CA1299069C - Procede pour l'obtention d'un article renfermant une couche profonde de sio ; article ainsi obtenu - Google Patents

Procede pour l'obtention d'un article renfermant une couche profonde de sio ; article ainsi obtenu

Info

Publication number
CA1299069C
CA1299069C CA000550575A CA550575A CA1299069C CA 1299069 C CA1299069 C CA 1299069C CA 000550575 A CA000550575 A CA 000550575A CA 550575 A CA550575 A CA 550575A CA 1299069 C CA1299069 C CA 1299069C
Authority
CA
Canada
Prior art keywords
implant
randomizing
oxygen
temperature
overlayer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CA000550575A
Other languages
English (en)
Inventor
Alice Elizabeth White
Kenneth Thomas Short
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
American Telephone and Telegraph Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Telephone and Telegraph Co Inc filed Critical American Telephone and Telegraph Co Inc
Application granted granted Critical
Publication of CA1299069C publication Critical patent/CA1299069C/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
CA000550575A 1986-11-26 1987-10-29 Procede pour l'obtention d'un article renfermant une couche profonde de sio ; article ainsi obtenu Expired - Fee Related CA1299069C (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US93327386A 1986-11-26 1986-11-26
US933,273 1986-11-26

Publications (1)

Publication Number Publication Date
CA1299069C true CA1299069C (fr) 1992-04-21

Family

ID=25463661

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000550575A Expired - Fee Related CA1299069C (fr) 1986-11-26 1987-10-29 Procede pour l'obtention d'un article renfermant une couche profonde de sio ; article ainsi obtenu

Country Status (1)

Country Link
CA (1) CA1299069C (fr)

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