CA2085981A1 - Process and structure of an integrated vacuum microelectronic device - Google Patents

Process and structure of an integrated vacuum microelectronic device

Info

Publication number
CA2085981A1
CA2085981A1 CA 2085981 CA2085981A CA2085981A1 CA 2085981 A1 CA2085981 A1 CA 2085981A1 CA 2085981 CA2085981 CA 2085981 CA 2085981 A CA2085981 A CA 2085981A CA 2085981 A1 CA2085981 A1 CA 2085981A1
Authority
CA
Canada
Prior art keywords
tip
vacuum microelectronic
microelectronic device
vmd
devices
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA 2085981
Other languages
French (fr)
Other versions
CA2085981C (en
Inventor
Stephen Michael Zimmerman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2085981A1 publication Critical patent/CA2085981A1/en
Application granted granted Critical
Publication of CA2085981C publication Critical patent/CA2085981C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Cold Cathode And The Manufacture (AREA)

Abstract

The present invention relates generally to a new integrated Vacuum Microelectronic Device (VMD) and a method for making the same. Vacuum Microelectronic Devices require several unique three dimensional structures: a sharp field emission tip, accurate alignment of the tip inside a control grid structure in a vacuum environment, and an anode to collect electrons emitted by the tip. Also disclosed is a new structure and a process for forming diodes, triodes, tetrodes, pentodes and other similar structures. The final structure made can also be connected to other similar VMD devices or to other electronic devices.
CA 2085981 1990-07-18 1990-10-17 Process and structure of an integrated vacuum microelectronic device Expired - Fee Related CA2085981C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US55512490A 1990-07-18 1990-07-18
US555,124 1990-07-18

Publications (2)

Publication Number Publication Date
CA2085981A1 true CA2085981A1 (en) 1992-01-19
CA2085981C CA2085981C (en) 1999-03-09

Family

ID=24216064

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2085981 Expired - Fee Related CA2085981C (en) 1990-07-18 1990-10-17 Process and structure of an integrated vacuum microelectronic device

Country Status (1)

Country Link
CA (1) CA2085981C (en)

Also Published As

Publication number Publication date
CA2085981C (en) 1999-03-09

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Legal Events

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