CA1017848A - Inspection system employing differential imaging - Google Patents

Inspection system employing differential imaging

Info

Publication number
CA1017848A
CA1017848A CA220,971A CA220971A CA1017848A CA 1017848 A CA1017848 A CA 1017848A CA 220971 A CA220971 A CA 220971A CA 1017848 A CA1017848 A CA 1017848A
Authority
CA
Canada
Prior art keywords
inspection system
system employing
differential imaging
employing differential
imaging
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA220,971A
Other languages
English (en)
Other versions
CA220971S (en
Inventor
William L. Hrybyk
Raymond A. Lloyd
Kenneth C. Ryan
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Westinghouse Electric Corp
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Application granted granted Critical
Publication of CA1017848A publication Critical patent/CA1017848A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2433—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Closed-Circuit Television Systems (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing, Inspecting, Measuring Of Stereoscopic Televisions And Televisions (AREA)
CA220,971A 1974-03-08 1975-02-28 Inspection system employing differential imaging Expired CA1017848A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US449561A US3916439A (en) 1974-03-08 1974-03-08 Inspection system employing differential imaging

Publications (1)

Publication Number Publication Date
CA1017848A true CA1017848A (en) 1977-09-20

Family

ID=23784616

Family Applications (1)

Application Number Title Priority Date Filing Date
CA220,971A Expired CA1017848A (en) 1974-03-08 1975-02-28 Inspection system employing differential imaging

Country Status (7)

Country Link
US (1) US3916439A (en, 2012)
JP (1) JPS50123386A (en, 2012)
CA (1) CA1017848A (en, 2012)
DE (1) DE2508992A1 (en, 2012)
FR (1) FR2263492A1 (en, 2012)
GB (1) GB1479406A (en, 2012)
IL (1) IL46733A (en, 2012)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3987241A (en) * 1974-10-17 1976-10-19 Westinghouse Electric Corporation Sampled differential analyzer
US4242702A (en) * 1976-12-01 1980-12-30 Hitachi, Ltd. Apparatus for automatically checking external appearance of object
JPS5371563A (en) * 1976-12-08 1978-06-26 Hitachi Ltd Automatic inspection correcting method for mask
DE2700252C2 (de) * 1977-01-05 1985-03-14 Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt Verfahren zum Prüfen definierter Strukturen
DE2718804C3 (de) 1977-04-27 1979-10-31 Karlheinz Prof. Dr. 3000 Hannover Renner Vorrichtung zur PositionierungskontroUe von Patienten und/oder Bestrahlungsquellen
JPS54139784A (en) * 1978-04-21 1979-10-30 Ngk Insulators Ltd Method and device for testing ceramic piece having innumerable through pores
JPS55100787A (en) 1979-01-25 1980-07-31 Hajime Sangyo Kk Inspection unit for body
US4295198A (en) * 1979-04-02 1981-10-13 Cogit Systems, Inc. Automatic printed circuit dimensioning, routing and inspecting apparatus
US4246606A (en) * 1979-04-17 1981-01-20 Hajime Industries Ltd. Inspection apparatus
FR2454604B1 (fr) * 1979-04-19 1986-04-04 Hajime Industries Appareil de controle ou d'examen d'objets
JPS5744824A (en) * 1980-09-01 1982-03-13 Hitachi Ltd Spectrum display device
US4502075A (en) * 1981-12-04 1985-02-26 International Remote Imaging Systems Method and apparatus for producing optical displays
US4581706A (en) * 1982-01-25 1986-04-08 Hitachi, Ltd. Method and apparatus for testing a joint
DE3416883A1 (de) * 1984-05-08 1985-11-14 Robert Prof. Dr.-Ing. 7760 Radolfzell Massen Verfahren und anordnung zur kontinuierlichen beruehrungslosen messung der 2-dimensionalen schrumpfung von strickwaren
DE3427981A1 (de) * 1984-07-28 1986-02-06 Telefunken electronic GmbH, 7100 Heilbronn Verfahren zur fehlererkennung an definierten strukturen
FR2589242B1 (fr) * 1985-10-25 1988-11-25 Oreal Procede pour examiner la surface d'un echantillon et appareil pour sa mise en oeuvre
JPS62156547A (ja) * 1985-12-27 1987-07-11 Sumitomo Special Metals Co Ltd 表面欠陥検出方法
JPS62209305A (ja) * 1986-03-10 1987-09-14 Fujitsu Ltd 寸法良否判定方法
DE3612256C2 (de) * 1986-04-11 1998-05-14 Twi Tech Wissenschaftliche Ind Verfahren und Einrichtung zur optoelektronischen Qualitätskontrolle
DE3704381A1 (de) * 1987-02-12 1988-08-25 Alexander Gausa Stegplattenpruefung
US5060065A (en) * 1990-02-23 1991-10-22 Cimflex Teknowledge Corporation Apparatus and method for illuminating a printed circuit board for inspection
DE4410603C1 (de) * 1994-03-26 1995-06-14 Jenoptik Technologie Gmbh Verfahren zur Erkennung von Fehlern bei der Inspektion von strukturierten Oberflächen
US5970167A (en) * 1995-11-08 1999-10-19 Alpha Innotech Corporation Integrated circuit failure analysis using color voltage contrast
US6330354B1 (en) 1997-05-01 2001-12-11 International Business Machines Corporation Method of analyzing visual inspection image data to find defects on a device
TWI274289B (en) * 2001-02-19 2007-02-21 Olympus Corp Image comparing device, image comparing method and program for executing image comparison in computer recording medium

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3049588A (en) * 1959-08-28 1962-08-14 Prec Controls Corp Quality control system
US3811010A (en) * 1972-08-16 1974-05-14 Us Navy Intrusion detection apparatus

Also Published As

Publication number Publication date
IL46733A (en) 1977-07-31
IL46733A0 (en) 1975-04-25
FR2263492A1 (en, 2012) 1975-10-03
GB1479406A (en) 1977-07-13
US3916439A (en) 1975-10-28
DE2508992A1 (de) 1976-04-01
JPS50123386A (en, 2012) 1975-09-27

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