CA2423381A1 - Gaseous-based detector for ionizing radiation and method in manufacturing the same - Google Patents
Gaseous-based detector for ionizing radiation and method in manufacturing the same Download PDFInfo
- Publication number
- CA2423381A1 CA2423381A1 CA002423381A CA2423381A CA2423381A1 CA 2423381 A1 CA2423381 A1 CA 2423381A1 CA 002423381 A CA002423381 A CA 002423381A CA 2423381 A CA2423381 A CA 2423381A CA 2423381 A1 CA2423381 A1 CA 2423381A1
- Authority
- CA
- Canada
- Prior art keywords
- detector
- arrangement
- anode
- cathode
- surface layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 230000005865 ionizing radiation Effects 0.000 title claims abstract description 20
- 238000000034 method Methods 0.000 title claims description 21
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000000463 material Substances 0.000 claims abstract description 26
- 239000002344 surface layer Substances 0.000 claims abstract description 25
- 230000005855 radiation Effects 0.000 claims abstract description 21
- 238000001514 detection method Methods 0.000 claims abstract description 17
- 239000007789 gas Substances 0.000 claims description 28
- 230000003321 amplification Effects 0.000 claims description 18
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 16
- 239000010410 layer Substances 0.000 claims description 11
- 239000000203 mixture Substances 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 150000002500 ions Chemical class 0.000 claims description 8
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 6
- 238000007254 oxidation reaction Methods 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 230000003647 oxidation Effects 0.000 claims description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 238000007598 dipping method Methods 0.000 claims description 4
- 238000002601 radiography Methods 0.000 claims description 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 4
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 claims description 3
- 229910021529 ammonia Inorganic materials 0.000 claims description 3
- 230000001590 oxidative effect Effects 0.000 claims description 3
- 230000000737 periodic effect Effects 0.000 claims description 3
- 239000003989 dielectric material Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 8
- 230000005684 electric field Effects 0.000 description 7
- 239000004020 conductor Substances 0.000 description 5
- 239000011241 protective layer Substances 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 239000012080 ambient air Substances 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000002800 charge carrier Substances 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000005755 formation reaction Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 229910021341 titanium silicide Inorganic materials 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J47/00—Tubes for determining the presence, intensity, density or energy of radiation or particles
- H01J47/02—Ionisation chambers
- H01J47/026—Gas flow ionisation chambers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/16—Measuring radiation intensity
- G01T1/185—Measuring radiation intensity with ionisation chamber arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J47/00—Tubes for determining the presence, intensity, density or energy of radiation or particles
- H01J47/02—Ionisation chambers
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Measurement Of Radiation (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| SE0003718A SE530171C2 (sv) | 2000-10-13 | 2000-10-13 | Gasbaserad detektor |
| SE0003718-4 | 2000-10-13 | ||
| PCT/SE2001/002230 WO2002031535A1 (en) | 2000-10-13 | 2001-10-12 | Gaseous-based detector for ionizing radiation and method in manufacturing the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2423381A1 true CA2423381A1 (en) | 2002-04-18 |
Family
ID=20281421
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002423381A Abandoned CA2423381A1 (en) | 2000-10-13 | 2001-10-12 | Gaseous-based detector for ionizing radiation and method in manufacturing the same |
Country Status (8)
| Country | Link |
|---|---|
| EP (1) | EP1325356A1 (ja) |
| JP (1) | JP4184075B2 (ja) |
| KR (1) | KR100866557B1 (ja) |
| CN (1) | CN100501446C (ja) |
| AU (2) | AU9612301A (ja) |
| CA (1) | CA2423381A1 (ja) |
| SE (1) | SE530171C2 (ja) |
| WO (1) | WO2002031535A1 (ja) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101576516B (zh) * | 2008-05-09 | 2011-12-21 | 同方威视技术股份有限公司 | 气体辐射探测器及辐射成像系统 |
| EP2396671A2 (en) * | 2009-02-12 | 2011-12-21 | CERN - European Organization For Nuclear Research | Protected readout electrode assembly |
| US8669533B2 (en) | 2009-10-01 | 2014-03-11 | Vladimir Bashkirov | Ion induced impact ionization detector and uses thereof |
| FR2951580B1 (fr) * | 2009-10-15 | 2014-04-25 | Biospace Med | Dispositif d'imagerie radiographique et detecteur pour un dispositif d'imagerie radiographique |
| JP5638664B2 (ja) * | 2013-06-10 | 2014-12-10 | セルン − ヨーロピアン オーガナイゼーション フォー ニュークリア リサーチＣＥＲＮ − Ｅｕｒｏｐｅａｎ Ｏｒｇａｎｉｚａｔｉｏｎ ｆｏｒ Ｎｕｃｌｅａｒ Ｒｅｓｅａｒｃｈ | 保護された読み出し電極アセンブリ及びアバランシェ粒子検出器 |
| JP6428318B2 (ja) * | 2015-01-30 | 2018-11-28 | 大日本印刷株式会社 | ガス増幅を用いた放射線検出器 |
| CN104916512B (zh) * | 2015-04-30 | 2017-05-10 | 陈立新 | 一种空气平板电离室和具有该电离室的剂量仪 |
| CN106547015B (zh) * | 2016-10-28 | 2018-10-19 | 中国计量科学研究院 | 探测器 |
| CN109946734A (zh) * | 2019-03-20 | 2019-06-28 | 中国原子能科学研究院 | 一种低能量重核素离子气体电离室探测器 |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5308987A (en) * | 1993-02-01 | 1994-05-03 | The United States Of America As Represented By The United States Department Of Energy | Microgap x-ray detector |
| FR2702571B1 (fr) | 1993-03-11 | 1995-05-24 | Charpak Georges | Dispositif d'imagerie de particules ionisantes au moyen d'une chambre proportionnelle multifils. |
| FR2731279B1 (fr) * | 1995-03-03 | 1997-05-09 | Charpak Georges | Perfectionnements aux dispositifs d'imagerie medicale en rayonnement ionisant x ou gamma a faible dose |
| US5731584A (en) * | 1995-07-14 | 1998-03-24 | Imec Vzw | Position sensitive particle sensor and manufacturing method therefor |
| US6046454A (en) * | 1995-10-13 | 2000-04-04 | Digirad Corporation | Semiconductor radiation detector with enhanced charge collection |
| US6069362A (en) * | 1998-05-14 | 2000-05-30 | The University Of Akron | Multi-density and multi-atomic number detector media for applications |
| DE19907207A1 (de) * | 1999-02-19 | 2000-08-31 | Schwerionenforsch Gmbh | Ionisationskammer für Ionenstrahlen und Verfahren zur Intensitätsüberwachung eines Ionenstrahls |
| SE514472C2 (sv) * | 1999-04-14 | 2001-02-26 | Xcounter Ab | Strålningsdetektor och en anordning för användning vid radiografi |
-
2000
- 2000-10-13 SE SE0003718A patent/SE530171C2/sv not_active IP Right Cessation
-
2001
- 2001-10-12 JP JP2002534867A patent/JP4184075B2/ja not_active Expired - Fee Related
- 2001-10-12 EP EP01976971A patent/EP1325356A1/en not_active Withdrawn
- 2001-10-12 CN CNB018173365A patent/CN100501446C/zh not_active Expired - Fee Related
- 2001-10-12 AU AU9612301A patent/AU9612301A/xx active Pending
- 2001-10-12 KR KR1020037004895A patent/KR100866557B1/ko not_active IP Right Cessation
- 2001-10-12 WO PCT/SE2001/002230 patent/WO2002031535A1/en active Application Filing
- 2001-10-12 CA CA002423381A patent/CA2423381A1/en not_active Abandoned
- 2001-10-12 AU AU2001296123A patent/AU2001296123B2/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| AU9612301A (en) | 2002-04-22 |
| EP1325356A1 (en) | 2003-07-09 |
| SE0003718L (sv) | 2002-04-14 |
| SE0003718D0 (sv) | 2000-10-13 |
| KR20030048053A (ko) | 2003-06-18 |
| JP2004511785A (ja) | 2004-04-15 |
| AU2001296123B2 (en) | 2006-06-01 |
| SE530171C2 (sv) | 2008-03-18 |
| JP4184075B2 (ja) | 2008-11-19 |
| KR100866557B1 (ko) | 2008-11-03 |
| CN100501446C (zh) | 2009-06-17 |
| CN1469999A (zh) | 2004-01-21 |
| WO2002031535A1 (en) | 2002-04-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| FZDE | Dead |