CA2356905A1 - Microrupteur avec microactionneur electrostatique rotatif - Google Patents

Microrupteur avec microactionneur electrostatique rotatif Download PDF

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Publication number
CA2356905A1
CA2356905A1 CA002356905A CA2356905A CA2356905A1 CA 2356905 A1 CA2356905 A1 CA 2356905A1 CA 002356905 A CA002356905 A CA 002356905A CA 2356905 A CA2356905 A CA 2356905A CA 2356905 A1 CA2356905 A1 CA 2356905A1
Authority
CA
Canada
Prior art keywords
comb drive
microactuator
rotation
micromirror
axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002356905A
Other languages
English (en)
Inventor
John H. Jerman
John F. Heanue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seagate Technology LLC
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority claimed from PCT/US1999/029715 external-priority patent/WO2000036447A1/fr
Publication of CA2356905A1 publication Critical patent/CA2356905A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/1055—Disposition or mounting of transducers relative to record carriers
    • G11B11/10556—Disposition or mounting of transducers relative to record carriers with provision for moving or switching or masking the transducers in or out of their operative position
    • G11B11/10563—Access of indexed parts
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/08—Disposition or mounting of heads or light sources relatively to record carriers
    • G11B7/085—Disposition or mounting of heads or light sources relatively to record carriers with provision for moving the light beam into, or out of, its operative position or across tracks, otherwise than during the transducing operation, e.g. for adjustment or preliminary positioning or track change or selection
    • G11B7/08547—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements
    • G11B7/08564—Arrangements for positioning the light beam only without moving the head, e.g. using static electro-optical elements using galvanomirrors

Landscapes

  • Micromachines (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)

Abstract

La présente invention concerne un microrupteur optique (11) comprenant un corps de support (12) ainsi que des première et seconde fibres de sortie (16a, 16b) contenues dans ce corps. Un microactionneur électrostatique rotatif (56) porté par ledit corps s'étend dans un plan à l'extérieur duquel est placé un micromiroir (61). Le microactionneur comprend un porte-miroir (103) couplé au micromiroir et au moins un ensemble de commande de peigne (106) couplé au porte-miroir de manière à amener le micromiroir autour d'un axe de rotation (64) s'étendant perpendiculairement au plan, entre une première position permettant de réfléchir un faisceau laser sur la première fibre de sortie, et une seconde position permettant de réfléchir le faisceau laser sur la seconde fibre de sortie.
CA002356905A 1998-12-15 1999-12-15 Microrupteur avec microactionneur electrostatique rotatif Abandoned CA2356905A1 (fr)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US11226598P 1998-12-15 1998-12-15
US11226398P 1998-12-15 1998-12-15
US12351299P 1999-03-08 1999-03-08
US60/112,263 1999-03-08
US60/112,265 1999-03-08
US60/123,512 1999-03-08
PCT/US1999/029715 WO2000036447A1 (fr) 1998-12-15 1999-12-15 Microrupteur avec microactionneur electrostatique rotatif

Publications (1)

Publication Number Publication Date
CA2356905A1 true CA2356905A1 (fr) 2000-06-22

Family

ID=27381131

Family Applications (2)

Application Number Title Priority Date Filing Date
CA002354604A Abandoned CA2354604A1 (fr) 1998-12-15 1999-12-15 Microactionneur electrostatique rotatif
CA002356905A Abandoned CA2356905A1 (fr) 1998-12-15 1999-12-15 Microrupteur avec microactionneur electrostatique rotatif

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CA002354604A Abandoned CA2354604A1 (fr) 1998-12-15 1999-12-15 Microactionneur electrostatique rotatif

Country Status (6)

Country Link
EP (1) EP1181765A1 (fr)
JP (1) JP2002542747A (fr)
CN (1) CN1333943A (fr)
AU (1) AU2365500A (fr)
CA (2) CA2354604A1 (fr)
WO (1) WO2000036740A1 (fr)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6856632B1 (en) * 1999-09-20 2005-02-15 Iolon, Inc. Widely tunable laser
US6903486B2 (en) 1999-11-29 2005-06-07 Iolon, Inc. Balanced microdevice
EP1240708A2 (fr) 1999-11-29 2002-09-18 Iolon, Inc. Micro-dispositif equilibre et microactionneur electrostatique rotatif s'utilisant avec ce micro-dispositif
AU4513601A (en) * 1999-11-29 2001-06-18 Iolon, Inc. Tunable laser with microactuator
AU2929601A (en) * 2000-01-05 2001-07-16 Iolon, Inc. Tiltable electrostatic microactuator and method for using same
FR2841995A1 (fr) * 2002-07-04 2004-01-09 Memscap Attenuateur optique variable
JP4492252B2 (ja) * 2003-09-05 2010-06-30 セイコーエプソン株式会社 アクチュエータ
JP2011180534A (ja) * 2010-03-03 2011-09-15 Furukawa Electric Co Ltd:The Ｍｅｍｓ素子、可動式ミラー、および光スイッチ装置
JP5920706B2 (ja) * 2012-02-29 2016-05-18 国立大学法人 香川大学 Ｍｅｍｓ光学部品
EP2713196A1 (fr) * 2012-09-27 2014-04-02 poLight AS Lentille variuable compenant actionneurs piézoélectriques disposés avec une configuration d'électrodes interdigitées
JP2016059191A (ja) * 2014-09-11 2016-04-21 ソニー株式会社 静電型デバイス
US10516348B2 (en) * 2015-11-05 2019-12-24 Mems Drive Inc. MEMS actuator package architecture
US10875761B2 (en) * 2016-09-12 2020-12-29 Mems Drive, Inc. Systems and methods for a MEMS actuation systems device with one or more slidable connection assemblies
CN110165927B (zh) * 2018-05-24 2020-04-14 北京纳米能源与系统研究所 一种摩擦电致发动机及图像扫描系统
CN109734044B (zh) * 2019-01-09 2021-08-24 杭州电子科技大学 自驱动的微型冲击锤
CN109761185B (zh) * 2019-01-25 2020-09-29 山东大学 一种基于拉链梳齿的mems驱动器及其工作方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5998906A (en) * 1998-01-13 1999-12-07 Seagate Technology, Inc. Electrostatic microactuator and method for use thereof

Also Published As

Publication number Publication date
CA2354604A1 (fr) 2000-06-22
WO2000036740A1 (fr) 2000-06-22
EP1181765A1 (fr) 2002-02-27
CN1333943A (zh) 2002-01-30
JP2002542747A (ja) 2002-12-10
AU2365500A (en) 2000-07-03

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Legal Events

Date Code Title Description
EEER Examination request
FZDE Discontinued