CA1135871A - Method of bonding wires to passivated chip microcircuit conductors - Google Patents
Method of bonding wires to passivated chip microcircuit conductorsInfo
- Publication number
- CA1135871A CA1135871A CA000336708A CA336708A CA1135871A CA 1135871 A CA1135871 A CA 1135871A CA 000336708 A CA000336708 A CA 000336708A CA 336708 A CA336708 A CA 336708A CA 1135871 A CA1135871 A CA 1135871A
- Authority
- CA
- Canada
- Prior art keywords
- wire
- hole
- conductor
- subsequent
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004020 conductor Substances 0.000 title claims abstract description 35
- 238000000034 method Methods 0.000 title claims abstract description 29
- 229910052751 metal Inorganic materials 0.000 claims abstract description 32
- 239000002184 metal Substances 0.000 claims abstract description 32
- 239000011810 insulating material Substances 0.000 claims abstract description 4
- 238000005553 drilling Methods 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 10
- 238000010884 ion-beam technique Methods 0.000 claims description 7
- 238000002844 melting Methods 0.000 claims description 7
- 230000008018 melting Effects 0.000 claims description 7
- 238000003825 pressing Methods 0.000 claims description 5
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 229920000136 polysorbate Polymers 0.000 claims 1
- 239000010409 thin film Substances 0.000 abstract description 7
- 229910052782 aluminium Inorganic materials 0.000 description 11
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 11
- 238000002161 passivation Methods 0.000 description 11
- 239000010408 film Substances 0.000 description 9
- 238000003466 welding Methods 0.000 description 7
- 238000009413 insulation Methods 0.000 description 5
- 150000002500 ions Chemical class 0.000 description 5
- 238000001465 metallisation Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000000284 resting effect Effects 0.000 description 2
- 239000010979 ruby Substances 0.000 description 2
- 229910001750 ruby Inorganic materials 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 241000125205 Anethum Species 0.000 description 1
- 206010011416 Croup infectious Diseases 0.000 description 1
- 241001269524 Dura Species 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- VYXSBFYARXAAKO-WTKGSRSZSA-N chembl402140 Chemical compound Cl.C1=2C=C(C)C(NCC)=CC=2OC2=C\C(=N/CC)C(C)=CC2=C1C1=CC=CC=C1C(=O)OCC VYXSBFYARXAAKO-WTKGSRSZSA-N 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000009191 jumping Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000005555 metalworking Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
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- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/328—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by welding
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Manufacturing Of Electrical Connectors (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Laser Beam Processing (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US95615878A | 1978-10-31 | 1978-10-31 | |
US956,158 | 1978-10-31 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA1135871A true CA1135871A (en) | 1982-11-16 |
Family
ID=25497833
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA000336708A Expired CA1135871A (en) | 1978-10-31 | 1979-10-01 | Method of bonding wires to passivated chip microcircuit conductors |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP0010610B1 (enrdf_load_stackoverflow) |
JP (1) | JPS5562680A (enrdf_load_stackoverflow) |
CA (1) | CA1135871A (enrdf_load_stackoverflow) |
DE (1) | DE2965205D1 (enrdf_load_stackoverflow) |
IT (1) | IT1165447B (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4928384A (en) * | 1987-03-24 | 1990-05-29 | Cooper Industries, Inc. | Method of making a wire bonded microfuse |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0117348B1 (en) * | 1982-12-06 | 1987-03-11 | The Welding Institute | Bonding leads to semiconductor devices |
WO1984002867A1 (en) * | 1983-01-24 | 1984-08-02 | Ford Werke Ag | Method of laser soldering |
IT1195117B (it) * | 1986-08-01 | 1988-10-12 | Vallko Srl | Tettuccio apribile di autoveicolo |
US5093988A (en) * | 1991-01-24 | 1992-03-10 | Kohler Co. | Method for attaching a flexible connector |
DE69430151T2 (de) * | 1993-05-21 | 2002-08-22 | Toyota Jidosha K.K., Toyota | Laserschweissverfahren |
US6501043B1 (en) * | 1999-10-22 | 2002-12-31 | Medtronic, Inc. | Apparatus and method for laser welding of ribbons |
DE102018213639A1 (de) * | 2018-08-14 | 2020-02-20 | Te Connectivity Germany Gmbh | Verfahren zum Anbringen wenigstens eines insbesondere stiftförmigen Kontaktelements auf einer Leiterbahn einer Leiterplatte, Stiftleiste zur Anbringung auf einer Leiterplatte, Verbindungsanordnung |
-
1979
- 1979-08-17 JP JP10416679A patent/JPS5562680A/ja active Granted
- 1979-09-24 DE DE7979103618T patent/DE2965205D1/de not_active Expired
- 1979-09-24 EP EP79103618A patent/EP0010610B1/fr not_active Expired
- 1979-09-28 IT IT26086/79A patent/IT1165447B/it active
- 1979-10-01 CA CA000336708A patent/CA1135871A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4928384A (en) * | 1987-03-24 | 1990-05-29 | Cooper Industries, Inc. | Method of making a wire bonded microfuse |
Also Published As
Publication number | Publication date |
---|---|
IT1165447B (it) | 1987-04-22 |
EP0010610B1 (fr) | 1983-04-13 |
IT7926086A0 (it) | 1979-09-28 |
EP0010610A1 (fr) | 1980-05-14 |
JPS5562680A (en) | 1980-05-12 |
JPS5642114B2 (enrdf_load_stackoverflow) | 1981-10-02 |
DE2965205D1 (en) | 1983-05-19 |
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Legal Events
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MKEX | Expiry |