CA2298060A1 - Systeme integre de surveillance, de commande et d'arret - Google Patents

Systeme integre de surveillance, de commande et d'arret Download PDF

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Publication number
CA2298060A1
CA2298060A1 CA 2298060 CA2298060A CA2298060A1 CA 2298060 A1 CA2298060 A1 CA 2298060A1 CA 2298060 CA2298060 CA 2298060 CA 2298060 A CA2298060 A CA 2298060A CA 2298060 A1 CA2298060 A1 CA 2298060A1
Authority
CA
Canada
Prior art keywords
monitoring
control
imcs
rotating
data
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA 2298060
Other languages
English (en)
Other versions
CA2298060C (fr
Inventor
Howard Malm
Lorne Tuck
Sammy Ma (Yiu Ming Ma)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rem Technology Inc
Original Assignee
Rem Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rem Technology Inc filed Critical Rem Technology Inc
Priority to CA 2298060 priority Critical patent/CA2298060C/fr
Publication of CA2298060A1 publication Critical patent/CA2298060A1/fr
Application granted granted Critical
Publication of CA2298060C publication Critical patent/CA2298060C/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B9/00—Safety arrangements
    • G05B9/02—Safety arrangements electric
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0224—Process history based detection method, e.g. whereby history implies the availability of large amounts of data
    • G05B23/024—Quantitative history assessment, e.g. mathematical relationships between available data; Functions therefor; Principal component analysis [PCA]; Partial least square [PLS]; Statistical classifiers, e.g. Bayesian networks, linear regression or correlation analysis; Neural networks

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Artificial Intelligence (AREA)
  • Evolutionary Computation (AREA)
  • Mathematical Physics (AREA)
  • Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
  • Testing And Monitoring For Control Systems (AREA)
CA 2298060 1999-02-05 2000-02-04 Systeme integre de surveillance, de commande et d'arret Expired - Lifetime CA2298060C (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA 2298060 CA2298060C (fr) 1999-02-05 2000-02-04 Systeme integre de surveillance, de commande et d'arret

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CA2,260,695 1999-02-05
CA 2298060 CA2298060C (fr) 1999-02-05 2000-02-04 Systeme integre de surveillance, de commande et d'arret

Publications (2)

Publication Number Publication Date
CA2298060A1 true CA2298060A1 (fr) 2000-08-05
CA2298060C CA2298060C (fr) 2008-01-29

Family

ID=31888839

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2298060 Expired - Lifetime CA2298060C (fr) 1999-02-05 2000-02-04 Systeme integre de surveillance, de commande et d'arret

Country Status (1)

Country Link
CA (1) CA2298060C (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108005803A (zh) * 2017-12-29 2018-05-08 无锡隆盛科技股份有限公司 一种多路采集模式的甲醇控制器
CN112925170A (zh) * 2021-01-28 2021-06-08 上海华力微电子有限公司 一种光阻供应系统

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2649647C (fr) 2006-04-21 2014-06-17 Flowserve Management Company Analyse de frequence de codeur rotatif
CA2649642C (fr) 2006-04-21 2016-08-09 Flowserve Management Company Codeur rotatif avec test automatique integre

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108005803A (zh) * 2017-12-29 2018-05-08 无锡隆盛科技股份有限公司 一种多路采集模式的甲醇控制器
CN112925170A (zh) * 2021-01-28 2021-06-08 上海华力微电子有限公司 一种光阻供应系统
CN112925170B (zh) * 2021-01-28 2024-04-16 上海华力微电子有限公司 一种光阻供应系统

Also Published As

Publication number Publication date
CA2298060C (fr) 2008-01-29

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Effective date: 20200204