CA1297266C - Process for purifying phosphoric acid for electrical semiconductor use - Google Patents

Process for purifying phosphoric acid for electrical semiconductor use

Info

Publication number
CA1297266C
CA1297266C CA000577547A CA577547A CA1297266C CA 1297266 C CA1297266 C CA 1297266C CA 000577547 A CA000577547 A CA 000577547A CA 577547 A CA577547 A CA 577547A CA 1297266 C CA1297266 C CA 1297266C
Authority
CA
Canada
Prior art keywords
acid
phosphoric acid
added
hydrogen
hydrogen peroxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
CA000577547A
Other languages
English (en)
French (fr)
Inventor
Richard E. Hall
Peter H. Zeh
Frederic B. Jueneman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FMC Corp
Original Assignee
FMC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FMC Corp filed Critical FMC Corp
Application granted granted Critical
Publication of CA1297266C publication Critical patent/CA1297266C/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B25/00—Phosphorus; Compounds thereof
    • C01B25/16—Oxyacids of phosphorus; Salts thereof
    • C01B25/18—Phosphoric acid
    • C01B25/234—Purification; Stabilisation; Concentration
    • C01B25/237—Selective elimination of impurities
    • C01B25/238—Cationic impurities, e.g. arsenic compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Removal Of Specific Substances (AREA)
  • Manufacture And Refinement Of Metals (AREA)
CA000577547A 1987-10-13 1988-09-15 Process for purifying phosphoric acid for electrical semiconductor use Expired - Lifetime CA1297266C (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US107,329 1987-10-13
US07/107,329 US4804526A (en) 1987-10-13 1987-10-13 Process for purifying phosphoric acid for electrical semiconductor use

Publications (1)

Publication Number Publication Date
CA1297266C true CA1297266C (en) 1992-03-17

Family

ID=22316079

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000577547A Expired - Lifetime CA1297266C (en) 1987-10-13 1988-09-15 Process for purifying phosphoric acid for electrical semiconductor use

Country Status (3)

Country Link
US (1) US4804526A (show.php)
JP (1) JPH01131009A (show.php)
CA (1) CA1297266C (show.php)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5501767A (en) * 1992-11-13 1996-03-26 Micron Technology, Inc. Method for gettering noble metals from mineral acid solution
JP3242566B2 (ja) * 1995-04-27 2001-12-25 富士通株式会社 分析試料の調製方法、不純物の分析方法及び高純度燐酸の調製方法ならびに半導体装置の製造方法
JP4316946B2 (ja) * 2003-07-01 2009-08-19 日本化学工業株式会社 高純度リン酸及びその製造方法
US20050095222A1 (en) * 2003-10-29 2005-05-05 Taro Suzuki Allergen inhibitor, allergen-inhibiting method, allergen-inhibiting fiber and allergen-inhibiting sheet
JP5016201B2 (ja) * 2005-05-18 2012-09-05 日本化学工業株式会社 高純度リン酸の製造方法
JP2009114064A (ja) * 2009-03-05 2009-05-28 Nippon Chem Ind Co Ltd 高純度リン酸及びその製造方法
CN108275669B (zh) * 2018-01-16 2021-12-03 湖北兴福电子材料有限公司 一种电子级磷酸脱除刺激性气味的方法
PL440852A1 (pl) 2022-04-04 2023-10-09 Alventa Spółka Akcyjna Sposób oczyszczania kwasu fosforowego(V) na potrzeby krystalizacji statycznej do otrzymywania kwasu jakości odpowiedniej dla branży półprzewodników

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1597984A (en) * 1923-09-13 1926-08-31 Bour Harry E La Method of concentrating and purification of phosphoric acid
US1777548A (en) * 1928-03-19 1930-10-07 Swann Res Inc Process for the treatment of phosphoric acid
DE593370C (de) * 1931-11-05 1934-02-24 Chem Fab Budenheim Akt Ges Reinigung der durch sauren Aufschluss von Rohphosphaten erhaltenen Rohphosphorsaeure
GB778810A (en) * 1954-02-09 1957-07-10 Fonte Electr S A Process for manufacturing crystallised pure and anhydrous phosphoric acid
US3342549A (en) * 1960-11-10 1967-09-19 Togo Soda Mfg Co Ltd Process for refining phosphoric acid preparations
NL6606839A (show.php) * 1965-05-21 1966-11-22
JPS5297394A (en) * 1976-02-13 1977-08-16 Toyo Soda Mfg Co Ltd Removal of organic matter in phosphoric acid
US4294809A (en) * 1976-05-06 1981-10-13 W. R. Grace & Co. Aeration of phosphoric acid
DE2910711A1 (de) * 1979-03-19 1980-10-02 Hoechst Ag Verfahren zur entfernung von verunreinigungen organischer art aus phosphorsaeure
US4503022A (en) * 1982-08-23 1985-03-05 International Minerals & Chemical Corp. Process for oxidation of wet process phosphoric acid
DE3444975A1 (de) * 1984-12-10 1986-06-12 Hoechst Ag, 6230 Frankfurt Verfahren zur entarsenierung von phosphorsauren loesungen

Also Published As

Publication number Publication date
JPH01131009A (ja) 1989-05-23
JPH05327B2 (show.php) 1993-01-05
US4804526A (en) 1989-02-14

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Legal Events

Date Code Title Description
MKLA Lapsed
MKLA Lapsed

Effective date: 19980317