CA1052886A - Capacitive thickness gauging - Google Patents

Capacitive thickness gauging

Info

Publication number
CA1052886A
CA1052886A CA234,548A CA234548A CA1052886A CA 1052886 A CA1052886 A CA 1052886A CA 234548 A CA234548 A CA 234548A CA 1052886 A CA1052886 A CA 1052886A
Authority
CA
Canada
Prior art keywords
probe
capacitive
probes
potential
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA234,548A
Other languages
English (en)
French (fr)
Inventor
Robert C. Abbe
Noel S. Poduje
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ADE Corp
Original Assignee
ADE Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ADE Corp filed Critical ADE Corp
Application granted granted Critical
Publication of CA1052886A publication Critical patent/CA1052886A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/04—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving
    • G01B7/042—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving for measuring length
    • G01B7/044—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving for measuring length using capacitive means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/08—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means
    • G01B7/087—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using capacitive means for measuring of objects while moving

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
CA234,548A 1974-09-03 1975-09-02 Capacitive thickness gauging Expired CA1052886A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/502,874 US3990005A (en) 1974-09-03 1974-09-03 Capacitive thickness gauging for ungrounded elements

Publications (1)

Publication Number Publication Date
CA1052886A true CA1052886A (en) 1979-04-17

Family

ID=23999771

Family Applications (1)

Application Number Title Priority Date Filing Date
CA234,548A Expired CA1052886A (en) 1974-09-03 1975-09-02 Capacitive thickness gauging

Country Status (5)

Country Link
US (1) US3990005A (en, 2012)
JP (2) JPS5155253A (en, 2012)
CA (1) CA1052886A (en, 2012)
DE (1) DE2539212C2 (en, 2012)
GB (1) GB1525695A (en, 2012)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5233558A (en) * 1975-09-10 1977-03-14 Hiromi Ogasawara Detector for minute variations
JPS5575614A (en) * 1978-12-04 1980-06-07 Hiromi Ogasawara Amount of movement measuring unit for straight movement mobile body
JPS54141657A (en) * 1978-04-26 1979-11-05 Hiromi Ogasawara Device for measuring displacement of moving body
JPS5537958A (en) * 1978-09-11 1980-03-17 Hiromi Ogasawara Rotation angle detector
JPS5562310A (en) * 1978-10-20 1980-05-10 Hiromi Ogasawara Direct-acting type displacement detector
US4300093A (en) * 1979-12-03 1981-11-10 Ogasawara Hiromi Device for measuring the amount of rotation of a rotating object
JPS5767832A (en) * 1980-10-16 1982-04-24 Nippon Soken Inc Torque detector
JPS5791429A (en) * 1980-11-28 1982-06-07 Nippon Soken Inc Torque detector
CH648929A5 (fr) * 1982-07-07 1985-04-15 Tesa Sa Dispositif de mesure capacitif de deplacement.
US4563635A (en) * 1983-05-16 1986-01-07 Wagner Delmer W Moisture measuring method and apparatus
US4560924A (en) * 1983-07-22 1985-12-24 Magnetic Peripherals Inc. Flatness measuring apparatus
US4569445A (en) * 1983-10-19 1986-02-11 At&T Technologies, Inc. Apparatus for measuring the thickness of disc-like articles
US4568875A (en) * 1984-01-06 1986-02-04 Micro Sensors Incorporated Moisture corrected denier measurement
US4860229A (en) * 1984-01-20 1989-08-22 Ade Corporation Wafer flatness station
US4849916A (en) * 1985-04-30 1989-07-18 Ade Corporation Improved spatial resolution measurement system and method
DE3616390A1 (de) * 1986-05-15 1987-11-19 Uranit Gmbh Verfahren und schaltungsanordnung zur messung des eigenschwingverhaltens eines rotierenden koerpers
JP2690908B2 (ja) * 1987-09-25 1997-12-17 株式会社日立製作所 表面計測装置
US4910453A (en) * 1987-10-15 1990-03-20 Ade Corporation Multi-probe grouping system with nonlinear error correction
US4931962A (en) * 1988-05-13 1990-06-05 Ade Corporation Fixture and nonrepeatable error compensation system
US4918376A (en) * 1989-03-07 1990-04-17 Ade Corporation A.C. capacitive gauging system
US5102280A (en) * 1989-03-07 1992-04-07 Ade Corporation Robot prealigner
US4958129A (en) * 1989-03-07 1990-09-18 Ade Corporation Prealigner probe
US5198777A (en) * 1990-02-14 1993-03-30 Murata Mfg. Co., Ltd. Paper thickness detecting apparatus having a resonator with a resonance point set by a capacitance detecting unit
US5168239A (en) * 1990-10-15 1992-12-01 Teknekron Communications Systems, Inc. Method and apparatus for adjusting the threshold for determining the thickness of or the number of sheets in a sheet material
US5189376A (en) * 1990-12-17 1993-02-23 Massachusetts Institute Of Technology Method for the measurment of capacitance, with application to linear measurement of distance
US5135113A (en) * 1991-04-01 1992-08-04 Modern Controls, Inc. High-speed tablet sorting machine
US5402072A (en) * 1992-02-28 1995-03-28 International Business Machines Corporation System and method for testing and fault isolation of high density passive boards and substrates
US5537109A (en) * 1993-05-28 1996-07-16 General Scanning, Inc. Capacitive transducing with feedback
US5376890A (en) * 1993-06-10 1994-12-27 Memc Electronic Materials, Inc. Capacitive distance measuring apparatus having liquid ground contact
US5642298A (en) * 1994-02-16 1997-06-24 Ade Corporation Wafer testing and self-calibration system
US5511005A (en) * 1994-02-16 1996-04-23 Ade Corporation Wafer handling and processing system
US5764066A (en) * 1995-10-11 1998-06-09 Sandia Corporation Object locating system
US5735055A (en) * 1996-04-23 1998-04-07 Aluminum Company Of America Method and apparatus for measuring the thickness of an article at a plurality of points
JP2000180157A (ja) * 1998-12-16 2000-06-30 Super Silicon Kenkyusho:Kk 平坦度測定センサ
NZ516812A (en) * 1999-07-13 2002-07-26 Maximilian Indihar Electrical sensor for measuring capacitance change and conversion into a voltage signal
RU2207499C2 (ru) * 2000-12-28 2003-06-27 Медников Феликс Матвеевич Токовихревой преобразователь
WO2003065062A1 (en) 2002-01-30 2003-08-07 Ade Corporation Method for high-accuracy non-contact capacitive displacement measurement of poorly connected targets
US7012438B1 (en) * 2002-07-10 2006-03-14 Kla-Tencor Technologies Corp. Methods and systems for determining a property of an insulating film
FR2844349B1 (fr) * 2002-09-06 2005-06-24 Nanotec Solution Detecteur de proximite par capteur capacitif
US7248062B1 (en) 2002-11-04 2007-07-24 Kla-Tencor Technologies Corp. Contactless charge measurement of product wafers and control of corona generation and deposition
US7034563B1 (en) * 2005-01-26 2006-04-25 Ahbee 2, L.P., A California Limited Partnership Apparatus for measuring of thin dielectric layer properties on semiconductor wafers with contact self aligning electrodes
WO2007022538A2 (en) * 2005-08-19 2007-02-22 Kla-Tencor Technologies Corporation Test pads for measuring properties of a wafer

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1050555B (en, 2012) * 1959-02-12
DE811163C (de) * 1948-11-20 1951-08-16 Heinz Dr-Ing Koch Einrichtung zum elektrischen Messen der Dicke von Folien, insbesondere im fortlaufenden Arbeitsgang
US3312892A (en) * 1964-05-04 1967-04-04 Technology Instr Corp Of Calif Contactless electrical transducer having moving parts
US3418597A (en) * 1964-07-13 1968-12-24 Shelby R. Smith Capacitive measuring probe and circuit therefor
GB1097760A (en) * 1965-04-27 1968-01-03 Ilford Ltd Testing material for irregularities of thickness
US3805150A (en) * 1970-08-17 1974-04-16 Ade Corp Environment immune high precision capacitive gauging system
US3775679A (en) * 1971-12-09 1973-11-27 Ade Corp Apparatus and method for direct readout of capacitively gauged dimensions
US3771051A (en) * 1972-06-14 1973-11-06 Ade Corp Apparatus and method for indicating surface roughness

Also Published As

Publication number Publication date
DE2539212A1 (de) 1976-03-11
GB1525695A (en) 1978-09-20
DE2539212C2 (de) 1985-02-07
JPS61209302A (ja) 1986-09-17
JPS6155043B2 (en, 2012) 1986-11-26
JPS6253762B2 (en, 2012) 1987-11-12
JPS5155253A (en) 1976-05-14
US3990005A (en) 1976-11-02

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