CA1040274A - Methode et systeme de correction d'averration dans un faisceau de particules chargees - Google Patents

Methode et systeme de correction d'averration dans un faisceau de particules chargees

Info

Publication number
CA1040274A
CA1040274A CA225,411A CA225411A CA1040274A CA 1040274 A CA1040274 A CA 1040274A CA 225411 A CA225411 A CA 225411A CA 1040274 A CA1040274 A CA 1040274A
Authority
CA
Canada
Prior art keywords
focus
movement
cycle
during
target
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA225,411A
Other languages
English (en)
Inventor
Merlyn H. Perkins
Samuel K. Doran
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of CA1040274A publication Critical patent/CA1040274A/fr
Expired legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22D—CASTING OF METALS; CASTING OF OTHER SUBSTANCES BY THE SAME PROCESSES OR DEVICES
    • B22D23/00—Casting processes not provided for in groups B22D1/00 - B22D21/00
    • B22D23/06—Melting-down metal, e.g. metal particles, in the mould
    • B22D23/10—Electroslag casting

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Processing Of Solid Wastes (AREA)
  • Electron Beam Exposure (AREA)
CA225,411A 1974-06-24 1975-04-22 Methode et systeme de correction d'averration dans un faisceau de particules chargees Expired CA1040274A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US48226674A 1974-06-24 1974-06-24

Publications (1)

Publication Number Publication Date
CA1040274A true CA1040274A (fr) 1978-10-10

Family

ID=23915394

Family Applications (1)

Application Number Title Priority Date Filing Date
CA225,411A Expired CA1040274A (fr) 1974-06-24 1975-04-22 Methode et systeme de correction d'averration dans un faisceau de particules chargees

Country Status (5)

Country Link
JP (1) JPS5148721A (fr)
CA (1) CA1040274A (fr)
DE (1) DE2527954A1 (fr)
FR (1) FR2276119A1 (fr)
SE (1) SE7507260L (fr)

Also Published As

Publication number Publication date
DE2527954A1 (de) 1976-01-15
FR2276119A1 (fr) 1976-01-23
JPS5148721A (fr) 1976-04-27
SE7507260L (sv) 1975-12-29
FR2276119B1 (fr) 1979-04-13

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