CA1144739A - Production de poudre de silicone polycristalline a faible cout - Google Patents

Production de poudre de silicone polycristalline a faible cout

Info

Publication number
CA1144739A
CA1144739A CA000326810A CA326810A CA1144739A CA 1144739 A CA1144739 A CA 1144739A CA 000326810 A CA000326810 A CA 000326810A CA 326810 A CA326810 A CA 326810A CA 1144739 A CA1144739 A CA 1144739A
Authority
CA
Canada
Prior art keywords
silicon
gas
free space
silane
reactor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA000326810A
Other languages
English (en)
Inventor
Ernest G. Farrier
Raymond J. Elbert
Joachim Rexer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Union Carbide Corp
Original Assignee
Union Carbide Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Union Carbide Corp filed Critical Union Carbide Corp
Application granted granted Critical
Publication of CA1144739A publication Critical patent/CA1144739A/fr
Expired legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
CA000326810A 1978-05-03 1979-05-02 Production de poudre de silicone polycristalline a faible cout Expired CA1144739A (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US90256278A 1978-05-03 1978-05-03
US902,562 1978-05-03

Publications (1)

Publication Number Publication Date
CA1144739A true CA1144739A (fr) 1983-04-19

Family

ID=25416025

Family Applications (1)

Application Number Title Priority Date Filing Date
CA000326810A Expired CA1144739A (fr) 1978-05-03 1979-05-02 Production de poudre de silicone polycristalline a faible cout

Country Status (1)

Country Link
CA (1) CA1144739A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001034519A1 (fr) * 1999-11-11 2001-05-17 Bjorseth, Alf Procede et appareil de production de silicium de qualite photovoltaique
EP1798199A1 (fr) * 2004-08-19 2007-06-20 Tokuyama Corporation Réacteur adapté à des composés de type chlorosilane

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001034519A1 (fr) * 1999-11-11 2001-05-17 Bjorseth, Alf Procede et appareil de production de silicium de qualite photovoltaique
EP1798199A1 (fr) * 2004-08-19 2007-06-20 Tokuyama Corporation Réacteur adapté à des composés de type chlorosilane
EP1798199A4 (fr) * 2004-08-19 2011-05-18 Tokuyama Corp Réacteur adapté à des composés de type chlorosilane

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Legal Events

Date Code Title Description
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