CA1010675A - Capacitive type pressure transducer with flexible diaphragm - Google Patents

Capacitive type pressure transducer with flexible diaphragm

Info

Publication number
CA1010675A
CA1010675A CA200,178A CA200178A CA1010675A CA 1010675 A CA1010675 A CA 1010675A CA 200178 A CA200178 A CA 200178A CA 1010675 A CA1010675 A CA 1010675A
Authority
CA
Canada
Prior art keywords
pressure transducer
type pressure
flexible diaphragm
capacitive type
capacitive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA200,178A
Other languages
English (en)
Other versions
CA200178S (en
Inventor
Samuel A. Johnston
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bunker Ramo Corp
Original Assignee
Bunker Ramo Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bunker Ramo Corp filed Critical Bunker Ramo Corp
Application granted granted Critical
Publication of CA1010675A publication Critical patent/CA1010675A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
CA200,178A 1973-05-24 1974-05-17 Capacitive type pressure transducer with flexible diaphragm Expired CA1010675A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US363446A US3880009A (en) 1973-05-24 1973-05-24 Pressure transducer

Publications (1)

Publication Number Publication Date
CA1010675A true CA1010675A (en) 1977-05-24

Family

ID=23430240

Family Applications (1)

Application Number Title Priority Date Filing Date
CA200,178A Expired CA1010675A (en) 1973-05-24 1974-05-17 Capacitive type pressure transducer with flexible diaphragm

Country Status (10)

Country Link
US (1) US3880009A (de)
JP (1) JPS5021783A (de)
BE (1) BE814926A (de)
CA (1) CA1010675A (de)
DD (1) DD113267A5 (de)
DE (1) DE2423484C3 (de)
FR (1) FR2230987B1 (de)
GB (1) GB1423333A (de)
IN (1) IN140822B (de)
NL (1) NL7406721A (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4040118A (en) * 1975-06-18 1977-08-02 Bunker Ramo Corporation Pressure sensitive transducer
US4026156A (en) * 1975-11-06 1977-05-31 The Charles Stark Draper Laboratory, Inc. Vertical displacement measuring apparatus
US4295376A (en) * 1978-12-01 1981-10-20 Besco Industries, Inc. Force responsive transducer
FR2466763A1 (fr) * 1979-09-28 1981-04-10 Thomson Csf Capteur de pression a ondes elastiques de surface et senseur de pression pour un tel capteur
US4345299A (en) * 1980-11-03 1982-08-17 Motorola, Inc. Capacitive pressure transducer assembly with improved output lead design
JPS5855732A (ja) * 1981-09-30 1983-04-02 Hitachi Ltd 静電容量型圧力センサ
JPS58166234A (ja) * 1982-03-08 1983-10-01 ロ−ベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 圧力センサ
JPS58203376A (ja) * 1982-05-20 1983-11-26 三井造船株式会社 雪の冷熱の利用方法
FI74350C (fi) * 1984-02-21 1988-01-11 Vaisala Oy Kapacitiv absoluttryckgivare.
JPS60139239U (ja) * 1984-02-28 1985-09-14 シチズン時計株式会社 圧力センサ−
US4982351A (en) * 1986-05-05 1991-01-01 Texas Instruments Incorporated Low cost high precision sensor
US4951236A (en) * 1986-05-05 1990-08-21 Texas Instruments Incorporated Low cost high precision sensor
US5051937A (en) * 1986-05-05 1991-09-24 Texas Instruments Incorporated Low cost high precision sensor
JPS63262537A (ja) * 1987-04-20 1988-10-28 Saginomiya Seisakusho Inc 圧力測定装置
JPH0220131U (de) * 1988-07-26 1990-02-09
FI93993C (fi) * 1990-12-10 1995-06-26 Pietiko Oy Menetelmä ja anturi matalien ilmanpaineiden mittaamiseen
GB2259147A (en) * 1991-08-15 1993-03-03 Burreng Limited Pressure sensor
DE19527919C2 (de) * 1995-07-29 2000-01-13 Beck Gmbh Druckmeselemente Druck-Meßeinrichtung
US5763787A (en) * 1996-09-05 1998-06-09 Rosemont Inc. Carrier assembly for fluid sensor
US6754137B1 (en) 1998-12-23 2004-06-22 Asulab S.A. Watch providing barometer or altimeter reading, and method for making same
US9146170B2 (en) * 2012-07-31 2015-09-29 Freescale Semiconductor, Inc. Capacitive pressure sensor in an overmolded package
WO2014188374A1 (en) * 2013-05-22 2014-11-27 Eliwell Controls S.R.L. Con Unico Socio Pressure sensor, assembly method and domestic appliance provided with said pressure sensor
ITUD20130069A1 (it) * 2013-05-22 2014-11-23 Eliwell Controls S R L Con Unico S Ocio Sensore digitale di pressione per un elettrodomestico ed elettrodomestico provvisto di detto sensore digitale di pressione
JP6265361B2 (ja) * 2014-09-03 2018-01-24 コメットネットワーク シーオー．，エルティーディー． 差圧センサ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR964108A (de) * 1950-08-07
US2751530A (en) * 1954-01-04 1956-06-19 Honeywell Regulator Co Differential pressure sensing unit
US2714703A (en) * 1954-10-26 1955-08-02 Avieu Knickerbocker Inc Transducer
US2999385A (en) * 1956-09-17 1961-09-12 Trans Sonics Inc Pressure sensing instrument
US3405559A (en) * 1966-11-07 1968-10-15 United Aircraft Corp Pressure transducer
US3479879A (en) * 1968-03-29 1969-11-25 Schwien Eng Inc Manometer
US3620083A (en) * 1969-12-04 1971-11-16 Nasa Wide range dynamic pressure sensor

Also Published As

Publication number Publication date
IN140822B (de) 1976-12-25
GB1423333A (en) 1976-02-04
DE2423484C3 (de) 1980-03-13
DD113267A5 (de) 1975-05-20
FR2230987B1 (de) 1979-03-30
US3880009A (en) 1975-04-29
BE814926A (fr) 1974-09-02
JPS5021783A (de) 1975-03-07
FR2230987A1 (de) 1974-12-20
DE2423484B2 (de) 1979-07-12
NL7406721A (de) 1974-11-26
DE2423484A1 (de) 1974-12-12

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