CA1144739A - Production de poudre de silicone polycristalline a faible cout - Google Patents
Production de poudre de silicone polycristalline a faible coutInfo
- Publication number
- CA1144739A CA1144739A CA000326810A CA326810A CA1144739A CA 1144739 A CA1144739 A CA 1144739A CA 000326810 A CA000326810 A CA 000326810A CA 326810 A CA326810 A CA 326810A CA 1144739 A CA1144739 A CA 1144739A
- Authority
- CA
- Canada
- Prior art keywords
- silicon
- gas
- free space
- silane
- reactor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Silicon Compounds (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US90256278A | 1978-05-03 | 1978-05-03 | |
US902,562 | 1978-05-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1144739A true CA1144739A (fr) | 1983-04-19 |
Family
ID=25416025
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA000326810A Expired CA1144739A (fr) | 1978-05-03 | 1979-05-02 | Production de poudre de silicone polycristalline a faible cout |
Country Status (1)
Country | Link |
---|---|
CA (1) | CA1144739A (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001034519A1 (fr) * | 1999-11-11 | 2001-05-17 | Bjorseth, Alf | Procede et appareil de production de silicium de qualite photovoltaique |
EP1798199A1 (fr) * | 2004-08-19 | 2007-06-20 | Tokuyama Corporation | Réacteur adapté à des composés de type chlorosilane |
-
1979
- 1979-05-02 CA CA000326810A patent/CA1144739A/fr not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2001034519A1 (fr) * | 1999-11-11 | 2001-05-17 | Bjorseth, Alf | Procede et appareil de production de silicium de qualite photovoltaique |
EP1798199A1 (fr) * | 2004-08-19 | 2007-06-20 | Tokuyama Corporation | Réacteur adapté à des composés de type chlorosilane |
EP1798199A4 (fr) * | 2004-08-19 | 2011-05-18 | Tokuyama Corp | Réacteur adapté à des composés de type chlorosilane |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MKEX | Expiry |