CA2576054C - Lenslet array for beam homogenization - Google Patents

Lenslet array for beam homogenization Download PDF

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Publication number
CA2576054C
CA2576054C CA2576054A CA2576054A CA2576054C CA 2576054 C CA2576054 C CA 2576054C CA 2576054 A CA2576054 A CA 2576054A CA 2576054 A CA2576054 A CA 2576054A CA 2576054 C CA2576054 C CA 2576054C
Authority
CA
Canada
Prior art keywords
laser beam
lenslet array
array
beamlets
lenslet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA2576054A
Other languages
English (en)
French (fr)
Other versions
CA2576054A1 (en
Inventor
Seema Somani
Charles R. Munnerlyn
Mark Arnoldussen
John Osborn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AMO Manufacturing USA LLC
Original Assignee
Visx Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Visx Inc filed Critical Visx Inc
Publication of CA2576054A1 publication Critical patent/CA2576054A1/en
Application granted granted Critical
Publication of CA2576054C publication Critical patent/CA2576054C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927—Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting in contact-lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F9/00802—Methods or devices for eye surgery using laser for photoablation
    • A61F9/00814—Laser features or special beam parameters therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0905—Dividing and/or superposing multiple light beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G02B27/0961—Lens arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/005—Arrays characterized by the distribution or form of lenses arranged along a single direction only, e.g. lenticular sheets
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0037—Arrays characterized by the distribution or form of lenses
    • G02B3/0062—Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between
    • G02B3/0068—Stacked lens arrays, i.e. refractive surfaces arranged in at least two planes, without structurally separate optical elements in-between arranged in a single integral body or plate, e.g. laminates or hybrid structures with other optical elements

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Ophthalmology & Optometry (AREA)
  • Biomedical Technology (AREA)
  • Animal Behavior & Ethology (AREA)
  • Engineering & Computer Science (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Vascular Medicine (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Surgery (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Laser Beam Processing (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Laser Surgery Devices (AREA)
CA2576054A 2004-08-06 2005-08-03 Lenslet array for beam homogenization Expired - Fee Related CA2576054C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/913,952 2004-08-06
US10/913,952 US7206132B2 (en) 2004-08-06 2004-08-06 Lenslet array for beam homogenization
PCT/US2005/027502 WO2006017543A1 (en) 2004-08-06 2005-08-03 Lenslet array for beam homogenization

Publications (2)

Publication Number Publication Date
CA2576054A1 CA2576054A1 (en) 2006-02-16
CA2576054C true CA2576054C (en) 2011-02-08

Family

ID=35757113

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2576054A Expired - Fee Related CA2576054C (en) 2004-08-06 2005-08-03 Lenslet array for beam homogenization

Country Status (6)

Country Link
US (4) US7206132B2 (enExample)
EP (1) EP1779179A4 (enExample)
JP (1) JP5178193B2 (enExample)
AU (1) AU2005271528B2 (enExample)
CA (1) CA2576054C (enExample)
WO (1) WO2006017543A1 (enExample)

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* Cited by examiner, † Cited by third party
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US7206132B2 (en) * 2004-08-06 2007-04-17 Visx, Incorporated Lenslet array for beam homogenization
FR2902532A1 (fr) * 2006-06-19 2007-12-21 Centre Nat Rech Scient Dispositif pour homogeneiser des faisceaux laser de forte energie sur un cristal
CN100429478C (zh) * 2007-01-15 2008-10-29 哈尔滨工业大学 基于微透镜阵列的激光光束发散角测试方法
CA2686854C (en) 2007-05-17 2019-03-05 Keith Holliday Customized laser epithelial ablation systems and methods
WO2009070438A1 (en) * 2007-11-30 2009-06-04 Bausch & Lomb Incorporated Optical material and method for modifying the refractive index
US7988293B2 (en) * 2008-11-14 2011-08-02 AMO Wavefront Sciences LLC. Method of qualifying light spots for optical measurements and measurement instrument employing method of qualifying light spots
US20110034973A1 (en) * 2009-08-06 2011-02-10 Bwt Property, Inc. Medical Laser Apparatus with Output Beam Homogenizer
JP5528205B2 (ja) * 2010-05-17 2014-06-25 キヤノン株式会社 眼科装置、眼科装置の制御方法、補償光学系、画像生成装置、画像生成方法、プログラム
KR101798063B1 (ko) 2010-12-14 2017-11-15 삼성전자주식회사 조명 광학계 및 이를 포함하는 3차원 영상 획득 장치
US8791355B2 (en) 2011-04-20 2014-07-29 International Business Machines Corporation Homogenizing light-pipe for solar concentrators
US8622546B2 (en) 2011-06-08 2014-01-07 Amo Wavefront Sciences, Llc Method of locating valid light spots for optical measurement and optical measurement instrument employing method of locating valid light spots
US9448415B2 (en) 2015-02-25 2016-09-20 Omnivision Technologies, Inc. Spatially interleaved polarization converter for LCOS display
AU2017311513A1 (en) 2016-08-10 2019-02-14 Amo Development, Llc Epithelial ablation systems and methods
TWI632421B (zh) * 2017-05-19 2018-08-11 台灣彩光科技股份有限公司 光學合光輪
KR102071806B1 (ko) * 2018-10-30 2020-03-02 (주)엔디에스 모듈렌즈

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US3988066A (en) * 1974-01-12 1976-10-26 Canon Kabushiki Kaisha Light exposure apparatus for printing
US4547037A (en) 1980-10-16 1985-10-15 Regents Of The University Of Minnesota Holographic method for producing desired wavefront transformations
JPS6280617A (ja) * 1985-10-04 1987-04-14 Komatsu Ltd インテグレ−タ
US4733944A (en) 1986-01-24 1988-03-29 Xmr, Inc. Optical beam integration system
US4911711A (en) 1986-12-05 1990-03-27 Taunton Technologies, Inc. Sculpture apparatus for correcting curvature of the cornea
US5090798A (en) * 1987-04-27 1992-02-25 Canon Kabushiki Kaisha Applied intensity distribution controlling apparatus
FR2617042B1 (fr) 1987-06-25 1994-05-13 Hanna Khalil Dispositif de chirurgie de la cornee
JP2539231B2 (ja) * 1987-10-02 1996-10-02 オリンパス光学工業株式会社 定倍率撮影可能な撮影レンズ
JP2732498B2 (ja) 1988-11-24 1998-03-30 株式会社日立製作所 縮小投影式露光方法及びその装置
DE3918293A1 (de) 1989-06-05 1990-12-06 Zeiss Carl Fa Linsenraster
US5152759A (en) 1989-06-07 1992-10-06 University Of Miami, School Of Medicine, Dept. Of Ophthalmology Noncontact laser microsurgical apparatus
US5095386A (en) 1990-05-01 1992-03-10 Charles Lescrenier Optical system for generating lines of light using crossed cylindrical lenses
US6090100A (en) 1992-10-01 2000-07-18 Chiron Technolas Gmbh Ophthalmologische Systeme Excimer laser system for correction of vision with reduced thermal effects
JPH06118204A (ja) * 1992-10-07 1994-04-28 Hitachi Ltd プラスチックマイクロレンズアレイ
US5439621A (en) 1993-04-12 1995-08-08 Minnesota Mining And Manufacturing Company Method of making an array of variable focal length microlenses
US5376086A (en) 1993-10-26 1994-12-27 Khoobehi; Bahram Laser surgical method of sculpting a patient's cornea and associated intermediate controlling mask
US5610733A (en) 1994-02-28 1997-03-11 Digital Optics Corporation Beam-homogenizer
US5646791A (en) 1995-01-04 1997-07-08 Visx Incorporated Method and apparatus for temporal and spatial beam integration
DE19623749A1 (de) 1996-06-14 1997-05-07 Vladimir Prof Dr Semchishen Optik zur Profilierung von Laserstrahlen, insbesondere von Excimerlasern
DE19635942A1 (de) * 1996-09-05 1998-03-12 Vitaly Dr Lissotschenko Optisches Strahlformungssystem
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JP4324957B2 (ja) * 2002-05-27 2009-09-02 株式会社ニコン 照明光学装置、露光装置および露光方法
US20040151008A1 (en) * 2003-02-03 2004-08-05 Artsyukhovich Alexander N. Variable spot size illuminators with enhanced homogeneity and parfocality
US7206132B2 (en) 2004-08-06 2007-04-17 Visx, Incorporated Lenslet array for beam homogenization

Also Published As

Publication number Publication date
US20090122411A1 (en) 2009-05-14
JP5178193B2 (ja) 2013-04-10
JP2008509436A (ja) 2008-03-27
US7738176B2 (en) 2010-06-15
AU2005271528B2 (en) 2011-07-07
US20060028732A1 (en) 2006-02-09
CA2576054A1 (en) 2006-02-16
US7206132B2 (en) 2007-04-17
US7394595B2 (en) 2008-07-01
US20070146891A1 (en) 2007-06-28
AU2005271528A1 (en) 2006-02-16
US20070146890A1 (en) 2007-06-28
WO2006017543A1 (en) 2006-02-16
EP1779179A1 (en) 2007-05-02
EP1779179A4 (en) 2012-01-25
US7355794B2 (en) 2008-04-08

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Effective date: 20200831