Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Battelle Memorial Institute Inc
Original Assignee
Battelle Memorial Institute Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Battelle Memorial Institute IncfiledCriticalBattelle Memorial Institute Inc
Priority to CA283,461ApriorityCriticalpatent/CA1090485A/fr
Application grantedgrantedCritical
Publication of CA1090485ApublicationCriticalpatent/CA1090485A/fr
CA283,461A1977-07-251977-07-25Appareil supporte pour la pulverisation de plasma a un taux de deposition eleve sur une grande surface
ExpiredCA1090485A
(fr)