BRPI0822112A8 - sensor, método para detecção e método para produzir um sensor - Google Patents

sensor, método para detecção e método para produzir um sensor

Info

Publication number
BRPI0822112A8
BRPI0822112A8 BRPI0822112A BRPI0822112A BRPI0822112A8 BR PI0822112 A8 BRPI0822112 A8 BR PI0822112A8 BR PI0822112 A BRPI0822112 A BR PI0822112A BR PI0822112 A BRPI0822112 A BR PI0822112A BR PI0822112 A8 BRPI0822112 A8 BR PI0822112A8
Authority
BR
Brazil
Prior art keywords
sensor
producing
detection
Prior art date
Application number
BRPI0822112A
Other languages
English (en)
Inventor
George Hartwell Peter
G Walmsley Robert
Original Assignee
Hewlett Packard Development Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Development Co filed Critical Hewlett Packard Development Co
Publication of BRPI0822112A2 publication Critical patent/BRPI0822112A2/pt
Publication of BRPI0822112A8 publication Critical patent/BRPI0822112A8/pt
Publication of BRPI0822112B1 publication Critical patent/BRPI0822112B1/pt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/42—Devices characterised by the use of electric or magnetic means
    • G01P3/44—Devices characterised by the use of electric or magnetic means for measuring angular speed
    • G01P3/48—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage
    • G01P3/481—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals
    • G01P3/483—Devices characterised by the use of electric or magnetic means for measuring angular speed by measuring frequency of generated current or voltage of pulse signals delivered by variable capacitance detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G01D5/2412—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes by varying overlap
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/082—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for two degrees of freedom of movement of a single mass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Pressure Sensors (AREA)
  • Gyroscopes (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
BRPI0822112A 2008-03-26 2008-03-26 sensor inercial capacitivo, método para detecção de movimento em um eixo geométrico e método para produzir o referido sensor BRPI0822112B1 (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2008/058263 WO2009120193A1 (en) 2008-03-26 2008-03-26 Capacitive sensor having cyclic and absolute electrode sets

Publications (3)

Publication Number Publication Date
BRPI0822112A2 BRPI0822112A2 (pt) 2015-06-23
BRPI0822112A8 true BRPI0822112A8 (pt) 2018-09-25
BRPI0822112B1 BRPI0822112B1 (pt) 2018-12-04

Family

ID=41114213

Family Applications (1)

Application Number Title Priority Date Filing Date
BRPI0822112A BRPI0822112B1 (pt) 2008-03-26 2008-03-26 sensor inercial capacitivo, método para detecção de movimento em um eixo geométrico e método para produzir o referido sensor

Country Status (6)

Country Link
US (1) US20110018561A1 (pt)
EP (1) EP2257821B1 (pt)
CN (1) CN102047126B (pt)
BR (1) BRPI0822112B1 (pt)
RU (1) RU2469336C2 (pt)
WO (1) WO2009120193A1 (pt)

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EP2325613A1 (en) * 2009-11-16 2011-05-25 Farsens, S.L. Microelectromechanical sensing device
US9658053B2 (en) 2010-03-09 2017-05-23 Si-Ware Systems Self calibration for mirror positioning in optical MEMS interferometers
WO2011130941A1 (zh) * 2010-04-20 2011-10-27 浙江大学 变面积电容结构、梳状栅电容加速度计以及梳状栅电容陀螺
WO2012079016A1 (en) * 2010-12-10 2012-06-14 Brandeis University Compositions and methods for the detection and analysis of african swine fever virus
DE102011078328A1 (de) * 2011-06-29 2013-01-03 Siemens Aktiengesellschaft Kapazitives Sensorelement zur Detektion einer Verschiebung
US9702897B2 (en) 2012-10-08 2017-07-11 Northrop Grumman Systems Corporation Dynamic self-calibration of an accelerometer system
CN105103030B (zh) * 2013-01-28 2018-07-06 斯维尔系统 自校准的微机电系统设备
RU2556284C1 (ru) * 2014-04-01 2015-07-10 Открытое акционерное общество "Авангард" Чувствительный элемент акселерометра на поверхностных акустических волнах
US10571484B2 (en) * 2014-04-16 2020-02-25 Cirrus Logic, Inc. Systems and methods for determining acceleration based on phase demodulation of an electrical signal
GB2529277B (en) * 2014-04-16 2018-09-19 Cirrus Logic Inc Systems and methods for determining acceleration based on phase demodulation of an electrical signal
GB201409182D0 (en) * 2014-05-23 2014-07-09 Pragmatic Printing Ltd Capacitive detection system
FI127229B (en) * 2015-03-09 2018-02-15 Murata Manufacturing Co Microelectromechanical structure and device
CN106403922A (zh) * 2015-07-31 2017-02-15 立锜科技股份有限公司 具有电性补偿的微机电元件及其读取电路
CN110275047B (zh) * 2018-03-14 2021-01-22 京东方科技集团股份有限公司 加速度传感器、电容检测电路、加速度处理电路及方法
FR3115112B1 (fr) * 2020-10-12 2023-06-16 Commissariat Energie Atomique dispositif de condensateur à surface variable, accéléromètre et gyromètre micromécaniques comprenant un tel dispositif
RU203772U1 (ru) * 2021-01-27 2021-04-21 Федеральное государственное автономное образовательное учреждение высшего образования "Национальный исследовательский университет "Московский институт электронной техники" Чувствительный элемент микромеханического датчика
CN113203939B (zh) * 2021-04-26 2022-03-18 中国科学院地质与地球物理研究所 一种mems加速度传感器芯片的检测方法及装置
CN113523836A (zh) * 2021-06-10 2021-10-22 上海铂世光半导体科技有限公司 一种耐磨导电金刚石定位器
CN114392146B (zh) * 2021-12-07 2023-11-28 奥佳华智能健康科技集团股份有限公司 一种按摩椅4d按摩机芯和按摩椅
DE102022211858A1 (de) 2022-11-09 2024-05-16 Robert Bosch Gesellschaft mit beschränkter Haftung Verbesserte Sensoranordnung mit kompensierenden Elektroden

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SU1226014A1 (ru) * 1984-04-11 1986-04-23 Куйбышевский Ордена Трудового Красного Знамени Авиационный Институт Им.Акад.С.П.Королева Индуктивно-емкостный преобразователь перемещени
JPS62235504A (ja) * 1986-04-04 1987-10-15 Mitsutoyo Corp 容量型位置測定トランスデユ−サ
US4945773A (en) * 1989-03-06 1990-08-07 Ford Motor Company Force transducer etched from silicon
CH685214A5 (fr) * 1991-10-15 1995-04-28 Hans Ulrich Meyer Capteur capacitif de position.
EP0618450A1 (de) * 1993-03-30 1994-10-05 Siemens Aktiengesellschaft Beschleunigungssensor
CH689190A5 (fr) * 1993-10-19 1998-11-30 Hans Ulrich Meyer Instrument de mesure de longueurs ou d'angles.
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EP0836076B1 (fr) * 1996-10-11 2002-05-22 Brown & Sharpe Tesa S.A. Dispositif de mesure de dimension capacitif
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KR100541009B1 (ko) * 2000-11-30 2006-01-10 니타 가부시키가이샤 정전용량식 센서
US6504385B2 (en) * 2001-05-31 2003-01-07 Hewlett-Pakcard Company Three-axis motion sensor
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US7484411B2 (en) * 2007-01-30 2009-02-03 Hewlett-Packard Development Company, L.P. Three phase capacitance-based sensing and actuation
US7570066B2 (en) * 2007-11-01 2009-08-04 Seagate Technology Llc Simultaneous detection of in-plane and out-of-plane position displacement with capacitive sensors

Also Published As

Publication number Publication date
CN102047126B (zh) 2013-01-16
RU2469336C2 (ru) 2012-12-10
BRPI0822112A2 (pt) 2015-06-23
BRPI0822112B1 (pt) 2018-12-04
RU2010143549A (ru) 2012-05-10
US20110018561A1 (en) 2011-01-27
WO2009120193A1 (en) 2009-10-01
EP2257821A4 (en) 2012-01-11
EP2257821B1 (en) 2012-10-24
CN102047126A (zh) 2011-05-04
EP2257821A1 (en) 2010-12-08

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Legal Events

Date Code Title Description
B06A Patent application procedure suspended [chapter 6.1 patent gazette]
B09A Decision: intention to grant [chapter 9.1 patent gazette]
B16A Patent or certificate of addition of invention granted [chapter 16.1 patent gazette]

Free format text: PRAZO DE VALIDADE: 10 (DEZ) ANOS CONTADOS A PARTIR DE 04/12/2018, OBSERVADAS AS CONDICOES LEGAIS.

B21F Lapse acc. art. 78, item iv - on non-payment of the annual fees in time

Free format text: REFERENTE A 13A ANUIDADE.

B24J Lapse because of non-payment of annual fees (definitively: art 78 iv lpi, resolution 113/2013 art. 12)

Free format text: EM VIRTUDE DA EXTINCAO PUBLICADA NA RPI 2622 DE 06-04-2021 E CONSIDERANDO AUSENCIA DE MANIFESTACAO DENTRO DOS PRAZOS LEGAIS, INFORMO QUE CABE SER MANTIDA A EXTINCAO DA PATENTE E SEUS CERTIFICADOS, CONFORME O DISPOSTO NO ARTIGO 12, DA RESOLUCAO 113/2013.