CA2080633A1 - Tableaux de commande de debit de gaz - Google Patents
Tableaux de commande de debit de gazInfo
- Publication number
- CA2080633A1 CA2080633A1 CA2080633A CA2080633A CA2080633A1 CA 2080633 A1 CA2080633 A1 CA 2080633A1 CA 2080633 A CA2080633 A CA 2080633A CA 2080633 A CA2080633 A CA 2080633A CA 2080633 A1 CA2080633 A1 CA 2080633A1
- Authority
- CA
- Canada
- Prior art keywords
- gas delivery
- gas
- delivery panels
- panels
- delivery
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C7/00—Methods or apparatus for discharging liquefied, solidified, or compressed gases from pressure vessels, not covered by another subclass
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C13/00—Details of vessels or of the filling or discharging of vessels
- F17C13/04—Arrangement or mounting of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
- F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
- F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
- F17C2205/0338—Pressure regulators
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/01—Pure fluids
- F17C2221/011—Oxygen
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/01—Pure fluids
- F17C2221/014—Nitrogen
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/01—Pure fluids
- F17C2221/016—Noble gases (Ar, Kr, Xe)
- F17C2221/017—Helium
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/03—Mixtures
- F17C2221/037—Containing pollutant, e.g. H2S, Cl
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2221/00—Handled fluid, in particular type of fluid
- F17C2221/05—Ultrapure fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/01—Propulsion of the fluid
- F17C2227/0114—Propulsion of the fluid with vacuum injectors, e.g. venturi
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
- F17C2227/04—Methods for emptying or filling
- F17C2227/044—Methods for emptying or filling by purging
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2260/00—Purposes of gas storage and gas handling
- F17C2260/03—Dealing with losses
- F17C2260/035—Dealing with losses of fluid
- F17C2260/036—Avoiding leaks
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
- F17C2270/00—Applications
- F17C2270/05—Applications for industrial use
- F17C2270/0518—Semiconductors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/87249—Multiple inlet with multiple outlet
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/877—With flow control means for branched passages
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Sampling And Sample Adjustment (AREA)
- Pipeline Systems (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US07/798,580 US5163475A (en) | 1991-11-26 | 1991-11-26 | Gas delivery panels |
US798,580 | 1991-11-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2080633A1 true CA2080633A1 (fr) | 1993-05-27 |
CA2080633C CA2080633C (fr) | 1994-12-13 |
Family
ID=25173768
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA 2080633 Expired - Fee Related CA2080633C (fr) | 1991-11-26 | 1992-10-15 | Tableaux de commande de debit de gaz |
Country Status (6)
Country | Link |
---|---|
US (1) | US5163475A (fr) |
EP (1) | EP0546280B1 (fr) |
KR (1) | KR0147037B1 (fr) |
CA (1) | CA2080633C (fr) |
DE (1) | DE69207569T2 (fr) |
ES (1) | ES2081543T3 (fr) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2813856B2 (ja) * | 1993-11-29 | 1998-10-22 | 日本エア・リキード株式会社 | シリンダ付ガス供給装置 |
US5749389A (en) * | 1993-12-22 | 1998-05-12 | Liquid Air Corporation | Purgeable connection for gas supply cabinet |
US5653807A (en) * | 1996-03-28 | 1997-08-05 | The United States Of America As Represented By The Secretary Of The Air Force | Low temperature vapor phase epitaxial system for depositing thin layers of silicon-germanium alloy |
US5915414A (en) * | 1997-09-04 | 1999-06-29 | Lsi Logic Corporation | Standardized gas isolation box (GIB) installation |
GB9724168D0 (en) | 1997-11-14 | 1998-01-14 | Air Prod & Chem | Gas control device and method of supplying gas |
US6142164A (en) * | 1998-03-09 | 2000-11-07 | Ultra Clean Technology Systems & Service, Inc. | Method and apparatus for removing leaking gas in an integrated gas panel system |
WO2000031462A1 (fr) | 1998-11-20 | 2000-06-02 | Mykrolis Corporation | Systeme et procede d'integration de composants gazeux |
US6578600B1 (en) * | 2000-10-31 | 2003-06-17 | International Business Machines Corporation | Gas isolation box |
DE10146457B4 (de) * | 2001-09-20 | 2006-11-30 | Messer Cutting & Welding Gmbh | Gasflaschen-Einheit |
US20060065293A1 (en) * | 2004-09-30 | 2006-03-30 | Building Materials Investment Corporation | Procedure for blocked drain line on asphalt trailer |
US7575616B2 (en) * | 2006-02-10 | 2009-08-18 | Entegris, Inc. | Low-profile surface mount filter |
US20180348034A1 (en) * | 2017-05-31 | 2018-12-06 | Air Liquide America Specialty Gases Llc | Gas sampling apparatus |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4489721A (en) * | 1982-12-30 | 1984-12-25 | The Regents Of The University Of California | Double lumen tube adaptor and valve system for medical anesthesia circuits |
US4597416A (en) * | 1984-09-19 | 1986-07-01 | Scales Frank J | Automotive air conditioning system flushing apparatus |
GB2176270B (en) * | 1985-06-10 | 1989-08-23 | Emcore Inc | Modular gas handling apparatus |
US4685156A (en) * | 1986-06-11 | 1987-08-11 | Brabazon James A | Adjustable water temperature safety control unit |
JPH0698292B2 (ja) * | 1986-07-03 | 1994-12-07 | 忠弘 大見 | 超高純度ガスの供給方法及び供給系 |
LU86802A1 (fr) * | 1987-03-09 | 1987-08-12 | Ceodeux Sa | Centrale de commande pour gaz sous pression |
-
1991
- 1991-11-26 US US07/798,580 patent/US5163475A/en not_active Expired - Fee Related
-
1992
- 1992-10-15 EP EP19920117636 patent/EP0546280B1/fr not_active Expired - Lifetime
- 1992-10-15 KR KR1019920018935A patent/KR0147037B1/ko not_active IP Right Cessation
- 1992-10-15 ES ES92117636T patent/ES2081543T3/es not_active Expired - Lifetime
- 1992-10-15 CA CA 2080633 patent/CA2080633C/fr not_active Expired - Fee Related
- 1992-10-15 DE DE69207569T patent/DE69207569T2/de not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
KR0147037B1 (ko) | 1998-11-02 |
US5163475A (en) | 1992-11-17 |
DE69207569D1 (de) | 1996-02-22 |
CA2080633C (fr) | 1994-12-13 |
EP0546280B1 (fr) | 1996-01-10 |
KR930011155A (ko) | 1993-06-23 |
DE69207569T2 (de) | 1996-08-22 |
ES2081543T3 (es) | 1996-03-16 |
EP0546280A1 (fr) | 1993-06-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKLA | Lapsed |