CA2079699A1 - Ultraviolet resistant silica glass fiber - Google Patents
Ultraviolet resistant silica glass fiberInfo
- Publication number
- CA2079699A1 CA2079699A1 CA002079699A CA2079699A CA2079699A1 CA 2079699 A1 CA2079699 A1 CA 2079699A1 CA 002079699 A CA002079699 A CA 002079699A CA 2079699 A CA2079699 A CA 2079699A CA 2079699 A1 CA2079699 A1 CA 2079699A1
- Authority
- CA
- Canada
- Prior art keywords
- silica glass
- glass fiber
- ultraviolet resistant
- resistant silica
- ppm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
- C03B19/1415—Reactant delivery systems
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C13/00—Fibre or filament compositions
- C03C13/04—Fibre optics, e.g. core and clad fibre compositions
- C03C13/045—Silica-containing oxide glass compositions
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/02—Pure silica glass, e.g. pure fused quartz
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/02—Pure silica glass, e.g. pure fused quartz
- C03B2201/03—Impurity concentration specified
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/02—Pure silica glass, e.g. pure fused quartz
- C03B2201/03—Impurity concentration specified
- C03B2201/04—Hydroxyl ion (OH)
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/07—Impurity concentration specified
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/07—Impurity concentration specified
- C03B2201/075—Hydroxyl ion (OH)
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
- C03B2201/12—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
- C03B2201/23—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with hydroxyl groups
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
- C03B2207/32—Non-halide
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- General Chemical & Material Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Glass Compositions (AREA)
- Glass Melting And Manufacturing (AREA)
Abstract
A silica glass optical fiber superior in resistance to ultraviolet rays, which fiber comprises a doped silica glass cladding layer formed on a silica glass core, said silica glass core having an OH content of 10-1000 ppm, a fluorine content of 50-5000 ppm, and being substantially free of chlorine.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63231123A JPH0791084B2 (en) | 1988-09-14 | 1988-09-14 | Ultraviolet-resistant synthetic quartz glass and method for producing the same |
CA002079699A CA2079699C (en) | 1988-09-14 | 1992-10-02 | Ultraviolet resistant silica glass fiber |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP63231123A JPH0791084B2 (en) | 1988-09-14 | 1988-09-14 | Ultraviolet-resistant synthetic quartz glass and method for producing the same |
CA002079699A CA2079699C (en) | 1988-09-14 | 1992-10-02 | Ultraviolet resistant silica glass fiber |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2079699A1 true CA2079699A1 (en) | 1994-04-03 |
CA2079699C CA2079699C (en) | 2002-03-05 |
Family
ID=25675564
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA002079699A Expired - Fee Related CA2079699C (en) | 1988-09-14 | 1992-10-02 | Ultraviolet resistant silica glass fiber |
Country Status (2)
Country | Link |
---|---|
JP (1) | JPH0791084B2 (en) |
CA (1) | CA2079699C (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1035078A2 (en) * | 1999-03-10 | 2000-09-13 | Nikon Corporation | Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member |
US7506522B2 (en) * | 2004-12-29 | 2009-03-24 | Corning Incorporated | High refractive index homogeneity fused silica glass and method of making same |
US7506521B2 (en) * | 2004-12-29 | 2009-03-24 | Corning Incorporated | High transmission synthetic silica glass and method of making same |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0653593B2 (en) * | 1989-06-09 | 1994-07-20 | 信越石英株式会社 | Synthetic silica glass optical body and method for producing the same |
JPH0627013B2 (en) * | 1989-06-14 | 1994-04-13 | 信越石英株式会社 | Synthetic silica glass optical body for ultraviolet laser and manufacturing method thereof |
JPH0627014B2 (en) * | 1989-06-19 | 1994-04-13 | 信越石英株式会社 | Synthetic silica glass optical body for ultraviolet laser and manufacturing method thereof |
JPH0624997B2 (en) * | 1989-09-11 | 1994-04-06 | 信越石英株式会社 | Optical components for laser light |
JPH0829960B2 (en) * | 1990-08-10 | 1996-03-27 | 信越石英株式会社 | Ultraviolet laser optical components |
US5410428A (en) * | 1990-10-30 | 1995-04-25 | Shin-Etsu Quartz Products Co. Ltd. | Optical member made of high-purity and transparent synthetic silica glass and method for production thereof or blank thereof |
JP2588447B2 (en) * | 1991-06-29 | 1997-03-05 | 信越石英株式会社 | Method of manufacturing quartz glass member for excimer laser |
EP0546196B1 (en) * | 1991-06-29 | 1997-05-02 | Shin-Etsu Quartz Products Co., Ltd. | Synthetic quartz glass optical member for excimer laser and production thereof |
JPH0611705A (en) * | 1992-01-31 | 1994-01-21 | Sony Corp | Active element substrate |
TW440548B (en) * | 1997-05-14 | 2001-06-16 | Nippon Kogaku Kk | Synthetic silica glass optical member and method of manufacturing the same |
JP3794664B2 (en) * | 1998-07-29 | 2006-07-05 | 信越化学工業株式会社 | Synthetic quartz glass member, manufacturing method thereof, and optical component for excimer laser |
EP1067097A4 (en) * | 1998-12-25 | 2004-03-31 | Asahi Glass Co Ltd | Synthetic quartz glass and method for preparation thereof |
CN1317573C (en) * | 2004-10-27 | 2007-05-23 | 上海大学 | Ultraviolet optical fiber with high-transmission ability and producing method thereof, and deposition apparatus containing high-hydroxyl optical fibre prefabricated bar |
-
1988
- 1988-09-14 JP JP63231123A patent/JPH0791084B2/en not_active Expired - Lifetime
-
1992
- 1992-10-02 CA CA002079699A patent/CA2079699C/en not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1035078A2 (en) * | 1999-03-10 | 2000-09-13 | Nikon Corporation | Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member |
EP1035078A3 (en) * | 1999-03-10 | 2001-10-17 | Nikon Corporation | Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member |
US6649268B1 (en) | 1999-03-10 | 2003-11-18 | Nikon Corporation | Optical member made of silica glass, method for manufacturing silica glass, and reduction projection exposure apparatus using the optical member |
US7506522B2 (en) * | 2004-12-29 | 2009-03-24 | Corning Incorporated | High refractive index homogeneity fused silica glass and method of making same |
US7506521B2 (en) * | 2004-12-29 | 2009-03-24 | Corning Incorporated | High transmission synthetic silica glass and method of making same |
Also Published As
Publication number | Publication date |
---|---|
CA2079699C (en) | 2002-03-05 |
JPH0280343A (en) | 1990-03-20 |
JPH0791084B2 (en) | 1995-10-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request | ||
MKLA | Lapsed |