CA1017462A - Reliable mosfet device and method for making same - Google Patents
Reliable mosfet device and method for making sameInfo
- Publication number
- CA1017462A CA1017462A CA198,773A CA198773A CA1017462A CA 1017462 A CA1017462 A CA 1017462A CA 198773 A CA198773 A CA 198773A CA 1017462 A CA1017462 A CA 1017462A
- Authority
- CA
- Canada
- Prior art keywords
- making same
- mosfet device
- reliable mosfet
- reliable
- making
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/511—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures
- H01L29/513—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures the variation being perpendicular to the channel plane
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Electrodes Of Semiconductors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Junction Field-Effect Transistors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US35704673A | 1973-05-03 | 1973-05-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA1017462A true CA1017462A (en) | 1977-09-13 |
Family
ID=23404079
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA198,773A Expired CA1017462A (en) | 1973-05-03 | 1974-05-02 | Reliable mosfet device and method for making same |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS522272B2 (en) |
| CA (1) | CA1017462A (en) |
| DE (1) | DE2419704A1 (en) |
| FR (1) | FR2228301B1 (en) |
| GB (1) | GB1452805A (en) |
| IT (1) | IT1006474B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI396686B (en) * | 2004-05-21 | 2013-05-21 | Takeda Pharmaceutical | Cyclic amide derivative, and its production and use |
| WO2013132953A1 (en) * | 2012-03-05 | 2013-09-12 | 株式会社村田製作所 | Bonding method, electronic device manufacturing method, and electronic component |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1053069A (en) * | 1963-06-28 | |||
| US3528168A (en) * | 1967-09-26 | 1970-09-15 | Texas Instruments Inc | Method of making a semiconductor device |
| US3632438A (en) * | 1967-09-29 | 1972-01-04 | Texas Instruments Inc | Method for increasing the stability of semiconductor devices |
-
1974
- 1974-03-19 FR FR7410669A patent/FR2228301B1/fr not_active Expired
- 1974-03-28 GB GB1376974A patent/GB1452805A/en not_active Expired
- 1974-04-03 JP JP49037069A patent/JPS522272B2/ja not_active Expired
- 1974-04-17 IT IT2150474A patent/IT1006474B/en active
- 1974-04-24 DE DE19742419704 patent/DE2419704A1/en not_active Withdrawn
- 1974-05-02 CA CA198,773A patent/CA1017462A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE2419704A1 (en) | 1974-11-21 |
| FR2228301A1 (en) | 1974-11-29 |
| IT1006474B (en) | 1976-09-30 |
| JPS522272B2 (en) | 1977-01-20 |
| GB1452805A (en) | 1976-10-20 |
| FR2228301B1 (en) | 1977-10-14 |
| JPS5011391A (en) | 1975-02-05 |
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