CA1194089A - Thermionic cathode and method of manufacturing same - Google Patents
Thermionic cathode and method of manufacturing sameInfo
- Publication number
- CA1194089A CA1194089A CA000421800A CA421800A CA1194089A CA 1194089 A CA1194089 A CA 1194089A CA 000421800 A CA000421800 A CA 000421800A CA 421800 A CA421800 A CA 421800A CA 1194089 A CA1194089 A CA 1194089A
- Authority
- CA
- Canada
- Prior art keywords
- layers
- base material
- electron
- cathode
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 88
- 238000000151 deposition Methods 0.000 claims abstract description 30
- 230000008021 deposition Effects 0.000 claims abstract description 29
- 239000007792 gaseous phase Substances 0.000 claims abstract description 10
- 238000005530 etching Methods 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 26
- 229910052721 tungsten Inorganic materials 0.000 claims description 24
- 238000009792 diffusion process Methods 0.000 claims description 21
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 20
- 239000010937 tungsten Substances 0.000 claims description 20
- 239000000758 substrate Substances 0.000 claims description 18
- 229910004369 ThO2 Inorganic materials 0.000 claims description 11
- ZCUFMDLYAMJYST-UHFFFAOYSA-N thorium dioxide Chemical compound O=[Th]=O ZCUFMDLYAMJYST-UHFFFAOYSA-N 0.000 claims description 11
- 229910052776 Thorium Inorganic materials 0.000 claims description 10
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 claims description 8
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 5
- SIXSYDAISGFNSX-UHFFFAOYSA-N scandium atom Chemical group [Sc] SIXSYDAISGFNSX-UHFFFAOYSA-N 0.000 claims description 3
- HYXGAEYDKFCVMU-UHFFFAOYSA-N scandium(III) oxide Inorganic materials O=[Sc]O[Sc]=O HYXGAEYDKFCVMU-UHFFFAOYSA-N 0.000 claims description 3
- 230000006641 stabilisation Effects 0.000 claims description 3
- 238000011105 stabilization Methods 0.000 claims description 3
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 2
- 230000008020 evaporation Effects 0.000 claims description 2
- 241001663154 Electron Species 0.000 claims 1
- 238000005566 electron beam evaporation Methods 0.000 claims 1
- 238000007493 shaping process Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 abstract description 68
- 239000011247 coating layer Substances 0.000 abstract description 15
- 239000002356 single layer Substances 0.000 description 21
- 239000011248 coating agent Substances 0.000 description 11
- 238000000576 coating method Methods 0.000 description 11
- 238000003795 desorption Methods 0.000 description 8
- 238000000227 grinding Methods 0.000 description 8
- 230000008901 benefit Effects 0.000 description 6
- 239000002019 doping agent Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000010406 cathode material Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 229910052702 rhenium Inorganic materials 0.000 description 3
- 230000002123 temporal effect Effects 0.000 description 3
- 229910052727 yttrium Inorganic materials 0.000 description 3
- 241000283986 Lepus Species 0.000 description 2
- 238000007792 addition Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000005764 inhibitory process Effects 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000001953 recrystallisation Methods 0.000 description 2
- 229910052706 scandium Inorganic materials 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- FJSDGIUVZFHMSH-MTOQALJVSA-N (z)-4-hydroxypent-3-en-2-one;thorium Chemical compound [Th].C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O.C\C(O)=C\C(C)=O FJSDGIUVZFHMSH-MTOQALJVSA-N 0.000 description 1
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical compound C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 description 1
- 241001279686 Allium moly Species 0.000 description 1
- 241000282326 Felis catus Species 0.000 description 1
- 206010043276 Teratoma Diseases 0.000 description 1
- 125000005595 acetylacetonate group Chemical group 0.000 description 1
- 239000008186 active pharmaceutical agent Substances 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 229940000425 combination drug Drugs 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- -1 for example Inorganic materials 0.000 description 1
- 238000005324 grain boundary diffusion Methods 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- 230000002045 lasting effect Effects 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- VIKNJXKGJWUCNN-XGXHKTLJSA-N norethisterone Chemical compound O=C1CC[C@@H]2[C@H]3CC[C@](C)([C@](CC4)(O)C#C)[C@@H]4[C@@H]3CCC2=C1 VIKNJXKGJWUCNN-XGXHKTLJSA-N 0.000 description 1
- 239000002674 ointment Substances 0.000 description 1
- 125000002524 organometallic group Chemical group 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 238000002294 plasma sputter deposition Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 229910052703 rhodium Inorganic materials 0.000 description 1
- 238000007788 roughening Methods 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 230000002226 simultaneous effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 238000006557 surface reaction Methods 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 238000007669 thermal treatment Methods 0.000 description 1
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 1
- FCTBKIHDJGHPPO-UHFFFAOYSA-N uranium dioxide Inorganic materials O=[U]=O FCTBKIHDJGHPPO-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
- H01J1/02—Main electrodes
- H01J1/13—Solid thermionic cathodes
- H01J1/20—Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
- H01J1/28—Dispenser-type cathodes, e.g. L-cathode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/04—Manufacture of electrodes or electrode systems of thermionic cathodes
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Vapour Deposition (AREA)
- Solid Thermionic Cathode (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEP3205746.6 | 1982-02-18 | ||
| DE19823205746 DE3205746A1 (de) | 1982-02-18 | 1982-02-18 | Thermionische kathode und verfahren zu ihrer herstellung |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1194089A true CA1194089A (en) | 1985-09-24 |
Family
ID=6156031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000421800A Expired CA1194089A (en) | 1982-02-18 | 1983-02-17 | Thermionic cathode and method of manufacturing same |
Country Status (6)
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3446334A1 (de) * | 1984-12-19 | 1986-06-19 | Philips Patentverwaltung Gmbh, 2000 Hamburg | Verfahren zur herstellung von <111>-vorzugsorientiertem wolfram |
| JPH0760641B2 (ja) * | 1985-02-06 | 1995-06-28 | 新日本無線株式会社 | マグネトロン用陰極 |
| CA1272504A (en) * | 1986-11-18 | 1990-08-07 | Franz Prein | Surface for electric discharge |
| DE3723271A1 (de) * | 1987-07-14 | 1989-01-26 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Kathode fuer eine hochdruckentladungslampe |
| EP0681312B1 (en) * | 1993-11-24 | 2003-02-26 | TDK Corporation | Cold-cathode electron source element and method for producing the same |
| RU2194328C2 (ru) * | 1998-05-19 | 2002-12-10 | ООО "Высокие технологии" | Холодноэмиссионный пленочный катод и способ его получения |
| RU2149478C1 (ru) * | 1999-04-13 | 2000-05-20 | Аристова Ирина Яковлевна | Термоэмиссионный катод |
| US6815876B1 (en) * | 1999-06-23 | 2004-11-09 | Agere Systems Inc. | Cathode with improved work function and method for making the same |
| DE60142436D1 (de) * | 2000-05-11 | 2010-08-05 | Panasonic Corp | Elektronenemissions-dünnfilm, plasma-display-tafel damit und verfahren zu ihrer herstellung |
| KR100442300B1 (ko) * | 2002-01-04 | 2004-07-30 | 엘지.필립스디스플레이(주) | 음극선관용 음극 |
| CN101297452A (zh) * | 2005-09-14 | 2008-10-29 | 力特保险丝有限公司 | 充气式电涌放电器、激活化合物、点火条及相应方法 |
| EP2174336B1 (en) * | 2007-07-24 | 2012-12-12 | Philips Intellectual Property & Standards GmbH | Thermionic electron emitter, method for preparing same and x-ray source including same |
| DE102015211235B4 (de) | 2015-06-18 | 2023-03-23 | Siemens Healthcare Gmbh | Emitter |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2339392A (en) * | 1942-10-06 | 1944-01-18 | Rca Corp | Cathode |
| FR1150153A (fr) * | 1953-08-01 | 1958-01-08 | France Etat | Cathodes thermoémissives pour tubes électroniques à support de rhénium |
| US2878409A (en) * | 1957-04-29 | 1959-03-17 | Philips Corp | Dispenser-type cathode and method of making |
| US3290543A (en) * | 1963-06-03 | 1966-12-06 | Varian Associates | Grain oriented dispenser thermionic emitter for electron discharge device |
| GB1137124A (en) * | 1964-12-23 | 1968-12-18 | Nat Res Dev | Thermionic electron emitter |
| SU439028A1 (ru) * | 1972-08-08 | 1974-08-05 | Е. И. Давыдова, А. Д. Карпенко , В. А. Шишкин | Способ изготовлени автоэлектронных катодов |
| SU510760A1 (ru) * | 1974-09-09 | 1976-04-15 | Организация П/Я Х-5263 | Катод |
| US4019081A (en) * | 1974-10-25 | 1977-04-19 | Bbc Brown Boveri & Company Limited | Reaction cathode |
| CH579824A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1974-10-25 | 1976-09-15 | Bbc Brown Boveri & Cie | |
| NL165880C (nl) * | 1975-02-21 | 1981-05-15 | Philips Nv | Naleveringskathode. |
-
1982
- 1982-02-18 DE DE19823205746 patent/DE3205746A1/de not_active Withdrawn
- 1982-09-13 US US06/416,840 patent/US4524297A/en not_active Expired - Fee Related
-
1983
- 1983-01-27 DE DE8383200139T patent/DE3365755D1/de not_active Expired
- 1983-01-27 EP EP83200139A patent/EP0087826B1/de not_active Expired
- 1983-02-16 ES ES519829A patent/ES519829A0/es active Granted
- 1983-02-17 CA CA000421800A patent/CA1194089A/en not_active Expired
- 1983-02-18 JP JP58026115A patent/JPS58155619A/ja active Granted
- 1983-05-16 ES ES522416A patent/ES8403243A1/es not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| EP0087826A3 (en) | 1984-06-13 |
| JPH0447936B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-08-05 |
| ES8401674A1 (es) | 1983-12-01 |
| DE3205746A1 (de) | 1983-08-25 |
| EP0087826B1 (de) | 1986-09-03 |
| ES522416A0 (es) | 1984-03-01 |
| JPS58155619A (ja) | 1983-09-16 |
| EP0087826A2 (de) | 1983-09-07 |
| DE3365755D1 (en) | 1986-10-09 |
| ES519829A0 (es) | 1983-12-01 |
| ES8403243A1 (es) | 1984-03-01 |
| US4524297A (en) | 1985-06-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEC | Expiry (correction) | ||
| MKEX | Expiry |