CA2062447A1 - Dispositif pour la detection des defauts dans les grains reflectorises - Google Patents

Dispositif pour la detection des defauts dans les grains reflectorises

Info

Publication number
CA2062447A1
CA2062447A1 CA2062447A CA2062447A CA2062447A1 CA 2062447 A1 CA2062447 A1 CA 2062447A1 CA 2062447 A CA2062447 A CA 2062447A CA 2062447 A CA2062447 A CA 2062447A CA 2062447 A1 CA2062447 A1 CA 2062447A1
Authority
CA
Canada
Prior art keywords
detector
specular
diffuse
angle
inspection point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA2062447A
Other languages
English (en)
Other versions
CA2062447C (fr
Inventor
Peter Charles Matthews
Barry Godfrey Wilson
Jon Fredrick Soest
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
USNR LLC
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2062447A1 publication Critical patent/CA2062447A1/fr
Application granted granted Critical
Publication of CA2062447C publication Critical patent/CA2062447C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CA 2062447 1991-03-07 1992-03-06 Dispositif pour la detection des defauts dans les grains reflectorises Expired - Fee Related CA2062447C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US66613391A 1991-03-07 1991-03-07
US07/666,133 1991-03-07

Publications (2)

Publication Number Publication Date
CA2062447A1 true CA2062447A1 (fr) 1992-09-08
CA2062447C CA2062447C (fr) 1998-10-13

Family

ID=24672959

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2062447 Expired - Fee Related CA2062447C (fr) 1991-03-07 1992-03-06 Dispositif pour la detection des defauts dans les grains reflectorises

Country Status (1)

Country Link
CA (1) CA2062447C (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0580909A2 (fr) * 1992-06-30 1994-02-02 U.S. Natural Resources, Inc. Caractérisation des défauts de fil de bois par réflexion
CZ296823B6 (cs) * 1995-07-14 2006-06-14 Casco Products Ab Zpusob kvalitativního nebo kvantitativního zjistování parametru panelu na bázi dreva a zpusob rízení procesních promenných
CN113325004A (zh) * 2021-07-07 2021-08-31 上海超硅半导体股份有限公司 一种半导体晶片表面缺陷检测方法以及检测装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0580909A2 (fr) * 1992-06-30 1994-02-02 U.S. Natural Resources, Inc. Caractérisation des défauts de fil de bois par réflexion
CZ296823B6 (cs) * 1995-07-14 2006-06-14 Casco Products Ab Zpusob kvalitativního nebo kvantitativního zjistování parametru panelu na bázi dreva a zpusob rízení procesních promenných
CN113325004A (zh) * 2021-07-07 2021-08-31 上海超硅半导体股份有限公司 一种半导体晶片表面缺陷检测方法以及检测装置

Also Published As

Publication number Publication date
CA2062447C (fr) 1998-10-13

Similar Documents

Publication Publication Date Title
EP0001178B1 (fr) Senseur optique
AU616731B2 (en) Method and apparatus for monitoring the surface profile of a moving workpiece
EP0360484A3 (fr) Densitomètre pour mesurer la réflectance spéculaire
US4785336A (en) Device for monitoring characteristics of a film on a substrate
EP0867775A3 (fr) Dispositif d'exposition à proximité avec dispositif de règlage de distance
EP1650548A3 (fr) Capteur de plasmons de surface
EP0774657A3 (fr) Appareil et procédé pour la détection d'un liquide
EP0360126A3 (fr) Méthode d'opération d'un détecteur optique de fumée et détecteur de fumée pour la mise en oeuvre de la méthode
ES8500445A1 (es) Procedimiento y aparato para la deteccion optica de defectos radiales reflectantes en recipientes traslucidos
BG103823A (en) Instrument for monitoring the qualities of sheet materials
AU2976589A (en) Method and apparatus for the optical detection of the roughness profile of a material surface
WO1986004676A3 (fr) Dispositifs pour la determination optique d'erreurs de forme de faible importance
EP0953836A3 (fr) Capteur de plasmons de surface
AU2003285457A1 (en) Method and device for the detection of surface defects on the finish of a transparent or translucent rotating container
DE3373212D1 (en) Detector system for measuring the intensity of a radiation scattered at a predetermined angle from a sample irradiated at a specified angle of incidence
EP0328374A3 (fr) Appareil pour l'inspection de récipients
CA2062447A1 (fr) Dispositif pour la detection des defauts dans les grains reflectorises
CA1271822A (fr) Appareil optique, et methode d'examen d'un objet
JPS57178134A (en) Specular surface defect observing device
GB9423186D0 (en) Optical relay
EP0352797A3 (fr) Procédé et appareil pour détecteur de défauts sur des surfaces spéculaires
US5118188A (en) Illuminating arrangement for illuminating a photomultiplier in a double-beam photometer
GB1599926A (en) Apparatus for optically scanning a surface
SU1330463A1 (ru) Бесконтактный оптический способ определени высоты шероховатости поверхности
JPS5759153A (en) Detector for surface characteristic

Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed