CA1310300C - Methode de traitement au plasma et appareil a reservoirs multiples - Google Patents

Methode de traitement au plasma et appareil a reservoirs multiples

Info

Publication number
CA1310300C
CA1310300C CA000512326A CA512326A CA1310300C CA 1310300 C CA1310300 C CA 1310300C CA 000512326 A CA000512326 A CA 000512326A CA 512326 A CA512326 A CA 512326A CA 1310300 C CA1310300 C CA 1310300C
Authority
CA
Canada
Prior art keywords
plasma
tanks
evacuating
openable
communicating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA000512326A
Other languages
English (en)
Inventor
Hisao Toya
Kazuaki Goto
Yasuhiko Ogisu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyoda Gosei Co Ltd
Original Assignee
Toyoda Gosei Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyoda Gosei Co Ltd filed Critical Toyoda Gosei Co Ltd
Application granted granted Critical
Publication of CA1310300C publication Critical patent/CA1310300C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/14—Surface shaping of articles, e.g. embossing; Apparatus therefor by plasma treatment

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
CA000512326A 1985-06-24 1986-06-24 Methode de traitement au plasma et appareil a reservoirs multiples Expired - Fee Related CA1310300C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP137350/85 1985-06-24
JP13735085A JPS61296038A (ja) 1985-06-24 1985-06-24 プラズマ処理装置

Publications (1)

Publication Number Publication Date
CA1310300C true CA1310300C (fr) 1992-11-17

Family

ID=15196592

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000512326A Expired - Fee Related CA1310300C (fr) 1985-06-24 1986-06-24 Methode de traitement au plasma et appareil a reservoirs multiples

Country Status (3)

Country Link
JP (1) JPS61296038A (fr)
CA (1) CA1310300C (fr)
DE (1) DE3620934A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01308436A (ja) * 1987-10-29 1989-12-13 Nishikawa Kasei Kk プラズマ処理装置
JPH03119432U (fr) * 1990-03-16 1991-12-10

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4192706A (en) * 1975-01-22 1980-03-11 Tokyo Shibaura Electric Co., Ltd. Gas-etching device

Also Published As

Publication number Publication date
JPS61296038A (ja) 1986-12-26
DE3620934A1 (de) 1987-01-02

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