CA1102931A - Plasma discharge ion source - Google Patents

Plasma discharge ion source

Info

Publication number
CA1102931A
CA1102931A CA308,683A CA308683A CA1102931A CA 1102931 A CA1102931 A CA 1102931A CA 308683 A CA308683 A CA 308683A CA 1102931 A CA1102931 A CA 1102931A
Authority
CA
Canada
Prior art keywords
plasma
anode
ions
magnetic field
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA308,683A
Other languages
English (en)
French (fr)
Inventor
Norman Williams
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Inc
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Application granted granted Critical
Publication of CA1102931A publication Critical patent/CA1102931A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/14—Other arc discharge ion sources using an applied magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
CA308,683A 1977-08-08 1978-08-03 Plasma discharge ion source Expired CA1102931A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US05/822,866 US4139772A (en) 1977-08-08 1977-08-08 Plasma discharge ion source
US822,866 1977-08-08

Publications (1)

Publication Number Publication Date
CA1102931A true CA1102931A (en) 1981-06-09

Family

ID=25237181

Family Applications (1)

Application Number Title Priority Date Filing Date
CA308,683A Expired CA1102931A (en) 1977-08-08 1978-08-03 Plasma discharge ion source

Country Status (6)

Country Link
US (1) US4139772A (enExample)
EP (1) EP0000843B1 (enExample)
JP (1) JPS5429970A (enExample)
CA (1) CA1102931A (enExample)
DE (1) DE2860523D1 (enExample)
IT (1) IT1121501B (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4542321A (en) * 1982-07-12 1985-09-17 Denton Vacuum Inc Inverted magnetron ion source
EP0135366B1 (en) * 1983-08-15 1990-11-07 Applied Materials, Inc. System and method for ion implantation
DE3584105D1 (de) * 1984-03-16 1991-10-24 Hitachi Ltd Ionenquelle.
US4774437A (en) * 1986-02-28 1988-09-27 Varian Associates, Inc. Inverted re-entrant magnetron ion source
US4760262A (en) * 1987-05-12 1988-07-26 Eaton Corporation Ion source
US4891525A (en) * 1988-11-14 1990-01-02 Eaton Corporation SKM ion source
US5449920A (en) * 1994-04-20 1995-09-12 Northeastern University Large area ion implantation process and apparatus

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2373151A (en) * 1942-07-29 1945-04-10 Cons Eng Corp Analytical system
US2427484A (en) * 1943-10-22 1947-09-16 Stanolind Oil & Gas Co Ionic gas analysis
US2829259A (en) * 1954-08-13 1958-04-01 Samuel N Foner Mass spectrometer
US2826708A (en) * 1955-06-02 1958-03-11 Jr John S Foster Plasma generator
US2831996A (en) * 1956-09-19 1958-04-22 Eugene F Martina Ion source
NL266057A (enExample) * 1960-06-21 1964-03-10
FR1346091A (fr) * 1962-01-30 1963-12-13 Ass Elect Ind Nouveau spectromètre de masse
FR1459469A (fr) * 1965-11-29 1966-04-29 Atomic Energy Commission Procédé et appareil pour la production d'un plasma complètement ionisé
US3500077A (en) * 1967-12-19 1970-03-10 Atomic Energy Commission Method and apparatus for accelerating ions out of a hot plasma region
FR1598559A (enExample) * 1968-12-20 1970-07-06
GB1414626A (en) * 1971-11-24 1975-11-19 Franks J Ion sources
US3900585A (en) * 1972-02-12 1975-08-19 Agency Ind Science Techn Method for control of ionization electrostatic plating
JPS5148097A (en) * 1974-10-23 1976-04-24 Osaka Koon Denki Kk Iongen

Also Published As

Publication number Publication date
IT1121501B (it) 1986-04-02
EP0000843B1 (en) 1981-03-11
EP0000843A1 (en) 1979-02-21
JPS5429970A (en) 1979-03-06
DE2860523D1 (en) 1981-04-09
JPS6130372B2 (enExample) 1986-07-12
IT7826513A0 (it) 1978-08-04
US4139772A (en) 1979-02-13

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Legal Events

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