CA1179581A - Compose decapant et methode d'enlevement des masques - Google Patents

Compose decapant et methode d'enlevement des masques

Info

Publication number
CA1179581A
CA1179581A CA000410275A CA410275A CA1179581A CA 1179581 A CA1179581 A CA 1179581A CA 000410275 A CA000410275 A CA 000410275A CA 410275 A CA410275 A CA 410275A CA 1179581 A CA1179581 A CA 1179581A
Authority
CA
Canada
Prior art keywords
stripping
composition
stripping composition
substrate
stripped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000410275A
Other languages
English (en)
Inventor
Irl E. Ward, Jr.
Lisa G. Hallquist
Thomas J. Hurley
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Avantor Performance Materials LLC
Original Assignee
JT Baker Chemical Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JT Baker Chemical Co filed Critical JT Baker Chemical Co
Application granted granted Critical
Publication of CA1179581A publication Critical patent/CA1179581A/fr
Expired legal-status Critical Current

Links

Landscapes

  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
CA000410275A 1981-09-23 1982-08-27 Compose decapant et methode d'enlevement des masques Expired CA1179581A (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US30478981A 1981-09-23 1981-09-23
US304,789 1981-09-23
US40885282A 1982-08-17 1982-08-17
US408,852 1982-08-17

Publications (1)

Publication Number Publication Date
CA1179581A true CA1179581A (fr) 1984-12-18

Family

ID=26974227

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000410275A Expired CA1179581A (fr) 1981-09-23 1982-08-27 Compose decapant et methode d'enlevement des masques

Country Status (1)

Country Link
CA (1) CA1179581A (fr)

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Legal Events

Date Code Title Description
MKEC Expiry (correction)
MKEX Expiry
MKEX Expiry

Effective date: 20020827