CA1265435A - Method for producing suspension in air of ultra-fine mist particles - Google Patents
Method for producing suspension in air of ultra-fine mist particlesInfo
- Publication number
- CA1265435A CA1265435A CA000517874A CA517874A CA1265435A CA 1265435 A CA1265435 A CA 1265435A CA 000517874 A CA000517874 A CA 000517874A CA 517874 A CA517874 A CA 517874A CA 1265435 A CA1265435 A CA 1265435A
- Authority
- CA
- Canada
- Prior art keywords
- air
- ultra
- droplets
- fine
- suspension
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F6/00—Air-humidification, e.g. cooling by humidification
- F24F6/12—Air-humidification, e.g. cooling by humidification by forming water dispersions in the air
- F24F6/14—Air-humidification, e.g. cooling by humidification by forming water dispersions in the air using nozzles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
- B08B9/08—Cleaning containers, e.g. tanks
- B08B9/093—Cleaning containers, e.g. tanks by the force of jets or sprays
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F8/00—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying
- F24F8/10—Treatment, e.g. purification, of air supplied to human living or working spaces otherwise than by heating, cooling, humidifying or drying by separation, e.g. by filtering
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/54—Free-cooling systems
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Combustion & Propulsion (AREA)
- General Engineering & Computer Science (AREA)
- Dispersion Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Separation Of Particles Using Liquids (AREA)
- Air Humidification (AREA)
- Nozzles (AREA)
- Detergent Compositions (AREA)
- Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Glanulating (AREA)
Abstract
<ABSTRACT OF THE DISCLOSURE>
The interior of a room is cleaned by supplying thereto mist-carrying air suspending therein. per cubic foot, more than 2,000.000, preferably, more than 5.000,000, and more preferably, more than 10,000,000 ultra-fine moisture particles or micro-droplets of 0.5 microns or smaller in particle size, produced by passing air through an atomizer in which a great number of ultra-fine mist particles or micro-droplets are produced by injecting water at a gage pressure of 0.3 - 5.5 kg/cm2, preferably, of 0.5 - 2.5 kg/cm2 from a water injection pipe with a large number of nozzles of a diameter of 0.2 - 8 mm, preferably, of 0.5 - 3 mm against a side wall located at a distance of 10 -150 cm from the injection nozzles.
The interior of a room is cleaned by supplying thereto mist-carrying air suspending therein. per cubic foot, more than 2,000.000, preferably, more than 5.000,000, and more preferably, more than 10,000,000 ultra-fine moisture particles or micro-droplets of 0.5 microns or smaller in particle size, produced by passing air through an atomizer in which a great number of ultra-fine mist particles or micro-droplets are produced by injecting water at a gage pressure of 0.3 - 5.5 kg/cm2, preferably, of 0.5 - 2.5 kg/cm2 from a water injection pipe with a large number of nozzles of a diameter of 0.2 - 8 mm, preferably, of 0.5 - 3 mm against a side wall located at a distance of 10 -150 cm from the injection nozzles.
Description
~i5~3S
METHOD FOR PRODUCING SUSPENSION IN AIR
OF ULTRA-FINE MIST PARTICLES
<BACKGROUND OF THE INVENTION>
Field of the Invention 3 This inven-tion relates to a method for Producing a suspension in air of ultra-fine mist particles or micro-droplets of water, suspending per cubic foot more than ~.0~0.000. Preferably~ more than 5,000,00~, and more Preferably~ more than 10,000,000 finely atomi-~ed mist 1~ Particles or micro-droPlets~ and a method for cleaning the interior of a room bY the use of such a suspension of ultra-fine mist particles.
Description of the Prior Art Clean air free of dusts and microbes is needed in 1~ hosPitals~ Pharmaceutical Plants~ food manufactories, refri-gcrative food storage rooms, laboratories, experiment rooms and the like. In this connection, it has been the conven-tional Practice to send in clean air through an air filter or to provide an air curtain at the entrance of a room. Never-~O theless~ difficulties are encountered in obtaining clean air of satisfactorY quality bY these measures even in combination with an air shower room.
Therefore, at the present moment, it is considered almost imPossible to suPply ultra-clean air or gas on an ~2~ 3~
industrial scale in LSI and VLSI manufacturing Plan-ts.
biopharmaceutical manufacturing Plants. surgical oPerating rooms, precision machinerY-washing PlantS, sterilized food manllfac-turing Plants, refrigerative storage rooms and the 3 like which re~uire a severer control to Preclude in-trusion of not onlY bacteria and viruses but also dusts Particles of a size smaller than 0.5 microns.
Under -these circumstances, the Present invention contemplates to rePlY to the strong demand for a method for 1~ establishing a high degree of cleanness in rcfri4erative storage rooms. operating rooms, manufacturing plants or the like in various industrial fields.
As a result of an intensive studY on the adsorPtive air cleaning phenomenon of the moisture particles which are 1~ susPended in air. it has been found that, in addition to fine dust Particles in air, even bacteria, mold fungi, sPores and viruses can be removed bY adsorPtion on mist Particles by t~e use of air which contains more finelY atomized moisture Particles or micro-droplets substantially smaller than 0.5 ~0 microns at a rate of more than 2,000,000 Particles~
preferablY9 at a rate of more than 5.000,000 Particles~ more Preferably~ at a rate of more than 10,000,000 particles per cubic foot. UnexPectedly~ it has also been found that a gaseous atmosPhere suspending therein such finelY atomized 5~3~
micro-droplets can manifest the cleaning effect withou-t wetting an obiect or article in the atmosphere desPite -the e~istence of moisture Particles as long as they are in the form of ultra-fine micro-droplets. A further studY revealed that an ordinarY gas can be highlY cleaned into an ultra-clean state bY PaSsing the gas -through a ~aseous atmosPhere suspendin~ ultra-fine mist particles or micro-droplets.
permitting to aPPly such hishlY cleaned gas directlY to a room~ a particular sPace or anY other Place needing supplY of 1a such an ultra-clean gas.
<SUMMARY OF THE INVENTION~
In accordance with the present invention, -there is Provided a method of producins air susPending ultra-fine mist particles or micro-drople-ts, which essen-tially comprises 13 th~ stePs of: iniecting water in an atomizing chamber under Pressure of 0.3 - 5.5 ksfcmæ. preferab1y, under pressure of 0.5 - 2.5 kg~cm2 from a water iniection Pipe with a large numb~r o nozzles having a diameter of 0.2 - 8 mm, preferablY~ a diameter of 0.5 - 3 mm, bombarding the injected ~ water against a wall located at a distance of l0 - l50 cm from the nozzles to Produce ultra-fine mist particles or micro-droplets; and passing air through the atomizing chamber to entrain therein per cubic foot more than 2;000,000, preferablY~ more than 5.000,000. and more preferably, more ~5~35i than 10.000,000 ultra-fine micro-droPlets of 0.5 microns or smaller in particle si~e, and a method of cleaning the interior of a room bY circulating the mist susPending air therein~o.
<BRIEF DFSCRIPTION OF THE DRAWIN~S>
In the accomPanyins drawings:
Fig. 1 is a diagrammatic longitudinal section of an atomizer embodYin~ the Present invention;
Fig. 2 is a diagrammatic cross-sectional view of a middle Portion of the atomizer shown in Fig. I;
Fis. 3 is a diagrammatic sectional view of a cYclone ~or removing moisture particles;
Fig. 4 is a view similar to Fig. 1 but showing another embodiment of the atomizer according to the invention;
13 Fig. 5 is a diasrammatic cross-sectional view of an upper Portion of the atomizer of Fig. 4;
Fig. 6 is a diagrammatic cross-sectional view of a middle Portion of the atomizer of Fig. 4;
Fig. 7 is a diagrammatic view of a cleaning sYstem as ~O apPlied to an actual semiconductor manufacturing Plant;
Fig. 8 is a diagrammatic sectional view of a heat-exchanger to be connected posterior to the atomizer; and Fig. 9 is a diagrammatic cross-sectional view of an upPer portion of the heat-exchanger.
3~i <DESCRIPTION OF PREFERRED EMBODIMENTS>
According to the Present invention9 the atomizer is Provided with a water iniection Pipe which contains, for e~ample. 30 to 1500 nvzzles of a diameter of 0.2 - 8 mm, 3 Preferably~ of a diameter vf 0.5 - 3 mm. Water is fed to -the injection piPe under high pressure and inJec-ted through the nozzles under Pressure of 0.3 - 5.5 kg/cml, preferablY, under Pressure of 0.5 - 2.5 kg~cm2 (gage pressure). sPurtins water through each nvzz~e at a rate of 1 - 3 Q/min. T~e iniected water is bombarded against a wall which is located at a distance of 10 - 150 cm from the nozzles, and atomized into ultra-fine micro-droPlets~ while air is fed into the atomi~er at a velocitY of 15 - 50 m~sec and at a rate of 3 - 300 m ~min to entrain therein, per cubic foot, more than 2,0000000, 1~ Pref~rablY~ more than 5~000,000, more PreferablY, more than 10,000,000 ultra-fine micro-droplets of a diameter smaller than 0.5 microns.
Now, the method of the Present invention is described more sPecifically with reference to the drawings which ~o illustrates examPles of the aPparatus suitable for carrYing out the method of the invention.
Referrin~ first to Fig. 1, therc is illustrated an atomizer of the most fundamental form which is necessarY for carryinq out the present invention. The atomizer 1 is Pro-3~
vided with water iniection pipes 2 which are extended on andalon~ the oPPosing inner wall surfaces of its atomizing chamber and each Provided with a multitude of noz~les 3.
Preferably~ in sta~gered positions relative to the nozzles o~
the oPPosin~ iniection PiPe~ More specificallY, each water iniection Pipe is provided with 30 to 1500 no~zles of a diameter o 0.2 - 8 mm, preferably, of 0.5 - 3 mm to inject water under pressure of 0.3 - 5.5 kgicm2, preferablY~ under pressure of 0.5 - 2.5 kg~cm? (sase pressure) toward the 1~ oPposin~ inner wall surface which is located at a distance of i0 - 150 cm from the nozzles.
The iniected water is bonbarded against the oPPosing ilmer wall surface and atomized into ultra-fine micro-droPlets. 50 that the atomi~Aer 1 is filled with such ultra-13 fine moi3ture Particles~ On the other hand, air is blowninto the atomi~er 1 at a velocity of 15 - 50 m~sec and at a flow rate of 3 - 3000 m3~min through an air inle-t ~ to entrain therein. Per cubic foot, more than 2,000,000, Pre-ferably more than 5,000,000. more preferably~ more than ~O 10.000,000 ultra-fine micro-droplets before it leaves the atomi~ing chamber through an air outlet 5. ~n order to remove obiectionably large droPlets which maY also be entrained, the air from the air outlet 5 is fe~d into a cYclone 6 through its tangcntial inlet 7. The air from -the cylone, which contains the ultra-fine mis-t Particles~ is circula-ted to a room or rooms which need cleaning, and -then returned to the atomizer for recirculation.
Figs. ~ through 9 illus-trate ano-ther embodiment of the atomizer, which is ~rovided with a temPerature con-trol for Producins the susPension of ultra-fine micro-drople-ts or mist particles more efficientlY~
In this case, the a-tomizer 40 has an evaporation Pipe ~7 of a re~rigerator arranged spir-ally on and along the inner surface of its cylindrical atomizing chamber 41. The evapo-ra-tion Pipe 47 may be located in a slightlY vr comPletely ~ffset position relative to water iniection nozzles 45. The iniection nozzles 45 are arransed such that water from the respective nozzles is sprayed perpendicularly against the 13 opposing portions of -the evaporation Pipe 47O The water iniection Pipe 44 is Provided with 30 to 15~0 nozzles of a diameter of 0.2 - 8 mm. Preferably~ of 0.5 - 3 mm -to iniect water under pressure of 0.3 - 5.5 kg~cm~ Preferably~ under Pressure of 0.5 - 2.5 kg~cm`Z and at a flow rate of 1 to 3 ~0 Q~min through each nozzle. The nozzles are located at a distance of 10 - 150 cm from the oPposins wall surface. The atomizer is Provided wi-th a filter 48, a water tank 49 and a pumP 50 in series to its conical bo-ttom portion 51. Accord-ingly, cold water is circulated in tbe direction of arrow B, namely, successivelY through water circulating piPe 46, iniection PiPe 44, cYlindrical Portion 41 of the a-tomizer, conical Portion 51, filter 48, water tank 49 and PumP 50 in that order. A refrigerant, in particular, a high-temPerature refrigerant (o~ l~C ~o -5~C~ is circulated through the evapo-ration Pipe ~7 ~n the direction of arrow C. Air is fed into the atomizer through an air inlet 42 in the direction of arrow A~ and it is cooled while Pickins uP -the micro-droplets to form the aimed mist-carrYing air, which is discharged through an outlet PiPe 43 to serve for an intended Purpose~
As water is injected from the nozzles 45 in the water injection Pipe 44 under Pressure of 0.3 ~ 5.5 kg/cm~ , Preferably~ under Pressure of 0.5 - 2.5 ~g/cm~ (gage pressure) and ~ombarded against the evaporation piPe 47 of 13 the refrigerator and~or the side wall of the cYlindrica atomi~ing chamber 41 which is located at a distance vf 10 150 cm from -the no~zles ~E), it is atomi~ed into ultra-fine micro-droPlets and cooled (-the water streams bombarded against the evaporation piPe 47 being sumultaneouslY cooled ~0 by heat exchange with the refrigerant flowing through -the pipe 47). Air is Passed through such an atmosphere, at a velocity of i5 - 50 m~sec and at a flow rate of 3 - 3000 m3 /min as indicated by arrow A. While entraining therein the ultra-fine mist Particles~ the air itself is cooled bY heat exchanqe with the cooled micro-droplets, forming mist carryin~ air con-taining per cubic foo-t more than 2,000.000, Preferably~ more than 5,000,000, more preferablY, more than lO~000,000 micro-droplets of a Par-ticle size of 0.5 microns 3 or smaller. In this instance. droPlets substantiallY larger than 0.5 microns in particle size are separated by the centri~usal action resultins from the air circulation. If necessarY~ such droplets maY be removed by the use of a cyclone.
1~ Referring to Fig. 7, there is diagrammatically illu-strated a complete system which is actually applicable to a 6~-kilobit RAM manufacturing Plant. As described herein-before. the air entraining or suspending the ultra-fine mist particles, which are produced in the atomizer 40! is fed into 13 the cYclone 50 as indicated bY arrow A to remove large droplets. Namely. the air coming out of the a-tomizer ~0 is introduced into the cYclone 5U in a tangential direction through an inlet which is provided in its side wall. removing e~cessive or large droPlets while the air is whirled in the ~0 cyclone to Prepare a susPension in air of ultra-fine mist particles more than 90~' o~ which are smaller than 0.5 microns in Particle size. The mist susPending air is discharged through an outlet piPe at the center of the cYclone 50.
The micro-droPlet suspending air from the cYclone is ~;~6~3~
passed through a PiPe P wi-th a fil-ter F tv re~ove droPlets which are substantiallY larger -than 0.5 microns, and sent to an air-s~ower roum 60 and then to an adjacent ultra-clean room 70 to clean the workers in tha-t room. ConcurrentlY.
3 part of the mist suspending air is directlY sent to the - ultra-clean room 70 for supPlying thereto clean air free of dust and for washing silicon substrates to be used for the production of LSIs The air used in the ultra-clean room 70 is discharged through a pi~e P and an F for return to the atomizer 40, thereafter rePeating the above-described cYcle of operation. It has been confirmed that, according to this method, the air in the ultra-clean room can be maintained in an extremely clean state with less than one particle of dust of 0.5 microns or larger in a space of one cubic foot. In 13 view of the fact that several tens thousand of dust Particles are usuallY suspended in a cubic foo-t of air in an ordinarY
manufacturing plant, it will be understood that the method of the present inven-tion has an excellent effect.
The micro-droplet sus~ending air maY be Passed through a heat exchanger lO0 as illustrated in Figs. 8 and 9, which is located downstream of the cYclone 50, therebY to raise the temperature of the air to an optimum level. The heat exchan-ger lO0 is arranged in the manner as follows. Its barrel lOl is centrally Provided with a vertical air discharge piPe 105 3~
which communicates at its WPer end with a Pipe 105~ which is provided outside the barrel lOl. AccordinglY. the air from ~n air inlet PiPe 10~ is whirled within the barrel 10~ as it flows downward, and then enters the air dischar~e piPe 105 3 throu~h its lower end and climbs uP in the arrowed direction.
The vessel lOl is interiorlY provided wi-th an outer Pipe lO~
and an inner Pipe 107 the lower ends of which are communi-cated with a Pump 108 which is located beneath the vessel IOl. Warm or cold water is passed through these Pipes and 1~ discharsed from uPper outle-t ends lO9 and llO. In uPPer and lower Portions~ the vessel 10l is provided with a large number of water iniection noz7les llla and 1llb in a washing water piPe lll at Positions over or beneath the verticai rows of the helics of -the Pipes lO6 and 107 -to spurt washing water 13 toward the pipes lO6 and 107. the inner surfaces of the vessel lOl and the outer surfaces of the air discharge Pipe lO5. Provided heneath a cone portion 102 is a discharge Pipe ~ ' to discharge therethrou~h the washing water as well as the drain resulting from the gas cooling. AccordinslY~ the air enterin~ the vessel lOl through the air inlet 104 is stripped of dust or the like bY its cYclonic effect. and heated or cooled by the pipes 106 and 107 to an optimum temperature. The air of the oPtimum temPerature is sent out through the air discharge pipe 105. The seParated dust or 3~
impurities are washed awaY wi-th water which is supplied tnrough the washing water PiPe 111 and iniected through the nozzles Illa, ll1b and so forth.
The air which has been treated in this manner susPends 5 therein a lar~e number of ultra-fine micro-droplets mvstlY
smaller than 0.5 microns, so that it can be suitablY used for a Pursatory treatment o~ a room or cleaning various obiects or articles~
The ultra-fine micro-dro~lets with a particle size 1~ smaller than 0.5 microns, which are used in the method of the present invention, are extremely 1QW in surface tension, so that theY easilY adhere to dust Particles floating in the air and cohere into larger Particles of consPicuously increased weights which can be easily sweeped awaY with blasts. In 13 particular, owing to the use of ultra-fin~ micro-droplets, the method of the Present invention can remove not onlY
extremelY fine dust Particles but also bacteria and viruses, so that it has a prominent effect in cleaning a room both phYsically and biolosicallY~ For the removal of viruses, it ~0 has been the conventional Practice to resor-t to an air filter `or the Iike, which is however incapable of sufficientlY
filtering out viruses as small as 0.5 to O.Ol microrl.
Namely, one is less susceptible to catching a cold in a room purged by the method of the Present inventiun, and therefore 3~
the invention is particularlY suitable for apPlication to hosPitals~ Pbarmacies~ laboratories, maternity hosPitals and the like.
Further, the method of the Present invention, with a distinctive feature of excluding bacteria, is also suitable for application to a food manufacturing plant for washing food or Production acilities or to a food store or suPer market or the like for thawing frozen meat, keePin~ salad, vegetables, fresh fish4 fresh meat and the like. Particu-larlY~ the method of the invention makes easY the Productionof uncooked ham, which has thus far been restricted bY the possibilities of infestation of bacteria and the like.
METHOD FOR PRODUCING SUSPENSION IN AIR
OF ULTRA-FINE MIST PARTICLES
<BACKGROUND OF THE INVENTION>
Field of the Invention 3 This inven-tion relates to a method for Producing a suspension in air of ultra-fine mist particles or micro-droplets of water, suspending per cubic foot more than ~.0~0.000. Preferably~ more than 5,000,00~, and more Preferably~ more than 10,000,000 finely atomi-~ed mist 1~ Particles or micro-droPlets~ and a method for cleaning the interior of a room bY the use of such a suspension of ultra-fine mist particles.
Description of the Prior Art Clean air free of dusts and microbes is needed in 1~ hosPitals~ Pharmaceutical Plants~ food manufactories, refri-gcrative food storage rooms, laboratories, experiment rooms and the like. In this connection, it has been the conven-tional Practice to send in clean air through an air filter or to provide an air curtain at the entrance of a room. Never-~O theless~ difficulties are encountered in obtaining clean air of satisfactorY quality bY these measures even in combination with an air shower room.
Therefore, at the present moment, it is considered almost imPossible to suPply ultra-clean air or gas on an ~2~ 3~
industrial scale in LSI and VLSI manufacturing Plan-ts.
biopharmaceutical manufacturing Plants. surgical oPerating rooms, precision machinerY-washing PlantS, sterilized food manllfac-turing Plants, refrigerative storage rooms and the 3 like which re~uire a severer control to Preclude in-trusion of not onlY bacteria and viruses but also dusts Particles of a size smaller than 0.5 microns.
Under -these circumstances, the Present invention contemplates to rePlY to the strong demand for a method for 1~ establishing a high degree of cleanness in rcfri4erative storage rooms. operating rooms, manufacturing plants or the like in various industrial fields.
As a result of an intensive studY on the adsorPtive air cleaning phenomenon of the moisture particles which are 1~ susPended in air. it has been found that, in addition to fine dust Particles in air, even bacteria, mold fungi, sPores and viruses can be removed bY adsorPtion on mist Particles by t~e use of air which contains more finelY atomized moisture Particles or micro-droplets substantially smaller than 0.5 ~0 microns at a rate of more than 2,000,000 Particles~
preferablY9 at a rate of more than 5.000,000 Particles~ more Preferably~ at a rate of more than 10,000,000 particles per cubic foot. UnexPectedly~ it has also been found that a gaseous atmosPhere suspending therein such finelY atomized 5~3~
micro-droplets can manifest the cleaning effect withou-t wetting an obiect or article in the atmosphere desPite -the e~istence of moisture Particles as long as they are in the form of ultra-fine micro-droplets. A further studY revealed that an ordinarY gas can be highlY cleaned into an ultra-clean state bY PaSsing the gas -through a ~aseous atmosPhere suspendin~ ultra-fine mist particles or micro-droplets.
permitting to aPPly such hishlY cleaned gas directlY to a room~ a particular sPace or anY other Place needing supplY of 1a such an ultra-clean gas.
<SUMMARY OF THE INVENTION~
In accordance with the present invention, -there is Provided a method of producins air susPending ultra-fine mist particles or micro-drople-ts, which essen-tially comprises 13 th~ stePs of: iniecting water in an atomizing chamber under Pressure of 0.3 - 5.5 ksfcmæ. preferab1y, under pressure of 0.5 - 2.5 kg~cm2 from a water iniection Pipe with a large numb~r o nozzles having a diameter of 0.2 - 8 mm, preferablY~ a diameter of 0.5 - 3 mm, bombarding the injected ~ water against a wall located at a distance of l0 - l50 cm from the nozzles to Produce ultra-fine mist particles or micro-droplets; and passing air through the atomizing chamber to entrain therein per cubic foot more than 2;000,000, preferablY~ more than 5.000,000. and more preferably, more ~5~35i than 10.000,000 ultra-fine micro-droPlets of 0.5 microns or smaller in particle si~e, and a method of cleaning the interior of a room bY circulating the mist susPending air therein~o.
<BRIEF DFSCRIPTION OF THE DRAWIN~S>
In the accomPanyins drawings:
Fig. 1 is a diagrammatic longitudinal section of an atomizer embodYin~ the Present invention;
Fig. 2 is a diagrammatic cross-sectional view of a middle Portion of the atomizer shown in Fig. I;
Fis. 3 is a diagrammatic sectional view of a cYclone ~or removing moisture particles;
Fig. 4 is a view similar to Fig. 1 but showing another embodiment of the atomizer according to the invention;
13 Fig. 5 is a diasrammatic cross-sectional view of an upper Portion of the atomizer of Fig. 4;
Fig. 6 is a diagrammatic cross-sectional view of a middle Portion of the atomizer of Fig. 4;
Fig. 7 is a diagrammatic view of a cleaning sYstem as ~O apPlied to an actual semiconductor manufacturing Plant;
Fig. 8 is a diagrammatic sectional view of a heat-exchanger to be connected posterior to the atomizer; and Fig. 9 is a diagrammatic cross-sectional view of an upPer portion of the heat-exchanger.
3~i <DESCRIPTION OF PREFERRED EMBODIMENTS>
According to the Present invention9 the atomizer is Provided with a water iniection Pipe which contains, for e~ample. 30 to 1500 nvzzles of a diameter of 0.2 - 8 mm, 3 Preferably~ of a diameter vf 0.5 - 3 mm. Water is fed to -the injection piPe under high pressure and inJec-ted through the nozzles under Pressure of 0.3 - 5.5 kg/cml, preferablY, under Pressure of 0.5 - 2.5 kg~cm2 (gage pressure). sPurtins water through each nvzz~e at a rate of 1 - 3 Q/min. T~e iniected water is bombarded against a wall which is located at a distance of 10 - 150 cm from the nozzles, and atomized into ultra-fine micro-droPlets~ while air is fed into the atomi~er at a velocitY of 15 - 50 m~sec and at a rate of 3 - 300 m ~min to entrain therein, per cubic foot, more than 2,0000000, 1~ Pref~rablY~ more than 5~000,000, more PreferablY, more than 10,000,000 ultra-fine micro-droplets of a diameter smaller than 0.5 microns.
Now, the method of the Present invention is described more sPecifically with reference to the drawings which ~o illustrates examPles of the aPparatus suitable for carrYing out the method of the invention.
Referrin~ first to Fig. 1, therc is illustrated an atomizer of the most fundamental form which is necessarY for carryinq out the present invention. The atomizer 1 is Pro-3~
vided with water iniection pipes 2 which are extended on andalon~ the oPPosing inner wall surfaces of its atomizing chamber and each Provided with a multitude of noz~les 3.
Preferably~ in sta~gered positions relative to the nozzles o~
the oPPosin~ iniection PiPe~ More specificallY, each water iniection Pipe is provided with 30 to 1500 no~zles of a diameter o 0.2 - 8 mm, preferably, of 0.5 - 3 mm to inject water under pressure of 0.3 - 5.5 kgicm2, preferablY~ under pressure of 0.5 - 2.5 kg~cm? (sase pressure) toward the 1~ oPposin~ inner wall surface which is located at a distance of i0 - 150 cm from the nozzles.
The iniected water is bonbarded against the oPPosing ilmer wall surface and atomized into ultra-fine micro-droPlets. 50 that the atomi~Aer 1 is filled with such ultra-13 fine moi3ture Particles~ On the other hand, air is blowninto the atomi~er 1 at a velocity of 15 - 50 m~sec and at a flow rate of 3 - 3000 m3~min through an air inle-t ~ to entrain therein. Per cubic foot, more than 2,000,000, Pre-ferably more than 5,000,000. more preferably~ more than ~O 10.000,000 ultra-fine micro-droplets before it leaves the atomi~ing chamber through an air outlet 5. ~n order to remove obiectionably large droPlets which maY also be entrained, the air from the air outlet 5 is fe~d into a cYclone 6 through its tangcntial inlet 7. The air from -the cylone, which contains the ultra-fine mis-t Particles~ is circula-ted to a room or rooms which need cleaning, and -then returned to the atomizer for recirculation.
Figs. ~ through 9 illus-trate ano-ther embodiment of the atomizer, which is ~rovided with a temPerature con-trol for Producins the susPension of ultra-fine micro-drople-ts or mist particles more efficientlY~
In this case, the a-tomizer 40 has an evaporation Pipe ~7 of a re~rigerator arranged spir-ally on and along the inner surface of its cylindrical atomizing chamber 41. The evapo-ra-tion Pipe 47 may be located in a slightlY vr comPletely ~ffset position relative to water iniection nozzles 45. The iniection nozzles 45 are arransed such that water from the respective nozzles is sprayed perpendicularly against the 13 opposing portions of -the evaporation Pipe 47O The water iniection Pipe 44 is Provided with 30 to 15~0 nozzles of a diameter of 0.2 - 8 mm. Preferably~ of 0.5 - 3 mm -to iniect water under pressure of 0.3 - 5.5 kg~cm~ Preferably~ under Pressure of 0.5 - 2.5 kg~cm`Z and at a flow rate of 1 to 3 ~0 Q~min through each nozzle. The nozzles are located at a distance of 10 - 150 cm from the oPposins wall surface. The atomizer is Provided wi-th a filter 48, a water tank 49 and a pumP 50 in series to its conical bo-ttom portion 51. Accord-ingly, cold water is circulated in tbe direction of arrow B, namely, successivelY through water circulating piPe 46, iniection PiPe 44, cYlindrical Portion 41 of the a-tomizer, conical Portion 51, filter 48, water tank 49 and PumP 50 in that order. A refrigerant, in particular, a high-temPerature refrigerant (o~ l~C ~o -5~C~ is circulated through the evapo-ration Pipe ~7 ~n the direction of arrow C. Air is fed into the atomizer through an air inlet 42 in the direction of arrow A~ and it is cooled while Pickins uP -the micro-droplets to form the aimed mist-carrYing air, which is discharged through an outlet PiPe 43 to serve for an intended Purpose~
As water is injected from the nozzles 45 in the water injection Pipe 44 under Pressure of 0.3 ~ 5.5 kg/cm~ , Preferably~ under Pressure of 0.5 - 2.5 ~g/cm~ (gage pressure) and ~ombarded against the evaporation piPe 47 of 13 the refrigerator and~or the side wall of the cYlindrica atomi~ing chamber 41 which is located at a distance vf 10 150 cm from -the no~zles ~E), it is atomi~ed into ultra-fine micro-droPlets and cooled (-the water streams bombarded against the evaporation piPe 47 being sumultaneouslY cooled ~0 by heat exchange with the refrigerant flowing through -the pipe 47). Air is Passed through such an atmosphere, at a velocity of i5 - 50 m~sec and at a flow rate of 3 - 3000 m3 /min as indicated by arrow A. While entraining therein the ultra-fine mist Particles~ the air itself is cooled bY heat exchanqe with the cooled micro-droplets, forming mist carryin~ air con-taining per cubic foo-t more than 2,000.000, Preferably~ more than 5,000,000, more preferablY, more than lO~000,000 micro-droplets of a Par-ticle size of 0.5 microns 3 or smaller. In this instance. droPlets substantiallY larger than 0.5 microns in particle size are separated by the centri~usal action resultins from the air circulation. If necessarY~ such droplets maY be removed by the use of a cyclone.
1~ Referring to Fig. 7, there is diagrammatically illu-strated a complete system which is actually applicable to a 6~-kilobit RAM manufacturing Plant. As described herein-before. the air entraining or suspending the ultra-fine mist particles, which are produced in the atomizer 40! is fed into 13 the cYclone 50 as indicated bY arrow A to remove large droplets. Namely. the air coming out of the a-tomizer ~0 is introduced into the cYclone 5U in a tangential direction through an inlet which is provided in its side wall. removing e~cessive or large droPlets while the air is whirled in the ~0 cyclone to Prepare a susPension in air of ultra-fine mist particles more than 90~' o~ which are smaller than 0.5 microns in Particle size. The mist susPending air is discharged through an outlet piPe at the center of the cYclone 50.
The micro-droPlet suspending air from the cYclone is ~;~6~3~
passed through a PiPe P wi-th a fil-ter F tv re~ove droPlets which are substantiallY larger -than 0.5 microns, and sent to an air-s~ower roum 60 and then to an adjacent ultra-clean room 70 to clean the workers in tha-t room. ConcurrentlY.
3 part of the mist suspending air is directlY sent to the - ultra-clean room 70 for supPlying thereto clean air free of dust and for washing silicon substrates to be used for the production of LSIs The air used in the ultra-clean room 70 is discharged through a pi~e P and an F for return to the atomizer 40, thereafter rePeating the above-described cYcle of operation. It has been confirmed that, according to this method, the air in the ultra-clean room can be maintained in an extremely clean state with less than one particle of dust of 0.5 microns or larger in a space of one cubic foot. In 13 view of the fact that several tens thousand of dust Particles are usuallY suspended in a cubic foo-t of air in an ordinarY
manufacturing plant, it will be understood that the method of the present inven-tion has an excellent effect.
The micro-droplet sus~ending air maY be Passed through a heat exchanger lO0 as illustrated in Figs. 8 and 9, which is located downstream of the cYclone 50, therebY to raise the temperature of the air to an optimum level. The heat exchan-ger lO0 is arranged in the manner as follows. Its barrel lOl is centrally Provided with a vertical air discharge piPe 105 3~
which communicates at its WPer end with a Pipe 105~ which is provided outside the barrel lOl. AccordinglY. the air from ~n air inlet PiPe 10~ is whirled within the barrel 10~ as it flows downward, and then enters the air dischar~e piPe 105 3 throu~h its lower end and climbs uP in the arrowed direction.
The vessel lOl is interiorlY provided wi-th an outer Pipe lO~
and an inner Pipe 107 the lower ends of which are communi-cated with a Pump 108 which is located beneath the vessel IOl. Warm or cold water is passed through these Pipes and 1~ discharsed from uPper outle-t ends lO9 and llO. In uPPer and lower Portions~ the vessel 10l is provided with a large number of water iniection noz7les llla and 1llb in a washing water piPe lll at Positions over or beneath the verticai rows of the helics of -the Pipes lO6 and 107 -to spurt washing water 13 toward the pipes lO6 and 107. the inner surfaces of the vessel lOl and the outer surfaces of the air discharge Pipe lO5. Provided heneath a cone portion 102 is a discharge Pipe ~ ' to discharge therethrou~h the washing water as well as the drain resulting from the gas cooling. AccordinslY~ the air enterin~ the vessel lOl through the air inlet 104 is stripped of dust or the like bY its cYclonic effect. and heated or cooled by the pipes 106 and 107 to an optimum temperature. The air of the oPtimum temPerature is sent out through the air discharge pipe 105. The seParated dust or 3~
impurities are washed awaY wi-th water which is supplied tnrough the washing water PiPe 111 and iniected through the nozzles Illa, ll1b and so forth.
The air which has been treated in this manner susPends 5 therein a lar~e number of ultra-fine micro-droplets mvstlY
smaller than 0.5 microns, so that it can be suitablY used for a Pursatory treatment o~ a room or cleaning various obiects or articles~
The ultra-fine micro-dro~lets with a particle size 1~ smaller than 0.5 microns, which are used in the method of the present invention, are extremely 1QW in surface tension, so that theY easilY adhere to dust Particles floating in the air and cohere into larger Particles of consPicuously increased weights which can be easily sweeped awaY with blasts. In 13 particular, owing to the use of ultra-fin~ micro-droplets, the method of the Present invention can remove not onlY
extremelY fine dust Particles but also bacteria and viruses, so that it has a prominent effect in cleaning a room both phYsically and biolosicallY~ For the removal of viruses, it ~0 has been the conventional Practice to resor-t to an air filter `or the Iike, which is however incapable of sufficientlY
filtering out viruses as small as 0.5 to O.Ol microrl.
Namely, one is less susceptible to catching a cold in a room purged by the method of the Present inventiun, and therefore 3~
the invention is particularlY suitable for apPlication to hosPitals~ Pbarmacies~ laboratories, maternity hosPitals and the like.
Further, the method of the Present invention, with a distinctive feature of excluding bacteria, is also suitable for application to a food manufacturing plant for washing food or Production acilities or to a food store or suPer market or the like for thawing frozen meat, keePin~ salad, vegetables, fresh fish4 fresh meat and the like. Particu-larlY~ the method of the invention makes easY the Productionof uncooked ham, which has thus far been restricted bY the possibilities of infestation of bacteria and the like.
Claims (16)
PROPERTY OR PRIVILEGE IS CLAIMED ARE DEFINED AS FOLLOWS:
1. A method for producing a suspension in air of ultra-fine micro-droplets of water, said method comprising:
atomizing water in to ultra-fine micro-droplets by injecting same in an atomizing chamber at a gage pressure of 0.3 - 5.5 kg/cm2 by the use of a water injecting pipe with a large number of nozzles of a diameter of 0.2 - 8 mm against a side wall located at a distance of 10 - 150 cm from said nozzles; and passing air through said atomizing chamber to entrain therein per cubic foot more than 2,000,000 ultra-fine micro-droplets of 0.5 microns or smaller in particle size.
atomizing water in to ultra-fine micro-droplets by injecting same in an atomizing chamber at a gage pressure of 0.3 - 5.5 kg/cm2 by the use of a water injecting pipe with a large number of nozzles of a diameter of 0.2 - 8 mm against a side wall located at a distance of 10 - 150 cm from said nozzles; and passing air through said atomizing chamber to entrain therein per cubic foot more than 2,000,000 ultra-fine micro-droplets of 0.5 microns or smaller in particle size.
2. The method for producing a suspension in air of ultra-fine micro-droplets of water, according to Claim 1, wherein water is atomized into ultra-fine micro-droplets by injecting same in an atomizing chamber at a gage pressure of 0.5 - 2.5 kg/cm2.
3. The method for producing a suspension in air of ultra-fine micro-droplets of water, according to Claim 1, wherein the water injecting pipe has a large number of nozzles of a diameter of 0.5 - 3 mm.
4. The method for producing a suspension in air of ultra-fine micro-droplets of water, according to Claim 2, wherein the water injecting pipe has a large number of nozzles of a diameter of 0.5 - 3 mm.
5. The method for producing a suspension in air of ultra-fine droplets, according to Claim 1, wherein air is passed through said atomizing chamber to entrain therein per cubic foot more than 5,000,000 ultra-fine micro-droplets of 0.5 microns or smaller in particle size.
6. The method for producing a suspension in air of ultra-fine droplets, according to Claim 2, wherein air is passed through said atomizing chamber, to entrain therein per cubic foot more than 5,000,000 ultra-fine micro-droplets of 0.5 microns or smaller in particle size.
7. The method for producing a suspension in air of ultra-fine droplets, according to Claim 3, wherein air is passed through said atomizing chamber, to entrain therein per cubic foot more than 5,000,000 ultra-fine micro-droplets of 0.5 microns or smaller in particle size.
8. The method for producing a suspension in air of ultra-fine droplets, according to Claim 4, wherein air is passed through said atomizing chamber, to entrain therein per cubic foot more than 5,000,000 ultra-fine micro-droplets of 0.5 microns or smaller in particle size.
9. The method for producing a suspension in air of ultra-fine droplets, according to Claim 1, wherein air is passed through said atomizing chamber to entrain therein per cubic foot more than 10,000,000 ultra-fine micro-droplets of 0.5 microns or smaller in particle size.
10. The method for producing a suspension in air of ultra-fine droplets, according to Claim 2 wherein air is passed through said atomizing chamber to entrain therein per cubic foot more than 10,000,000 ultra-fine micro-droplets of 0.5 microns or smaller in particle size.
11. The method for producing a suspension in air of ultra-fine droplets,according to Claim 3, wherein air is passed through said atomizing chamber to entrain therein per cubic foot more than 10,000,000 ultra-fine micro-droplets of 0.5 microns or smaller in particle size.
12. The method for producing a suspension in air of ultra-fine droplets, according to Claim 4, wherein air is passed through said atomizing chamber to entrain therein per cubic foot more than 10,000,000 ultra-fine micro-droplets of 0.5 microns or smaller in particle size.
13. A method of cleaning the interior of a room by sending thereinto the suspension in air of ultra-fine micro-droplets obtained by the method of Claim 1, 2 or 3.
14. A method of cleaning the interior of a room by sending thereinto the suspension in air of ultra-fine micro-droplets obtained by the method of Claim 4, 5 or 6.
15. A method of cleaning the interior of a room by sending thereinto the suspension in air of ultra-fine micro-droplets obtained by the method of Claim 7, 8 or 9.
16. A method of cleaning the interior of a room by sanding thereinto the suspension in air of ultra-fine micro-droplets obtained by the method of Claim 10, 11 or 12.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60207767A JPS6268515A (en) | 1985-09-21 | 1985-09-21 | Method for producing ultrafine water droplets |
| JP60-207767 | 1985-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1265435A true CA1265435A (en) | 1990-02-06 |
Family
ID=16545195
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000517874A Expired - Lifetime CA1265435A (en) | 1985-09-21 | 1986-09-10 | Method for producing suspension in air of ultra-fine mist particles |
Country Status (15)
| Country | Link |
|---|---|
| JP (1) | JPS6268515A (en) |
| KR (1) | KR910005982B1 (en) |
| CN (1) | CN1004860B (en) |
| AU (1) | AU577203B2 (en) |
| BR (1) | BR8604462A (en) |
| CA (1) | CA1265435A (en) |
| CH (1) | CH669834A5 (en) |
| DE (1) | DE3631926A1 (en) |
| DK (1) | DK426086A (en) |
| FR (1) | FR2587628B1 (en) |
| GB (1) | GB2180776B (en) |
| IN (1) | IN168582B (en) |
| IT (1) | IT1196617B (en) |
| NL (1) | NL8602323A (en) |
| SE (1) | SE8603728L (en) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2698160B1 (en) * | 1992-11-13 | 1994-12-23 | France Grignotage | Method and device for the treatment of working atmospheres using a cyclonic exchanger. |
| DE29821687U1 (en) * | 1998-12-05 | 2000-04-06 | GEA Finnah GmbH, 48683 Ahaus | Device for producing an aerosol |
| IT1303661B1 (en) * | 1998-12-24 | 2001-02-21 | Tecmeco S R L | WATER NEBULIZATION AIR CLEANER |
| DE10024889B4 (en) * | 2000-05-16 | 2008-09-04 | Gea Wtt Gmbh | Plate heat exchanger with atomizer |
| US7008535B1 (en) * | 2000-08-04 | 2006-03-07 | Wayne State University | Apparatus for oxygenating wastewater |
| DE10062630A1 (en) * | 2000-12-15 | 2002-08-29 | Bartels Mikrotechnik Gmbh | Beduftungsverfahren |
| KR100509012B1 (en) * | 2002-12-13 | 2005-08-19 | 조인섭 | Dispersal air scrubber and method thereof |
| KR101445703B1 (en) * | 2012-06-18 | 2014-09-29 | 주식회사 포스코 | The noxious gas of dust purification apparatus |
| CN104096432B (en) * | 2013-04-12 | 2016-12-28 | 张灵样 | Mist dust remover |
| CN104368465A (en) * | 2013-08-13 | 2015-02-25 | 宁夏嘉翔自控技术有限公司 | Asphalt melting Venturi spraying dust removing nozzle |
| KR101565761B1 (en) * | 2014-11-24 | 2015-11-04 | 오홍근 | Filtration system |
| DE102016200894A1 (en) * | 2016-01-22 | 2017-07-27 | Olympus Winter & Ibe Gmbh | Medical flue gas cleaning apparatus and method for cleaning medical flue gases |
| CN107314449B (en) * | 2017-08-18 | 2023-07-28 | 广东美的制冷设备有限公司 | Air treatment module and air conditioner |
| KR102054253B1 (en) * | 2019-04-16 | 2019-12-10 | 주식회사 넥스트이엔씨 | System for reducing fine dust |
| FR3102682B1 (en) | 2019-11-03 | 2021-09-24 | Weber Jean Charles | Filtration device for polluted gases by absorption |
| DE102021114987A1 (en) | 2021-06-10 | 2022-12-15 | Topas Gmbh Technologieorientierte Partikel-, Analysen- Und Sensortechnik | Device for generating a conditioned aerosol |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE151261C (en) * | ||||
| CH368916A (en) * | 1959-05-28 | 1963-04-30 | Wera Apparatebau Ag | Air humidification system, in particular for ventilation and air conditioning systems |
| IL45916A (en) * | 1974-10-23 | 1976-11-30 | Rosenberg Peretz | Spray-nozzle |
| AU531724B2 (en) * | 1980-03-06 | 1983-09-01 | Masahiko Izumi | Microbe removing + air-conditioning apparatus |
| JPS5998714A (en) * | 1982-11-30 | 1984-06-07 | Masahiko Izumi | Preparation of gas suspending fine water droplet |
| JPS6058255A (en) * | 1983-09-09 | 1985-04-04 | Matsushita Electric Ind Co Ltd | Spray apparatus |
-
1985
- 1985-09-21 JP JP60207767A patent/JPS6268515A/en active Granted
-
1986
- 1986-09-05 DK DK426086A patent/DK426086A/en not_active Application Discontinuation
- 1986-09-05 SE SE8603728A patent/SE8603728L/en not_active Application Discontinuation
- 1986-09-09 AU AU62505/86A patent/AU577203B2/en not_active Ceased
- 1986-09-09 IN IN723/MAS/86A patent/IN168582B/en unknown
- 1986-09-10 CA CA000517874A patent/CA1265435A/en not_active Expired - Lifetime
- 1986-09-11 IT IT48442/86A patent/IT1196617B/en active
- 1986-09-11 FR FR868612689A patent/FR2587628B1/en not_active Expired
- 1986-09-15 NL NL8602323A patent/NL8602323A/en not_active Application Discontinuation
- 1986-09-17 BR BR8604462A patent/BR8604462A/en unknown
- 1986-09-17 KR KR1019860007837A patent/KR910005982B1/en not_active IP Right Cessation
- 1986-09-17 GB GB8622410A patent/GB2180776B/en not_active Expired
- 1986-09-19 CH CH3764/86A patent/CH669834A5/fr not_active IP Right Cessation
- 1986-09-19 DE DE19863631926 patent/DE3631926A1/en not_active Withdrawn
- 1986-09-20 CN CN86106342.2A patent/CN1004860B/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DK426086A (en) | 1987-03-22 |
| GB2180776B (en) | 1989-09-13 |
| GB8622410D0 (en) | 1986-10-22 |
| IT8648442A0 (en) | 1986-09-11 |
| AU577203B2 (en) | 1988-09-15 |
| DK426086D0 (en) | 1986-09-05 |
| BR8604462A (en) | 1987-05-19 |
| KR870002866A (en) | 1987-04-13 |
| CH669834A5 (en) | 1989-04-14 |
| GB2180776A (en) | 1987-04-08 |
| DE3631926A1 (en) | 1987-03-26 |
| IT1196617B (en) | 1988-11-16 |
| FR2587628B1 (en) | 1989-06-23 |
| IN168582B (en) | 1991-05-04 |
| SE8603728L (en) | 1987-03-22 |
| CN86106342A (en) | 1987-04-08 |
| SE8603728D0 (en) | 1986-09-05 |
| AU6250586A (en) | 1987-03-26 |
| KR910005982B1 (en) | 1991-08-09 |
| NL8602323A (en) | 1987-04-16 |
| JPS6268515A (en) | 1987-03-28 |
| FR2587628A1 (en) | 1987-03-27 |
| JPH0577466B2 (en) | 1993-10-26 |
| CN1004860B (en) | 1989-07-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CA1265435A (en) | Method for producing suspension in air of ultra-fine mist particles | |
| US5208998A (en) | Liquid substances freeze-drying systems and methods | |
| CA2612238C (en) | Method for cleaning a lumen | |
| US20120031275A1 (en) | Centrifugal wet type air cleaner utilizing a spin vaporizer and a spiral on the basis of a labyrinth effect | |
| JPH07171328A (en) | Method and device for wet type gas cleaning | |
| ES2141412T3 (en) | PROCEDURE AND DEVICE FOR THE TREATMENT OF EXHAUST AIR THAT IS PRODUCED DURING THE MANUFACTURE OF ARTICLES OF THE TOBACCO INDUSTRY. | |
| CN106179113A (en) | A kind of cryogenic sterile fluidisation continuous granulation drying machine | |
| US4622077A (en) | Method of cleaning the inside of a room | |
| JP2003103203A (en) | Two-fluid-spraying nozzle, granulation apparatus and granulation system | |
| JPS6268516A (en) | Apparatus for producing ultrafine water droplets | |
| JPH04267917A (en) | Blow-up air purification device | |
| JPS5998714A (en) | Preparation of gas suspending fine water droplet | |
| JPS60175518A (en) | Purification of gaseous mass | |
| US9265267B2 (en) | Open top liquid/gas cyclone separator tube and process for same | |
| JPS621430A (en) | Method for cleaning chamber | |
| KR920008007B1 (en) | Method of cleaning object | |
| JPH0376993B2 (en) | ||
| GB2156204A (en) | Cleaning objects | |
| JPH04267916A (en) | Blow-up purification device equipped with demister | |
| JPH01206979A (en) | Thawing apparatus | |
| JPH04118066A (en) | Producing equipment for air mixed with superfine mist | |
| JPS61197017A (en) | Cleaner | |
| JPS6136638A (en) | Phytoncide atmosphere generating process | |
| JP3103123B2 (en) | Blow-up type clean cooling device | |
| JPS62149318A (en) | Method and apparatus for purifying inside of chamber |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKLA | Lapsed |