CA2502298A1 - Micromirror systems - Google Patents

Micromirror systems Download PDF

Info

Publication number
CA2502298A1
CA2502298A1 CA002502298A CA2502298A CA2502298A1 CA 2502298 A1 CA2502298 A1 CA 2502298A1 CA 002502298 A CA002502298 A CA 002502298A CA 2502298 A CA2502298 A CA 2502298A CA 2502298 A1 CA2502298 A1 CA 2502298A1
Authority
CA
Canada
Prior art keywords
mirror
substrate
portions
electrode
hinge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002502298A
Other languages
English (en)
French (fr)
Inventor
Christopher M. Aubuchon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Exajoule LLC
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/269,763 external-priority patent/US6825968B2/en
Priority claimed from US10/269,796 external-priority patent/US6870659B2/en
Priority claimed from US10/269,478 external-priority patent/US6798560B2/en
Application filed by Individual filed Critical Individual
Publication of CA2502298A1 publication Critical patent/CA2502298A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
CA002502298A 2002-10-11 2003-10-10 Micromirror systems Abandoned CA2502298A1 (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US10/269,763 2002-10-11
US10/269,763 US6825968B2 (en) 2002-10-11 2002-10-11 Micromirror systems with electrodes configured for sequential mirror attraction
US10/269,796 US6870659B2 (en) 2002-10-11 2002-10-11 Micromirror systems with side-supported mirrors and concealed flexure members
US10/269,478 US6798560B2 (en) 2002-10-11 2002-10-11 Micromirror systems with open support structures
US10/269,478 2002-10-11
US10/269,796 2002-10-11
PCT/US2003/032348 WO2004034103A2 (en) 2002-10-11 2003-10-10 Micromirror systems

Publications (1)

Publication Number Publication Date
CA2502298A1 true CA2502298A1 (en) 2004-04-22

Family

ID=32096819

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002502298A Abandoned CA2502298A1 (en) 2002-10-11 2003-10-10 Micromirror systems

Country Status (5)

Country Link
EP (1) EP1588202A4 (ja)
JP (1) JP2006502449A (ja)
AU (1) AU2003282611A1 (ja)
CA (1) CA2502298A1 (ja)
WO (1) WO2004034103A2 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4492952B2 (ja) * 2004-12-03 2010-06-30 株式会社リコー 光偏向装置、光偏向アレー、光学システム、画像投影表示装置および画像形成装置
US7391554B2 (en) 2006-08-25 2008-06-24 Spatial Photonics, Inc. High fill-ratio mirror-based spatial light modulator
EP2140300A1 (en) * 2007-04-12 2010-01-06 Thomson Licensing Biaxial mirror color selecting micro mirror imager
JP6519284B2 (ja) * 2015-04-01 2019-05-29 セイコーエプソン株式会社 電気光学装置、電気光学装置の製造方法、および電子機器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0784196A (ja) * 1993-09-13 1995-03-31 Canon Inc 光偏向器およびそれを用いた表示装置
US6028689A (en) * 1997-01-24 2000-02-22 The United States Of America As Represented By The Secretary Of The Air Force Multi-motion micromirror
DE19712201A1 (de) * 1997-03-24 1998-10-01 Bodenseewerk Geraetetech Mikromechanische Spiegel-Anordnung
JP2001311900A (ja) * 2000-04-27 2001-11-09 Ricoh Co Ltd 光走査装置
US6487001B2 (en) * 2000-12-13 2002-11-26 Agere Systems Inc. Article comprising wedge-shaped electrodes
US6633426B2 (en) * 2001-05-10 2003-10-14 Analog Devices, Inc. Optical-electrical MEMS devices and method
US6666561B1 (en) * 2002-10-28 2003-12-23 Hewlett-Packard Development Company, L.P. Continuously variable analog micro-mirror device

Also Published As

Publication number Publication date
WO2004034103A3 (en) 2005-08-11
JP2006502449A (ja) 2006-01-19
EP1588202A4 (en) 2007-10-10
AU2003282611A1 (en) 2004-05-04
EP1588202A2 (en) 2005-10-26
WO2004034103A2 (en) 2004-04-22

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Legal Events

Date Code Title Description
FZDE Discontinued