CA1179581A - Compose decapant et methode d'enlevement des masques - Google Patents
Compose decapant et methode d'enlevement des masquesInfo
- Publication number
- CA1179581A CA1179581A CA000410275A CA410275A CA1179581A CA 1179581 A CA1179581 A CA 1179581A CA 000410275 A CA000410275 A CA 000410275A CA 410275 A CA410275 A CA 410275A CA 1179581 A CA1179581 A CA 1179581A
- Authority
- CA
- Canada
- Prior art keywords
- stripping
- composition
- stripping composition
- substrate
- stripped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US30478981A | 1981-09-23 | 1981-09-23 | |
US304,789 | 1981-09-23 | ||
US40885282A | 1982-08-17 | 1982-08-17 | |
US408,852 | 1982-08-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1179581A true CA1179581A (fr) | 1984-12-18 |
Family
ID=26974227
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA000410275A Expired CA1179581A (fr) | 1981-09-23 | 1982-08-27 | Compose decapant et methode d'enlevement des masques |
Country Status (1)
Country | Link |
---|---|
CA (1) | CA1179581A (fr) |
-
1982
- 1982-08-27 CA CA000410275A patent/CA1179581A/fr not_active Expired
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MKEC | Expiry (correction) | ||
MKEX | Expiry | ||
MKEX | Expiry |
Effective date: 20020827 |