CA2350076C - Electrostatically actuated pumping array - Google Patents
Electrostatically actuated pumping array Download PDFInfo
- Publication number
- CA2350076C CA2350076C CA002350076A CA2350076A CA2350076C CA 2350076 C CA2350076 C CA 2350076C CA 002350076 A CA002350076 A CA 002350076A CA 2350076 A CA2350076 A CA 2350076A CA 2350076 C CA2350076 C CA 2350076C
- Authority
- CA
- Canada
- Prior art keywords
- cell
- conduit means
- diaphragm
- mesopump
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005086 pumping Methods 0.000 title claims abstract description 27
- 239000012530 fluid Substances 0.000 claims abstract description 82
- 238000000034 method Methods 0.000 claims abstract description 25
- 230000008569 process Effects 0.000 claims abstract description 15
- 230000004913 activation Effects 0.000 claims abstract description 13
- 238000004891 communication Methods 0.000 claims abstract 2
- 239000000463 material Substances 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 6
- 238000005096 rolling process Methods 0.000 claims description 6
- 238000003491 array Methods 0.000 claims description 5
- 229920000642 polymer Polymers 0.000 claims description 5
- 238000012546 transfer Methods 0.000 claims description 3
- 230000009849 deactivation Effects 0.000 claims 2
- 238000005516 engineering process Methods 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 238000001514 detection method Methods 0.000 description 7
- 230000009471 action Effects 0.000 description 6
- 230000008901 benefit Effects 0.000 description 6
- 239000003989 dielectric material Substances 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 239000013043 chemical agent Substances 0.000 description 3
- 239000002360 explosive Substances 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000000443 aerosol Substances 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 239000003124 biologic agent Substances 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229920002799 BoPET Polymers 0.000 description 1
- 102000004190 Enzymes Human genes 0.000 description 1
- 108090000790 Enzymes Proteins 0.000 description 1
- 239000005041 Mylar™ Substances 0.000 description 1
- 239000012807 PCR reagent Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229920004738 ULTEM® Polymers 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- -1 biological Substances 0.000 description 1
- 239000012620 biological material Substances 0.000 description 1
- 238000005251 capillar electrophoresis Methods 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000007857 degradation product Substances 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000012377 drug delivery Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000002114 nanocomposite Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000002572 peristaltic effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 238000003752 polymerase chain reaction Methods 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000035755 proliferation Effects 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000029058 respiratory gaseous exchange Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000012855 volatile organic compound Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/043—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms two or more plate-like pumping flexible members in parallel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/047—Pumps having electric drive
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Saccharide Compounds (AREA)
- Steroid Compounds (AREA)
- Seal Device For Vehicle (AREA)
- Printers Or Recording Devices Using Electromagnetic And Radiation Means (AREA)
- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US1998/023658 WO2000028215A1 (en) | 1998-11-06 | 1998-11-06 | Electrostatically actuated pumping array |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA2350076A1 CA2350076A1 (en) | 2000-05-18 |
| CA2350076C true CA2350076C (en) | 2008-12-30 |
Family
ID=22268244
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002350076A Expired - Fee Related CA2350076C (en) | 1998-11-06 | 1998-11-06 | Electrostatically actuated pumping array |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP1163446B1 (zh) |
| CN (1) | CN1327132C (zh) |
| AT (1) | ATE350580T1 (zh) |
| CA (1) | CA2350076C (zh) |
| DE (1) | DE69836836T2 (zh) |
| HK (1) | HK1046945B (zh) |
| WO (1) | WO2000028215A1 (zh) |
Families Citing this family (58)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7420659B1 (en) | 2000-06-02 | 2008-09-02 | Honeywell Interantional Inc. | Flow control system of a cartridge |
| US6568286B1 (en) | 2000-06-02 | 2003-05-27 | Honeywell International Inc. | 3D array of integrated cells for the sampling and detection of air bound chemical and biological species |
| US6729856B2 (en) * | 2001-10-09 | 2004-05-04 | Honeywell International Inc. | Electrostatically actuated pump with elastic restoring forces |
| US6637476B2 (en) | 2002-04-01 | 2003-10-28 | Protedyne Corporation | Robotically manipulable sample handling tool |
| DE10302304B3 (de) * | 2003-01-22 | 2004-01-29 | Festo Ag & Co. | Elektronisches Mikroventil und Verfahren zu seinem Betreiben |
| US7249529B2 (en) | 2003-03-28 | 2007-07-31 | Protedyne Corporation | Robotically manipulable sample handling tool |
| US6991213B2 (en) * | 2003-12-30 | 2006-01-31 | Honeywell International Inc. | Dual diaphragm valve |
| US7100453B2 (en) | 2003-12-30 | 2006-09-05 | Honeywell International Inc. | Modified dual diaphragm pressure sensor |
| US7859168B2 (en) | 2004-12-14 | 2010-12-28 | Medipacs, Inc. | Actuator pump system |
| US7222639B2 (en) | 2004-12-29 | 2007-05-29 | Honeywell International Inc. | Electrostatically actuated gas valve |
| US7328882B2 (en) | 2005-01-06 | 2008-02-12 | Honeywell International Inc. | Microfluidic modulating valve |
| US7445017B2 (en) | 2005-01-28 | 2008-11-04 | Honeywell International Inc. | Mesovalve modulator |
| US7517201B2 (en) | 2005-07-14 | 2009-04-14 | Honeywell International Inc. | Asymmetric dual diaphragm pump |
| US7353747B2 (en) * | 2005-07-28 | 2008-04-08 | Ethicon Endo-Surgery, Inc. | Electroactive polymer-based pump |
| US7624755B2 (en) | 2005-12-09 | 2009-12-01 | Honeywell International Inc. | Gas valve with overtravel |
| US7523762B2 (en) | 2006-03-22 | 2009-04-28 | Honeywell International Inc. | Modulating gas valves and systems |
| EP2041214A4 (en) | 2006-07-10 | 2009-07-08 | Medipacs Inc | SUPERELASTIC EPOXY HYDROGEL |
| EP1916420B1 (en) | 2006-10-28 | 2009-09-23 | Sensirion Holding AG | Multicellular pump |
| NL2000466C2 (nl) * | 2007-02-02 | 2008-08-05 | Grood Johannes Petrus Wilhelmu | Werkwijze en inrichting voor het dispenseren van een vloeistof. |
| JP2011505520A (ja) | 2007-12-03 | 2011-02-24 | メディパックス インコーポレイテッド | 流体計量供給装置 |
| CN102483055A (zh) * | 2009-08-11 | 2012-05-30 | 卓越剂量技术有限公司 | 隔膜机 |
| WO2011032011A1 (en) | 2009-09-10 | 2011-03-17 | Medipacs, Inc. | Low profile actuator and improved method of caregiver controlled administration of therapeutics |
| US8556392B2 (en) | 2009-11-24 | 2013-10-15 | De Grood Innovations B.V. | Method and device for dispensing a liquid |
| US9500186B2 (en) | 2010-02-01 | 2016-11-22 | Medipacs, Inc. | High surface area polymer actuator with gas mitigating components |
| US9074770B2 (en) | 2011-12-15 | 2015-07-07 | Honeywell International Inc. | Gas valve with electronic valve proving system |
| US8899264B2 (en) | 2011-12-15 | 2014-12-02 | Honeywell International Inc. | Gas valve with electronic proof of closure system |
| US8905063B2 (en) | 2011-12-15 | 2014-12-09 | Honeywell International Inc. | Gas valve with fuel rate monitor |
| US8947242B2 (en) | 2011-12-15 | 2015-02-03 | Honeywell International Inc. | Gas valve with valve leakage test |
| US9835265B2 (en) | 2011-12-15 | 2017-12-05 | Honeywell International Inc. | Valve with actuator diagnostics |
| US8839815B2 (en) | 2011-12-15 | 2014-09-23 | Honeywell International Inc. | Gas valve with electronic cycle counter |
| US9995486B2 (en) | 2011-12-15 | 2018-06-12 | Honeywell International Inc. | Gas valve with high/low gas pressure detection |
| US9557059B2 (en) | 2011-12-15 | 2017-01-31 | Honeywell International Inc | Gas valve with communication link |
| US9846440B2 (en) | 2011-12-15 | 2017-12-19 | Honeywell International Inc. | Valve controller configured to estimate fuel comsumption |
| US9851103B2 (en) | 2011-12-15 | 2017-12-26 | Honeywell International Inc. | Gas valve with overpressure diagnostics |
| US10000605B2 (en) | 2012-03-14 | 2018-06-19 | Medipacs, Inc. | Smart polymer materials with excess reactive molecules |
| US9234661B2 (en) | 2012-09-15 | 2016-01-12 | Honeywell International Inc. | Burner control system |
| US10422531B2 (en) | 2012-09-15 | 2019-09-24 | Honeywell International Inc. | System and approach for controlling a combustion chamber |
| DE102013209866B4 (de) | 2013-05-28 | 2021-11-04 | Robert Bosch Gmbh | Vorrichtung mit vorgegebener Fluidverdrängung |
| EP2868970B1 (en) | 2013-10-29 | 2020-04-22 | Honeywell Technologies Sarl | Regulating device |
| US10024439B2 (en) | 2013-12-16 | 2018-07-17 | Honeywell International Inc. | Valve over-travel mechanism |
| US9841122B2 (en) | 2014-09-09 | 2017-12-12 | Honeywell International Inc. | Gas valve with electronic valve proving system |
| US9645584B2 (en) | 2014-09-17 | 2017-05-09 | Honeywell International Inc. | Gas valve with electronic health monitoring |
| CN104358674A (zh) * | 2014-10-24 | 2015-02-18 | 安徽理工大学 | 一种基于超磁致伸缩薄膜驱动器的双平面线圈驱动式微泵 |
| CN105201796A (zh) * | 2015-10-29 | 2015-12-30 | 宁波大学 | 一种压电蠕动微泵 |
| US10503181B2 (en) | 2016-01-13 | 2019-12-10 | Honeywell International Inc. | Pressure regulator |
| WO2017135206A1 (ja) * | 2016-02-01 | 2017-08-10 | 株式会社村田製作所 | 気体制御装置 |
| US10564062B2 (en) | 2016-10-19 | 2020-02-18 | Honeywell International Inc. | Human-machine interface for gas valve |
| US11506194B2 (en) * | 2016-12-30 | 2022-11-22 | Koninklijke Philips N.V. | Electrostatic peristaltic pump and method of operation |
| AU2018236138A1 (en) | 2017-03-13 | 2019-09-26 | Stephen Alan MARSH | Micro pump systems and processing techniques |
| TW201912248A (zh) | 2017-08-31 | 2019-04-01 | 研能科技股份有限公司 | 氣體輸送裝置 |
| US11073281B2 (en) | 2017-12-29 | 2021-07-27 | Honeywell International Inc. | Closed-loop programming and control of a combustion appliance |
| DE102018207858B4 (de) * | 2018-05-18 | 2021-06-17 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Haltevorrichtung zum Herstellen einer Mikropumpe mit mechanisch vorgespanntem Membranaktor |
| US10697815B2 (en) | 2018-06-09 | 2020-06-30 | Honeywell International Inc. | System and methods for mitigating condensation in a sensor module |
| CN112673243A (zh) * | 2018-09-14 | 2021-04-16 | 芬兰国家技术研究中心股份公司 | 压力传感器 |
| CN109771740B (zh) * | 2019-03-01 | 2020-11-27 | 浙江师范大学 | 一种气动输液装置 |
| DE102019004450B4 (de) * | 2019-06-26 | 2024-03-14 | Drägerwerk AG & Co. KGaA | Mikropumpensystem und Verfahren zur Führung eines kompressiblen Fluids |
| CN113482893B (zh) * | 2021-06-10 | 2022-04-01 | 浙江大学 | 一种基于介电弹性材料的柔性泵 |
| CN115387986A (zh) * | 2022-09-21 | 2022-11-25 | 北京京东方技术开发有限公司 | 气味释放装置、设备及其制备方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB514815A (en) * | 1938-06-08 | 1939-11-17 | Nils Nilsen Straatveit | Improvements connected with reciprocating compressors or pumps |
| DE3926066A1 (de) * | 1989-08-07 | 1991-02-14 | Ibm Deutschland | Mikromechanische kompressorkaskade und verfahren zur druckerhoehung bei extrem niedrigem arbeitsdruck |
| JP3039583B2 (ja) * | 1991-05-30 | 2000-05-08 | 株式会社日立製作所 | バルブ及びそれを用いた半導体製造装置 |
-
1998
- 1998-11-06 DE DE69836836T patent/DE69836836T2/de not_active Expired - Lifetime
- 1998-11-06 WO PCT/US1998/023658 patent/WO2000028215A1/en active IP Right Grant
- 1998-11-06 EP EP98965368A patent/EP1163446B1/en not_active Expired - Lifetime
- 1998-11-06 CA CA002350076A patent/CA2350076C/en not_active Expired - Fee Related
- 1998-11-06 HK HK02108446.1A patent/HK1046945B/zh not_active IP Right Cessation
- 1998-11-06 CN CNB988143828A patent/CN1327132C/zh not_active Expired - Lifetime
- 1998-11-06 AT AT98965368T patent/ATE350580T1/de not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| DE69836836D1 (de) | 2007-02-15 |
| HK1046945A1 (zh) | 2003-01-30 |
| CN1327132C (zh) | 2007-07-18 |
| EP1163446A1 (en) | 2001-12-19 |
| EP1163446B1 (en) | 2007-01-03 |
| HK1046945B (zh) | 2008-05-23 |
| WO2000028215A1 (en) | 2000-05-18 |
| CN1354823A (zh) | 2002-06-19 |
| DE69836836T2 (de) | 2007-06-28 |
| ATE350580T1 (de) | 2007-01-15 |
| CA2350076A1 (en) | 2000-05-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| MKLA | Lapsed |