CA1137914A - Transport apparatus - Google Patents
Transport apparatusInfo
- Publication number
- CA1137914A CA1137914A CA000345764A CA345764A CA1137914A CA 1137914 A CA1137914 A CA 1137914A CA 000345764 A CA000345764 A CA 000345764A CA 345764 A CA345764 A CA 345764A CA 1137914 A CA1137914 A CA 1137914A
- Authority
- CA
- Canada
- Prior art keywords
- slat
- rail
- groups
- transport apparatus
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000033001 locomotion Effects 0.000 claims description 42
- 241000269627 Amphiuma means Species 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 230000032258 transport Effects 0.000 description 101
- 235000012431 wafers Nutrition 0.000 description 59
- 230000000875 corresponding effect Effects 0.000 description 35
- 230000000712 assembly Effects 0.000 description 31
- 238000000429 assembly Methods 0.000 description 31
- 238000000034 method Methods 0.000 description 25
- 230000008569 process Effects 0.000 description 25
- 239000004065 semiconductor Substances 0.000 description 18
- 238000005461 lubrication Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229930186657 Lat Natural products 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000004320 controlled atmosphere Methods 0.000 description 2
- 230000002596 correlated effect Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000002441 reversible effect Effects 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 241000886606 Venustaconcha ellipsiformis Species 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000010926 purge Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G25/00—Conveyors comprising a cyclically-moving, e.g. reciprocating, carrier or impeller which is disengaged from the load during the return part of its movement
- B65G25/02—Conveyors comprising a cyclically-moving, e.g. reciprocating, carrier or impeller which is disengaged from the load during the return part of its movement the carrier or impeller having different forward and return paths of movement, e.g. walking beam conveyors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Reciprocating Conveyors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA000413864A CA1155079A (en) | 1979-02-15 | 1982-10-20 | Transport apparatus |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US06/012,354 US4275978A (en) | 1979-02-15 | 1979-02-15 | Transport apparatus |
| US12,354 | 1979-02-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1137914A true CA1137914A (en) | 1982-12-21 |
Family
ID=21754574
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000345764A Expired CA1137914A (en) | 1979-02-15 | 1980-02-15 | Transport apparatus |
| CA000413864A Expired CA1155079A (en) | 1979-02-15 | 1982-10-20 | Transport apparatus |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA000413864A Expired CA1155079A (en) | 1979-02-15 | 1982-10-20 | Transport apparatus |
Country Status (5)
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4692695A (en) * | 1982-05-18 | 1987-09-08 | Ade Corporation | Conductivity-type sensor |
| US4646009A (en) * | 1982-05-18 | 1987-02-24 | Ade Corporation | Contacts for conductivity-type sensors |
| US4498832A (en) * | 1982-05-21 | 1985-02-12 | The Boc Group, Inc. | Workpiece accumulating and transporting apparatus |
| US4666366A (en) * | 1983-02-14 | 1987-05-19 | Canon Kabushiki Kaisha | Articulated arm transfer device |
| EP0137819B1 (en) * | 1983-02-14 | 1987-08-12 | Aeronca Electronics, Inc. | Articulated arm transfer device |
| US4909695A (en) * | 1986-04-04 | 1990-03-20 | Materials Research Corporation | Method and apparatus for handling and processing wafer-like materials |
| US4794863A (en) * | 1988-03-21 | 1989-01-03 | International Business Machines Corporation | Motive structure for transporting workpieces |
| US5197812A (en) * | 1989-11-09 | 1993-03-30 | Dataproducts Corporation | High accuracy vacuum belt and pinch roller media transport mechanism |
| US5664664A (en) * | 1994-12-28 | 1997-09-09 | U.S. Vibra, Inc. | Magnetic vibrator sub-assembly for vibratory feed devices |
| AU1290497A (en) * | 1995-12-15 | 1997-07-03 | Brooks Automation, Inc. | Wide wrist articulated arm transfer device |
| US5765983A (en) * | 1996-05-30 | 1998-06-16 | Brooks Automation, Inc. | Robot handling apparatus |
| US6123502A (en) * | 1997-07-08 | 2000-09-26 | Brooks Automation, Inc. | Substrate holder having vacuum holding and gravity holding |
| US6105753A (en) * | 1997-08-14 | 2000-08-22 | Graham; S. Neal | Linear vibratory parts feeder |
| US20040091344A1 (en) * | 2002-11-12 | 2004-05-13 | Innovative Steel Products, Inc. | Lifting and moving apparatus for a vehicle bed |
| US7004306B2 (en) * | 2002-12-19 | 2006-02-28 | Fmc Technologies, Inc. | Conveying apparatus with piezoelectric driver |
| US7458763B2 (en) | 2003-11-10 | 2008-12-02 | Blueshift Technologies, Inc. | Mid-entry load lock for semiconductor handling system |
| US20070269297A1 (en) | 2003-11-10 | 2007-11-22 | Meulen Peter V D | Semiconductor wafer handling and transport |
| US10086511B2 (en) | 2003-11-10 | 2018-10-02 | Brooks Automation, Inc. | Semiconductor manufacturing systems |
| US7210246B2 (en) | 2003-11-10 | 2007-05-01 | Blueshift Technologies, Inc. | Methods and systems for handling a workpiece in vacuum-based material handling system |
| US10923374B1 (en) * | 2019-07-23 | 2021-02-16 | Applied Materials, Inc. | Walking beam chamber |
| DE102020106350B4 (de) * | 2020-03-09 | 2021-09-16 | IMA-TEC GmbH | Fördergerät |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE7716749U1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1900-01-01 | Valentin, Otto, 7987 Weingarten | ||
| US2705070A (en) * | 1950-03-17 | 1955-03-29 | Carrier Conveyor Corp | Balanced conveyor |
| DE1176773B (de) * | 1954-03-29 | 1964-08-27 | Deutsche Edelstahlwerke Ag | Vorrichtung zum Hindurchfoerdern von Werk-stuecken durch einen Induktor |
| US2951581A (en) * | 1959-06-09 | 1960-09-06 | Gen Mills Inc | Vibratory conveyors |
| US3973665A (en) * | 1975-03-07 | 1976-08-10 | Gca Corporation | Article delivery and transport apparatus for evacuated processing equipment |
-
1979
- 1979-02-15 US US06/012,354 patent/US4275978A/en not_active Expired - Lifetime
-
1980
- 1980-02-12 DE DE3034339T patent/DE3034339C2/de not_active Expired
- 1980-02-12 WO PCT/US1980/000139 patent/WO1980001677A1/en active Application Filing
- 1980-02-15 CA CA000345764A patent/CA1137914A/en not_active Expired
- 1980-02-15 FR FR8003407A patent/FR2449051A1/fr active Granted
-
1982
- 1982-10-20 CA CA000413864A patent/CA1155079A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| US4275978A (en) | 1981-06-30 |
| CA1155079A (en) | 1983-10-11 |
| FR2449051B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1984-04-20 |
| DE3034339T1 (de) | 1982-08-26 |
| WO1980001677A1 (en) | 1980-08-21 |
| FR2449051A1 (fr) | 1980-09-12 |
| DE3034339C2 (de) | 1986-09-25 |
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| RU1768477C (ru) | Винтовой конвейер |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MKEX | Expiry |