CA2086848A1 - Procede et appareil de representation des variations d'epaisseur a resolution spatiale - Google Patents

Procede et appareil de representation des variations d'epaisseur a resolution spatiale

Info

Publication number
CA2086848A1
CA2086848A1 CA 2086848 CA2086848A CA2086848A1 CA 2086848 A1 CA2086848 A1 CA 2086848A1 CA 2086848 CA2086848 CA 2086848 CA 2086848 A CA2086848 A CA 2086848A CA 2086848 A1 CA2086848 A1 CA 2086848A1
Authority
CA
Canada
Prior art keywords
sites
thickness
fringe
reflectance
site
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA 2086848
Other languages
English (en)
Inventor
Christopher J. Moore
John H. Cole
Carla J. Miner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2086848A1 publication Critical patent/CA2086848A1/fr
Abandoned legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CA 2086848 1992-01-07 1993-01-07 Procede et appareil de representation des variations d'epaisseur a resolution spatiale Abandoned CA2086848A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US81764092A 1992-01-07 1992-01-07
US07/817,640 1992-01-07

Publications (1)

Publication Number Publication Date
CA2086848A1 true CA2086848A1 (fr) 1993-07-08

Family

ID=25223531

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2086848 Abandoned CA2086848A1 (fr) 1992-01-07 1993-01-07 Procede et appareil de representation des variations d'epaisseur a resolution spatiale

Country Status (1)

Country Link
CA (1) CA2086848A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015131264A1 (fr) * 2014-03-04 2015-09-11 Honeywell Asca Inc. Détermination de l'épaisseur d'un produit en bande par interférométrie par balayage de longueurs d'onde dans l'infrarouge moyen

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015131264A1 (fr) * 2014-03-04 2015-09-11 Honeywell Asca Inc. Détermination de l'épaisseur d'un produit en bande par interférométrie par balayage de longueurs d'onde dans l'infrarouge moyen

Similar Documents

Publication Publication Date Title
US5087121A (en) Depth/height measuring device
US4818110A (en) Method and apparatus of using a two beam interference microscope for inspection of integrated circuits and the like
US8319975B2 (en) Methods and apparatus for wavefront manipulations and improved 3-D measurements
US5543919A (en) Apparatus and method for performing high spatial resolution thin film layer thickness metrology
EP0718595B1 (fr) Rejet automatique d'effets de diffraction dans la mesure de couches minces
US6768967B2 (en) Database interpolation method for optical measurement of diffractive microstructures
US5365340A (en) Apparatus and method for measuring the thickness of thin films
JP4242767B2 (ja) ２次元型検出器を用いた薄膜特性測定装置及びその測定方法
US4555767A (en) Method and apparatus for measuring thickness of epitaxial layer by infrared reflectance
US5398113A (en) Method and apparatus for surface topography measurement by spatial-frequency analysis of interferograms
US4744663A (en) Pattern position detection apparatus using laser beam
US5361137A (en) Process control for submicron linewidth measurement
EP1963780B1 (fr) Appareil et procede de determination de caracteristiques de surface
JP2009031301A (ja) ２次元型検出器を用いた薄膜特性測定装置及びその測定方法
WO2002004885A1 (fr) Procede et appareil permettant un mappage rapide des epaisseurs de films minces imprimes
EP0650030A2 (fr) Appareil et procédé pour l'évaluation de multicouches minces
US5457727A (en) Device for processing a measured signal corresponding to the intensity of X-rays reflected by a multi-layer structure on a substrate
EP0647310B1 (fr) Procede et appareil pour controler la surface d'un objet par interferometrie
KR100595348B1 (ko) 박막 또는 박층의 두께를 측정하기 위한 방법 및 장치
Church et al. Use of an optical profiling instrument for the measurement of the figure and finish of optical quality surfaces
US11454795B2 (en) Surface sensing in optical microscopy and automated sample scanning systems
CA2086848A1 (fr) Procede et appareil de representation des variations d'epaisseur a resolution spatiale
WO2024034067A1 (fr) Dispositif de gestion de qualité de surface d'échantillon
WO2018127309A1 (fr) Procédé et ensemble permettant de déterminer l'épaisseur de couches dans un empilement d'échantillons
KR100588988B1 (ko) 박막의 두께를 측정하는 방법

Legal Events

Date Code Title Description
FZDE Dead