000835 fiber Substances 0.000 description 7
- 239000003921 oil Substances 0.000 description 7
- 239000000758 substrate Substances 0.000 description 6
- 230000002596 correlated effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 238000000691 measurement method Methods 0.000 description 4
- 238000001055 reflectance spectroscopy Methods 0.000 description 4
- 239000000344 soap Substances 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000004891 communication Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000001066 destructive effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 101100268551 Drosophila melanogaster Appl gene Proteins 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000010420 art technique Methods 0.000 description 1
- 230000008033 biological extinction Effects 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 230000000875 corresponding effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000010979 ruby Substances 0.000 description 1
- 229910001750 ruby Inorganic materials 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000011664 signaling Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0076—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means
- G01L9/0077—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light
- G01L9/0079—Transmitting or indicating the displacement of flexible diaphragms using photoelectric means for measuring reflected light with Fabry-Perot arrangements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/439,097 | 2006-05-23 | ||
| US11/439,097 US7409867B2 (en) | 2006-05-23 | 2006-05-23 | Pressure sensor using light source |
| PCT/US2007/012050 WO2007139745A2 (en) | 2006-05-23 | 2007-05-18 | Pressure sensor for a pressure transmitter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2652179A1 true CA2652179A1 (en) | 2007-12-06 |
Family
ID=38748283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002652179A Abandoned CA2652179A1 (en) | 2006-05-23 | 2007-05-18 | Pressure sensor for a pressure transmitter |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7409867B2 (https=) |
| EP (1) | EP2029990B1 (https=) |
| JP (1) | JP5562635B2 (https=) |
| CN (1) | CN101449139B (https=) |
| CA (1) | CA2652179A1 (https=) |
| WO (1) | WO2007139745A2 (https=) |
Families Citing this family (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8711361B2 (en) * | 2009-11-05 | 2014-04-29 | Qualcomm, Incorporated | Methods and devices for detecting and measuring environmental conditions in high performance device packages |
| US8390916B2 (en) | 2010-06-29 | 2013-03-05 | Qualcomm Mems Technologies, Inc. | System and method for false-color sensing and display |
| US8511180B2 (en) * | 2010-09-02 | 2013-08-20 | Ofer Melamed | Pressure difference flowmeter with flow barrier between a conduit and a reference tube |
| US20120179392A1 (en) * | 2011-01-11 | 2012-07-12 | Bridgestone Americas Tire Operations, Llc | Method and system for measuring strain in twisted cord |
| DE102013009641B4 (de) * | 2013-06-08 | 2021-05-06 | Dräger Safety AG & Co. KGaA | Drucksensor mit Membran deren variable Anlagefläche optisch ausgelesen werden kann, Messvorrichtung, Reaktionsträger und Messverfahren mit diesem Drucksensor |
| US9442031B2 (en) * | 2013-06-28 | 2016-09-13 | Rosemount Inc. | High integrity process fluid pressure probe |
| US10638093B2 (en) | 2013-09-26 | 2020-04-28 | Rosemount Inc. | Wireless industrial process field device with imaging |
| US10823592B2 (en) | 2013-09-26 | 2020-11-03 | Rosemount Inc. | Process device with process variable measurement using image capture device |
| US11076113B2 (en) | 2013-09-26 | 2021-07-27 | Rosemount Inc. | Industrial process diagnostics using infrared thermal sensing |
| US9459170B2 (en) | 2013-09-26 | 2016-10-04 | Rosemount Inc. | Process fluid pressure sensing assembly for pressure transmitters subjected to high working pressure |
| US9857228B2 (en) | 2014-03-25 | 2018-01-02 | Rosemount Inc. | Process conduit anomaly detection using thermal imaging |
| US9488527B2 (en) | 2014-03-25 | 2016-11-08 | Rosemount Inc. | Process temperature measurement using infrared detector |
| US10914635B2 (en) | 2014-09-29 | 2021-02-09 | Rosemount Inc. | Wireless industrial process monitor |
| US9638600B2 (en) | 2014-09-30 | 2017-05-02 | Rosemount Inc. | Electrical interconnect for pressure sensor in a process variable transmitter |
| CN104316258B (zh) * | 2014-10-29 | 2016-05-18 | 成都众山科技有限公司 | 方便固定的无线压力变送装置 |
| US10053269B2 (en) * | 2015-02-09 | 2018-08-21 | The Boeing Company | Multi-functional fiber optic fuel sensor system having a photonic membrane |
| CN112213021B (zh) * | 2020-10-09 | 2024-01-16 | 电子科技大学 | 一种基于光纤珐珀的差压传感系统及其检测方法 |
| CN113155399B (zh) * | 2021-04-06 | 2022-10-21 | 中国空气动力研究与发展中心高速空气动力研究所 | 高速飞行器表面压力与变形三维连续分布同步测量方法 |
| DE102024107507A1 (de) | 2023-03-17 | 2024-09-19 | Ifm Electronic Gmbh | Drucksensor für die Automatisierungstechnik |
| DE102024206773B4 (de) * | 2024-07-18 | 2026-02-19 | Fresenius Medical Care Ag | Vorrichtung und Verfahren zur Messung eines Druckes eines Fluids in einem elastischen medizinischen Schlauch, der zumindest für Licht einer bestimmten optischen Wellenlänge transparent ist |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3040583A (en) * | 1959-12-10 | 1962-06-26 | United Aircraft Corp | Optical pressure transducer |
| DE2137188A1 (de) * | 1971-07-24 | 1973-02-01 | Sprenger Albin Kg | Barometer, insbesondere fuer radiowettersonden |
| DE3142164A1 (de) * | 1980-10-27 | 1982-06-16 | Rosemount Engineering Co. Ltd., Bognor Regis, Sussex | Vorrichtung zur messung von druckunterschieden |
| US4678904A (en) * | 1984-07-06 | 1987-07-07 | Technology Dynamics, Inc. | Optical measuring device using a spectral modulation sensor having an optically resonant structure |
| US4933545A (en) * | 1985-12-30 | 1990-06-12 | Metricor, Inc. | Optical pressure-sensing system using optical resonator cavity |
| EP0460357A3 (en) * | 1990-06-08 | 1992-07-29 | Landis & Gyr Betriebs Ag | Device for optical measurement of pressure differences |
| SE515191C2 (sv) * | 1992-05-05 | 2001-06-25 | Volvo Ab | Förfarande för tillverkning av en anordning för mätning av tryck jämte anordning för mätning av tryck |
| US5446279A (en) | 1993-08-27 | 1995-08-29 | Hughes Aircraft Company | Fiber optic sensor sensing curvature of a diaphragm |
| US5404218A (en) * | 1993-11-18 | 1995-04-04 | The United States Of America As Represented By The United States Department Of Energy | Fiber optic probe for light scattering measurements |
| US6484585B1 (en) * | 1995-02-28 | 2002-11-26 | Rosemount Inc. | Pressure sensor for a pressure transmitter |
| US6040191A (en) * | 1996-06-13 | 2000-03-21 | Grow; Ann E. | Raman spectroscopic method for determining the ligand binding capacity of biologicals |
| SE514744C2 (sv) * | 1999-07-06 | 2001-04-09 | Samba Sensors Ab | Förfarande och anordning vid optiska mätsystem |
| US6520020B1 (en) | 2000-01-06 | 2003-02-18 | Rosemount Inc. | Method and apparatus for a direct bonded isolated pressure sensor |
| EP1254357B1 (en) | 2000-02-11 | 2006-12-06 | Rosemount Inc. | Optical pressure sensor |
| US6820487B2 (en) * | 2000-03-07 | 2004-11-23 | Masayoshi Esahi | Reflective moveable diaphragm unit and pressure sensor containing same |
| WO2002023148A1 (en) | 2000-09-15 | 2002-03-21 | Endevco Corporation | Fiber optic pressure sensor |
| DE60137447D1 (de) * | 2000-11-28 | 2009-03-05 | Rosemount Inc | Einrichtung zur messung physikalischer grössen mit einem optischen sensor |
| US7330271B2 (en) * | 2000-11-28 | 2008-02-12 | Rosemount, Inc. | Electromagnetic resonant sensor with dielectric body and variable gap cavity |
| JP2004161113A (ja) * | 2002-11-12 | 2004-06-10 | Pacific Ind Co Ltd | タイヤ状態監視装置 |
| JP2004352019A (ja) * | 2003-05-28 | 2004-12-16 | Pacific Ind Co Ltd | タイヤ状態監視装置の送信機及びタイヤ状態監視装置 |
| US6941813B2 (en) * | 2003-06-30 | 2005-09-13 | Alcon, Inc. | Noninvasive pressure sensing assembly |
| EP1668314A4 (en) | 2003-10-03 | 2007-09-19 | Sabeus Inc | ROBUST FABRY-PEROT PRESSURE SENSOR |
| JP2005291945A (ja) * | 2004-03-31 | 2005-10-20 | Masaki Esashi | センサ装置 |
| JP4615932B2 (ja) * | 2004-08-18 | 2011-01-19 | 株式会社山武 | 差圧測定システム及び差圧測定方法 |
| US8559770B2 (en) | 2005-03-02 | 2013-10-15 | Fiso Technologies Inc. | Fabry-perot optical sensor and method of manufacturing the same |
| WO2007019676A1 (en) | 2005-08-12 | 2007-02-22 | Fiso Technologies Inc. | Single piece fabry-perot optical sensor and method of manufacturing the same |
-
2006
- 2006-05-23 US US11/439,097 patent/US7409867B2/en active Active
-
2007
- 2007-05-18 CA CA002652179A patent/CA2652179A1/en not_active Abandoned
- 2007-05-18 EP EP07777186A patent/EP2029990B1/en active Active
- 2007-05-18 WO PCT/US2007/012050 patent/WO2007139745A2/en not_active Ceased
- 2007-05-18 JP JP2009512074A patent/JP5562635B2/ja not_active Expired - Fee Related
- 2007-05-18 CN CN2007800186102A patent/CN101449139B/zh active Active
Also Published As
| Publication number | Publication date |
|---|---|
| WO2007139745A3 (en) | 2008-04-03 |
| CN101449139A (zh) | 2009-06-03 |
| CN101449139B (zh) | 2013-03-27 |
| EP2029990A2 (en) | 2009-03-04 |
| EP2029990B1 (en) | 2011-10-05 |
| JP2009538423A (ja) | 2009-11-05 |
| JP5562635B2 (ja) | 2014-07-30 |
| US20070272026A1 (en) | 2007-11-29 |
| WO2007139745A2 (en) | 2007-12-06 |
| US7409867B2 (en) | 2008-08-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2029990B1 (en) | Pressure sensor for a pressure transmitter | |
| US4926696A (en) | Optical micropressure transducer | |
| US5877426A (en) | Bourdon tube pressure gauge with integral optical strain sensors for measuring tension or compressive strain | |
| US6612174B2 (en) | Optical pressure sensor | |
| EP1007902B1 (en) | Self-calibrating optical fiber pressure, strain and temperature sensors | |
| EP0882221B1 (en) | Capacitive pressure sensor diagnostics in a process transmitter powered solely from a loop current | |
| US5844667A (en) | Fiber optic pressure sensor with passive temperature compensation | |
| US7173713B2 (en) | Optical fiber sensors for harsh environments | |
| CN204064535U (zh) | 压力传感器 | |
| WO2015142343A1 (en) | Temperature-compensated strain-based transducer operating on differential measurements | |
| US4581530A (en) | Fiber-optic luminescence sensor utilizing interference in a thin layer structure | |
| Vaddadi et al. | Design and fabrication of liquid pressure sensor using FBG sensor through seesaw hinge mechanism | |
| US7703328B2 (en) | Pressure sensor utilizing a low thermal expansion material | |
| CN113494890B (zh) | 基于fpi干涉仪的光纤光栅应变传感器精度测量装置及方法 | |
| US6341526B1 (en) | Micromachined diffractive pressure sensor system | |
| CN112985478A (zh) | 微纳结构的耐高温法布里-珀罗腔传感结构及系统 | |
| US7280220B2 (en) | Physical quantity measuring method and device therefor | |
| CN205373933U (zh) | 一种光纤光栅压力传感器 | |
| EP1942324A1 (en) | Optical sensor with co-located pressure and temperature sensors | |
| US20060263002A1 (en) | Silicon fiber optic sensors | |
| CN112964299A (zh) | 耐高温高压结构热-声-振三参数集成原位传感器及系统 | |
| US10816424B2 (en) | Remote seal diaphragm system | |
| CN201508266U (zh) | 一种光纤f-p压力传感器及其压力液位传感装置 | |
| RU2180100C2 (ru) | Амплитудный волоконно-оптический преобразователь механических величин | |
| CN105509957A (zh) | 一种光纤光栅压力传感器 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| FZDE | Dead |