CA2281701A1 - Apparatus and method for optical scanning with an oscillatory microelectromechanical system - Google Patents

Apparatus and method for optical scanning with an oscillatory microelectromechanical system Download PDF

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Publication number
CA2281701A1
CA2281701A1 CA002281701A CA2281701A CA2281701A1 CA 2281701 A1 CA2281701 A1 CA 2281701A1 CA 002281701 A CA002281701 A CA 002281701A CA 2281701 A CA2281701 A CA 2281701A CA 2281701 A1 CA2281701 A1 CA 2281701A1
Authority
CA
Canada
Prior art keywords
mirror
signal
microelectromechanical system
oscillatory
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002281701A
Other languages
English (en)
French (fr)
Inventor
Meng-Hsiung Kiang
Kam Y. Lau
Richard S. Muller
Olav Solgaard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of California
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2281701A1 publication Critical patent/CA2281701A1/en
Abandoned legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Micromachines (AREA)
CA002281701A 1997-02-07 1998-01-13 Apparatus and method for optical scanning with an oscillatory microelectromechanical system Abandoned CA2281701A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US08/796,301 US5867297A (en) 1997-02-07 1997-02-07 Apparatus and method for optical scanning with an oscillatory microelectromechanical system
US08/796,301 1997-02-07
PCT/US1998/000806 WO1998035258A1 (en) 1997-02-07 1998-01-13 Apparatus and method for optical scanning with an oscillatory microelectromechanical system

Publications (1)

Publication Number Publication Date
CA2281701A1 true CA2281701A1 (en) 1998-08-13

Family

ID=25167864

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002281701A Abandoned CA2281701A1 (en) 1997-02-07 1998-01-13 Apparatus and method for optical scanning with an oscillatory microelectromechanical system

Country Status (6)

Country Link
US (1) US5867297A (ja)
EP (1) EP1021742A4 (ja)
JP (1) JP2001511264A (ja)
AU (1) AU5919698A (ja)
CA (1) CA2281701A1 (ja)
WO (1) WO1998035258A1 (ja)

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Also Published As

Publication number Publication date
EP1021742A1 (en) 2000-07-26
EP1021742A4 (en) 2001-09-26
WO1998035258A1 (en) 1998-08-13
AU5919698A (en) 1998-08-26
US5867297A (en) 1999-02-02
JP2001511264A (ja) 2001-08-07

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Legal Events

Date Code Title Description
EEER Examination request
FZDE Discontinued
FZDE Discontinued

Effective date: 20070412