CN1317573C - Ultraviolet optical fiber with high-transmission ability and producing method thereof, and deposition apparatus containing high-hydroxyl optical fibre prefabricated bar - Google Patents

Ultraviolet optical fiber with high-transmission ability and producing method thereof, and deposition apparatus containing high-hydroxyl optical fibre prefabricated bar Download PDF

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Publication number
CN1317573C
CN1317573C CNB2004100675357A CN200410067535A CN1317573C CN 1317573 C CN1317573 C CN 1317573C CN B2004100675357 A CNB2004100675357 A CN B2004100675357A CN 200410067535 A CN200410067535 A CN 200410067535A CN 1317573 C CN1317573 C CN 1317573C
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optical fiber
ultraviolet
preform
hydroxyl
quartz
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CN1609639A (en
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王廷云
郭小勇
陈振宜
范峥
包华育
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Shanghai University
University of Shanghai for Science and Technology
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University of Shanghai for Science and Technology
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

Abstract

The present invention relates to a method for making ultraviolet optical fibers with high transmission capability, and a depositing device comprising a high hydroxyl optical fiber preforming rod, which belongs to the technical field of optical glass fiber manufacturing technologies. The method of the present invention comprises the following steps: (1), an ultraviolet optical fiber preforming rod with a high hydroxyl content is made; (2), the optical fiber preforming rod with the high hydroxyl content is processed by ultraviolet light immunity radiation; (3), the optical fiber preforming rod enters a wire drawing operating system, and optical fiber heat processing is carried out to optical fiber preforming rod; (4), the optical fiber preforming rod is coated with coating and is heated and solidified. The method of the present invention proposes an immunity making technique for ultraviolet optical fibers with high hydroxyl contents, namely that firstly, ultraviolet light deliberately irradiates the quartz glass material of the optical fiber preforming rod with the high hydroxyl content for causing the quartz glass material to generating color center defects and multi-layer structure monstrosities; afterwards, a heat processing method is used for eliminating the defects; thereby, the ultraviolet light resisting capability of optical fibers are increased. The present invention eliminates the blocking effect of quartz glass optical fibers on ultraviolet light to a certain extent, and thereby, the present invention enhances the transmission capability of ultraviolet light in quartz optical fibers.

Description

High-transmission-capacity ultraviolet optical fiber, manufacturing method thereof and deposition device containing high-hydroxyl optical fiber preform
Technical Field
The invention relates to a method and equipment for manufacturing an optical fiber, in particular to a method for manufacturing a high-transmission-capacity ultraviolet optical fiber and a deposition device containing a high-hydroxyl optical fiber preform.
Background
The ultraviolet optical fiber transmits ultraviolet light and can be applied to the fields of photoetching technology, ultraviolet curing, biomedicine, mechanical micromachining, national defense and the like.
When optical fibers are used to transmit ultraviolet light, in many instances short wavelength, high energy ultraviolet light is transmitted. However, when ultraviolet light with short wavelength and high energy is transmitted in the quartz optical fiber, due to the action of the ultraviolet light beam and the quartz glass, a color center defect is generated in the quartz glass to cause a structural change, which prevents the transmission of the ultraviolet light, increases the loss and greatly reduces the transmission performance of the ultraviolet light. When a standard high hydroxyl uv silica fiber is irradiated with an unfiltered deuterium lamp for 24 hours, its transmission performance will decrease by about 50%. The shorter the wavelength of the ultraviolet light and the higher the power, the more prominent this problem of reducing the transmission performance of the ultraviolet light, which may be referred to as the fiber ultraviolet suppression effect. Therefore, when an excimer laser is used as a light source, the silica fiberThe transmission properties of the optical fiber are changed, and particularly, KrF excimer laser (wavelength: 248nm), F2Excimer lasers (wavelength: 157nm) and ArF excimer lasers (wavelength: 193nm) are more prominent as light sources.
The method aims to overcome the defect of transmission performance variation of ultraviolet light in the silica glass optical fiber or improve the stopping effect of the silica glass optical fiber on the ultraviolet light. At present, when manufacturing high-performance ultraviolet silica glass optical fiber, the following two methods are mainly adopted:
(1) the hydroxyl content (more than 500ppm) is increased in the quartz glass optical fiber core. However, in this method, as the content of hydroxyl groups increases, the wavelength of the ultraviolet absorptionedge becomes longer, and as a result, ultraviolet light of short wavelength (particularly, vacuum ultraviolet region) cannot be transmitted in the optical fiber. In addition, it is not the case that the higher the hydroxyl group content is, the better the effect is, but the improvement ability is limited, and when the hydroxyl group content concentration is higher than a certain value (e.g., 2000ppm), the loss thereof is increased.
(2) Another approach is to carry out a hydrogen loading treatment in the UV fiber, which also improves the transmission of short wavelength, high energy UV light in the fiber, however, hydrogen loading requires 1019cm-3The concentration of hydrogen gas, which can be completed only in a high-pressure container for several weeks, not only has large investment and long time, but also can cause a part of hydrogen-carrying gas to escape from the optical fiber due to environmental changes such as temperature and the like, and still can reduce the transmission performance of the optical fiber.
Disclosure of Invention
The invention aims to overcome the defect of transmission performance variation of ultraviolet light in a quartz glass optical fiber, and provides an improved high-transmission-capacity ultraviolet optical fiber for preventing the ultraviolet light from acting on the ultraviolet optical fiber. The invention also aims to provide a method for manufacturing the high-transmission-capacity doped high-hydroxyl ultraviolet optical fiber.
In order to achieve the purpose, the invention adopts the following conception: the method combining the high-doped hydroxyl content and the immune manufacturing technology is to deliberately irradiate the quartz glass optical fiber with high hydroxyl content by using ultraviolet light to generate color center defects and multilayer structure variation, namely 'inoculation' color center defects; then, the heat treatment method is used for eliminating the defects, and the ultraviolet light resisting capability of the optical fiber is increased, so that the ultraviolet optical fiber has immunity when transmitting ultraviolet light with short wavelength and high energy, namely, serious defects can not occur.
According to the conception, the invention adopts the following technical scheme:
a high transmission capacity ultraviolet optical fiber comprises a quartz glass optical fiber doped with hydroxyl, and is characterized in that the content of the hydroxyl is more than 700-800 ppm; the product has ultraviolet resistance after being treated by ultraviolet immunity.
The manufacturing method of the high-transmission-capacity ultraviolet optical fiber is characterized by comprising the following manufacturing steps:
a. manufacturing an ultraviolet optical fiber preform with high hydroxyl content: directly synthesizing the optical fiber quartz preform in oxyhydrogen high-temperature flame by adopting a chemical vapor deposition method outside a quartz cover inner tube to manufacture a high-hydroxyl-content preform; the content of hydroxyl in the prepared optical fiber preform is more than 700-800ppm, and the diameter of the preform is 9-15 mm;
b. ultraviolet light immune irradiation treatment of the optical fiber preform with high hydroxyl content: placing the preform on a rotating device, rotating the preform along the axis of the preform, and uniformly irradiating the whole preform with ultraviolet light with a wavelength of 100 and a wavelength of 300nm at the top, wherein the irradiation energy is 10-100mJ/cm2Range, which causes multilayer structure metamorphosis and color center defects;
c. entering drawing and heat treatment of the optical fiber: drawing by a drawing machine, and heating by a heating furnace to perform optical fiber heat treatment at 1650-2000 ℃;
d. optical fiber coating and curing: the optical fiber is coated with a coating layer through a coating cup and enters a curing furnace, the coating layer is cured by adopting an ultraviolet curing mode, the power of an ultraviolet lamp is within the range of 500-2500 watts, and finally the ultraviolet optical fiber is prepared.
The optical fiber perform rod is made of quartz glass or multi-component glass, and the coating of the optical fiber is an epoxy propylene resin coating or a plastic cladding.
The deposition device for the high-hydroxyl optical fiber preform of the high-transmission ultraviolet optical fiber comprises a lathe, and is characterized in that a supporting tube or a target sheet is clamped by the head of the lathe, the supporting tube or the target sheet is covered by a quartz cover, a quartz blowtorch is fixedly installed on one side of the quartz cover, the outlet jet air flow of the quartz blowtorch and the supporting tube or the target sheet form an angle of 45-50 degrees, and the quartz blowtorch is provided with an oxygen inlet, a hydrogen inlet and a hydrogen outlet and a silicon tetrachloride charging port.
The above-mentioned pre-irradiation with ultraviolet light also has a problem of how to irradiate ultraviolet light. When one end face of the optical fiber is repeatedly irradiated with high-power ultraviolet light, structural defects are caused, which occur only at the irradiated end face, and the ultraviolet light cannot reach the other end face. Therefore, it is impossible to produce a long optical fiber except for a short optical fiber. If the low power uv light is used, the treatment time will be too long, which is not practical. Furthermore, if the finished optical fiber is laterally irradiated with ultraviolet light, the insulating coating layer (an outer protective coating layer) formed of synthetic resin is melted by heating with ultraviolet light, and this irradiation causes damage to the ultraviolet optical fiber. If a metal coated uv fiber prevents the passage of uv light, this illumination will have no illumination effect. For this reason, the present invention is directed to a method for drawing a silica optical fiber preform in a drawing operation system while simultaneously performing heat treatment, in which the preform is irradiated with ultraviolet light, not an ultraviolet optical fiber but an ultraviolet optical fiber preform.
The principle of the method of the invention is as follows:
in the method of the present invention, a silica glass preform having a high hydroxyl group content is irradiated with ultraviolet light to make SiO in the silica glass material2The initial structure (equivalent to Si-O-Si) and the initial defect particles (equivalent to Si-Si, equivalent to Si-O-Si) of the quartz glass are subjected to multilayer structure variation and color center defects such as E 'color center (equivalent to Si) and NBOH color center (equivalent to Si-O), and then the quartz glass material is subjected to heat treatment while being drawn by drawing heat generated when the ultraviolet optical fiber is drawn by a drawing machine heating furnace, and a part of Si-O with broken bonds is recovered during the heat treatment, so that the E' color center and NBOH color center defects are eliminated, namely (ii) a In addition, the average valence bond angle of the ≡ Si-O-Si ≡ network structure of the quartz glass material after heat treatment is larger than that of the quartz glass material before heat treatment, and the relaxation of the structure also provides a stable structural form for the quartz glass material, so that when the quartz glass material is irradiated by ultraviolet light again, the structure defects are prevented from being generated again, the immunity function is achieved, and the transmission performance of the ultraviolet light is improved.
The invention has the advantages and effects that the optical fiber has high ultraviolet light transmission performance, obviously improves the transmission energy compared with the optical fiber without hydroxyl content or with tiny content, has stable transmission, simple manufacture, easy realization and the like. In addition, the method is carried out in a conventional optical fiber drawing operation system, and no equipment is required to be added, so that the method is beneficial to the mass production of optical fibers and saves the cost.
Description of the drawings:
FIG. 1 is a schematic structural diagram of a hydroxyl deposition device for an optical fiber preform
Fig. 2 is a graph comparing performance of a high transmission capacity uv fiber with a low hydroxyl, non-uv-immune treated fiber according to an embodiment of the present invention.
Detailed Description
The embodiment of the invention is as follows: the high-transmission-capacity ultraviolet optical fiber comprises a quartz glass optical fiber doped with hydroxyl, wherein the hydroxyl content of the quartz glass optical fiber is 700-800 ppm; the product has ultraviolet resistance after being treated by ultraviolet immunity.
The manufacturing method of the high-transmission-capacity ultraviolet optical fiber comprises the following steps:
a. manufacturing an ultraviolet optical fiber preform with high hydroxyl content: conventional processes such as modified chemical vapor deposition produce preforms having low hydroxyl content, and thus, high hydroxyl content preforms can be produced by outside tube chemical vapor deposition (sputtering) in a quartz envelope by synthesizing the optical fiber quartz preform directly in a hydrogen-oxygen high temperature flame. The content of hydroxyl in the prepared optical fiber preform is 700-800ppm, and the diameter of the preform is 9-15 mm. The specific manufacturing method of the high-hydroxyl optical fiber preform comprises the following steps:
a hollow supporting tube or a quartz target sheet is fixed on a lathe head 3 of a hydroxyl deposition device of an optical fiber preform rod to rotate uniformly, and the supporting tube or the target sheet 1 is isolated from the outside space by a quartz cover 2 to prevent the surface of the preform from being stained, as shown in figure 1. A quartz torch 4 is fixed to one side of the quartz cover 2 and the jet air is directed at an angle of 45 degrees to the support tube or target 1. The inlet of the blast burner is a silicon tetrachloride charging hole 7, so that silicon tetrachloride, oxygen 5 and hydrogen 6 are mixed and injected into the blast burner after interaction, and the mixture is combusted at the outlet of the blast burner and reacts in a high-temperature area to generate a high-hydroxyl silicon dioxide material. While the torch is moved up and down, the support tube or the target 1 is rotated, thereby forming a high hydroxyl group silica preform.
b. Ultraviolet light immune irradiation treatment of the high hydroxyl content optical fiber preform: the method comprises the steps of firstly, deliberately irradiating an optical fiber preform with high hydroxyl content by ultraviolet light to generate multilayer structure variation and color center defects, placing the preform on a rotating device, and rotating the axis of the preform along the axis of the preform to uniformly irradiate the whole preform by the ultraviolet light at the end part; the irradiation wavelength of the ultraviolet light is selected between 100-300nm, and the irradiation energy of the ultraviolet light to the preform is 10-100mJ/cm2Within the range.
The irradiation of ultraviolet light is continuous, and the irradiation time is matched with the wavelength and the intensity parameter of irradiation. Short wavelength (e.g. 193nm), and high energy (e.g. 90 mJ/cm)2) The required illumination time of the laser is shorter, and can be set to be tens of minutes; the time required by the ultraviolet lamp, deuterium lamp and mercury lamp light source is longer, and can be set at 8-24 hours. In order to achieve good illumination of the entire rod, the preform is less than 1 meter and is illuminated at both ends.
Usable ultraviolet light source F2(157nm), ArF (193nm), KrF (248nm) excimer laser, deuterium lamp, mercury lamp, ultraviolet lamp can also be used.
c. And (3) entering a wire drawing operation system and carrying out heat treatment on the optical fiber: placing the optical fiber preform subjected to the ultraviolet light immune irradiation treatment into a clamping device, slowly sending the optical fiber preform into a heating furnace, drawing by a traction wheel, and simultaneously carrying out heat treatment on the optical fiber by using heat generated by the heating furnace, wherein the drawing and the heat treatment are carried out simultaneously, and the drawing temperature is 1650-2000 ℃;
d. coating and curing the optical fiber; the process is carried out in the same wire drawing operation system, the optical fiber is coated with epoxy acrylic resin coating material through a coating cup and enters a curing furnace for curing, an ultraviolet curing mode is adopted, the power of an ultraviolet lamp is determined according to the wire drawing speed and the length of the curing furnace, and is generally in the range of 500 plus 2500 watts, and finally the ultraviolet quartz glass optical fiber is prepared.
The method is not only suitable for the manufacture of the quartz glass, but also suitable for the manufacture of multi-component glass and plastic silicon-coated core ultraviolet optical fibers.
Referring to fig. 1, the deposition apparatus for a high hydroxyl optical fiber preform used in the above method of the present embodiment comprises a lathe, a headstock 3 of the lathe holds a support tube or target 1, the support tube or target 1 is covered by a quartz cover 2, the quartz cover 2 is fixedly provided with a quartz burner 4, an outlet jet air flow of the quartz burner 4 forms an angle of 45 to 50 degrees with the support tube or target 1, and the quartz burner 4 has an oxygen inlet and outlet 5, a hydrogen inlet 6 and a silicon tetrachloride feed inlet 7.
The high transmission capacity ultraviolet optical fiber manufactured in this example was compared with the low hydroxyl, non-immune treated optical fiber, and the measurement results are shown in fig. 2. The hydroxyl content of the low hydroxyl fiber is about 60ppm and the hydroxyl content of the high hydroxyl fiber is about 700 ppm. The rotating preform was irradiated with an ultraviolet lamp of 253.7mm for about 20 hours. Curve a in the test results represents an optical fiber with high hydroxyl groups treated with an immunological technique; curve B represents a high hydroxyl optical fiber not treated with immunological techniques; curve C represents an optical fiber with low hydroxyl groups treated with an immunological technique; curve D represents a fiber with low hydroxyl groups that were not treated with the immunological technique. As can be seen fromfig. 2, the transmission loss in the uv wavelength band curve a is the lowest, that is: high hydroxyl treated optical fibers with immunological techniques have the best transmission. This also verifies the correctness and validity of the method.

Claims (4)

1. A high transmission capacity ultraviolet optical fiber comprises a quartz glass optical fiber doped with hydroxyl, and is characterized in that the content of the hydroxyl is 700-800 ppm; the product has ultraviolet resistance after being treated by ultraviolet immunity.
2. A method for making high transmission capacity ultraviolet light, which is used for making the high transmission capacity ultraviolet optical fiber according to claim 1, and is characterized in that the method comprises the following steps:
a. manufacturing an ultraviolet optical fiber preform with high hydroxyl content: directly synthesizing the optical fiber quartz preform in oxyhydrogen high-temperature flame by adopting a chemical vapor deposition method outside a quartz cover inner tube to manufacture a high-hydroxyl-content preform; the content of hydroxyl in the prepared optical fiber preform is more than 700-800ppm, and the diameter of the preform is 9-15 mm;
b. ultraviolet light immune irradiation treatment of the optical fiber preform with high hydroxyl content: placing the preform on a rotating device, rotating the preform along the axis of the preform, and uniformly irradiating the whole preform with ultraviolet light with a wavelength of 100 and a wavelength of 300nm at the top, wherein the irradiation energy is 10-100mJ/cm2Range, which causes multilayer structure metamorphosis and color center defects;
c. entering drawing and heat treatment of the optical fiber: drawing by a drawing machine, and heating by a heating furnace to perform optical fiber heat treatment at 1650-2000 ℃;
d. optical fiber coating and curing: coating a coating on the optical fiber through a coating cup, entering a curing furnace, and curing the coating in an ultraviolet curing mode; the power of the ultraviolet lamp is in the range of 500-2500 watts, and finally the ultraviolet optical fiber is prepared.
3. The method for manufacturing the high transmission capacity ultraviolet optical fiber according to claim 2, wherein the material of the preform is quartz glass or multi-component glass, and the coating of the optical fiber is an epoxy acrylic resin coating or a plastic coating.
4. A high hydroxyl optical fiber preform deposition device for the high transmission capacity ultraviolet optical fiber manufacturing method according to claim 2, comprising a lathe, and characterized in that a lathe head (3) of the lathe clamps a support tube or a target sheet (1), the support tube or the target sheet (1) is covered by a quartz cover (2), one side of the quartz cover (2) is fixedly provided with a quartz blowtorch (4), the outlet jet air flow of the quartz blowtorch (4) forms an angle of 45-50 degrees with the support tube or the target sheet (1), and the quartz blowtorch (4) is provided with an oxygen inlet (5), a hydrogen inlet (6) and a silicon tetrachloride charging port (7).
CNB2004100675357A 2004-10-27 2004-10-27 Ultraviolet optical fiber with high-transmission ability and producing method thereof, and deposition apparatus containing high-hydroxyl optical fibre prefabricated bar Expired - Fee Related CN1317573C (en)

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JP4831841B2 (en) * 2009-07-10 2011-12-07 三菱重工業株式会社 Vacuum deposition apparatus and method
CN108395092B (en) * 2018-05-24 2021-05-11 成都富通光通信技术有限公司 Multi-blast-lamp deposition method for preparing optical fiber preform
CN109111099B (en) * 2018-09-05 2021-11-16 南京华信藤仓光通信有限公司 Method for manufacturing high-strength optical fiber
CN111995262A (en) * 2020-09-07 2020-11-27 长飞光纤光缆股份有限公司 Ultraviolet optical fiber and preparation method thereof
CN112604925B (en) * 2020-12-08 2022-10-04 哈尔滨工业大学 Manufacturing method and film coating method based on hollow optical fiber light field resonance structure
CN112485854B (en) * 2020-12-24 2022-04-22 中国工程物理研究院激光聚变研究中心 Transmission reflector and application thereof in reducing damage risk of back scattering light to laser driver

Citations (2)

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Publication number Priority date Publication date Assignee Title
JPH0280343A (en) * 1988-09-14 1990-03-20 Shin Etsu Chem Co Ltd Ultraviolet light resistant synthetic quartz glass and production thereof
CN1455274A (en) * 2003-02-25 2003-11-12 上海大学 Method of manufacturing high-performance ultraviolet optical fiber

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0280343A (en) * 1988-09-14 1990-03-20 Shin Etsu Chem Co Ltd Ultraviolet light resistant synthetic quartz glass and production thereof
CN1455274A (en) * 2003-02-25 2003-11-12 上海大学 Method of manufacturing high-performance ultraviolet optical fiber

Non-Patent Citations (1)

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Title
紫外固化光纤缓冲层涂料的研究 杨延安,光纤与电缆及其应用技术,第4期 2003 *

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