CA1219837A - Systeme de distribution de gaz pour cathodes de pulverisation - Google Patents

Systeme de distribution de gaz pour cathodes de pulverisation

Info

Publication number
CA1219837A
CA1219837A CA000444584A CA444584A CA1219837A CA 1219837 A CA1219837 A CA 1219837A CA 000444584 A CA000444584 A CA 000444584A CA 444584 A CA444584 A CA 444584A CA 1219837 A CA1219837 A CA 1219837A
Authority
CA
Canada
Prior art keywords
gas
chamber
target
distribution system
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000444584A
Other languages
English (en)
Inventor
Merrill G. Robinson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shatterproof Glass Corp
Original Assignee
Shatterproof Glass Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shatterproof Glass Corp filed Critical Shatterproof Glass Corp
Priority to CA000444584A priority Critical patent/CA1219837A/fr
Application granted granted Critical
Publication of CA1219837A publication Critical patent/CA1219837A/fr
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
CA000444584A 1984-01-03 1984-01-03 Systeme de distribution de gaz pour cathodes de pulverisation Expired CA1219837A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CA000444584A CA1219837A (fr) 1984-01-03 1984-01-03 Systeme de distribution de gaz pour cathodes de pulverisation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA000444584A CA1219837A (fr) 1984-01-03 1984-01-03 Systeme de distribution de gaz pour cathodes de pulverisation

Publications (1)

Publication Number Publication Date
CA1219837A true CA1219837A (fr) 1987-03-31

Family

ID=4126860

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000444584A Expired CA1219837A (fr) 1984-01-03 1984-01-03 Systeme de distribution de gaz pour cathodes de pulverisation

Country Status (1)

Country Link
CA (1) CA1219837A (fr)

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