BRPI0503888A - processos de fabricação de moduladores interferométricos por remoção seletiva de um material - Google Patents
processos de fabricação de moduladores interferométricos por remoção seletiva de um materialInfo
- Publication number
- BRPI0503888A BRPI0503888A BRPI0503888-0A BRPI0503888A BRPI0503888A BR PI0503888 A BRPI0503888 A BR PI0503888A BR PI0503888 A BRPI0503888 A BR PI0503888A BR PI0503888 A BRPI0503888 A BR PI0503888A
- Authority
- BR
- Brazil
- Prior art keywords
- selective removal
- interferometric modulators
- manufacturing processes
- interferometric modulator
- methods
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
- B81C1/00555—Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity
- B81C1/00595—Control etch selectivity
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/21—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour by interference
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/047—Optical MEMS not provided for in B81B2201/042 - B81B2201/045
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Geometry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
"PROCESSOS DE FABRICAçãO DE MODULADORES INTERFEROMéTRICOS POR REMOçãO SELETIVA DE UM MATERIAL". Métodos para produção de dispositivos MEMS, tais como moduladores interferométricos, envolvem a remoção seletiva de uma porção de sacrifício de um material, para formar uma cavidade interna, deixando ficar uma porção remanescente do material, para formar uma estrutura de haste. O material pode ser depositado como cobertura e alterado seletivamente, para definir as, porções de sacrifício, que são removíveis seletivamente relativas às porções remanescentes. Alternativamente, uma camada de material pode ser removida lateralmente das aberturas em uma camada de cobertura. Esses métodos podem ser usados para produzir moduladores interferométricos não liberados e liberados.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US61340104P | 2004-09-27 | 2004-09-27 | |
US11/090,552 US7420728B2 (en) | 2004-09-27 | 2005-03-25 | Methods of fabricating interferometric modulators by selectively removing a material |
US11/090,778 US7429334B2 (en) | 2004-09-27 | 2005-03-25 | Methods of fabricating interferometric modulators by selectively removing a material |
Publications (1)
Publication Number | Publication Date |
---|---|
BRPI0503888A true BRPI0503888A (pt) | 2006-05-09 |
Family
ID=35197990
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BRPI0503945-2A BRPI0503945A (pt) | 2004-09-27 | 2005-09-27 | métodos para fabricação de moduladores interferométricos por remoção seletiva de um material |
BRPI0503888-0A BRPI0503888A (pt) | 2004-09-27 | 2005-09-27 | processos de fabricação de moduladores interferométricos por remoção seletiva de um material |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BRPI0503945-2A BRPI0503945A (pt) | 2004-09-27 | 2005-09-27 | métodos para fabricação de moduladores interferométricos por remoção seletiva de um material |
Country Status (7)
Country | Link |
---|---|
EP (2) | EP1640317A2 (pt) |
JP (2) | JP4394626B2 (pt) |
KR (2) | KR20060092912A (pt) |
AU (2) | AU2005211604A1 (pt) |
BR (2) | BRPI0503945A (pt) |
CA (2) | CA2520623A1 (pt) |
SG (2) | SG121160A1 (pt) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7835061B2 (en) | 2006-06-28 | 2010-11-16 | Qualcomm Mems Technologies, Inc. | Support structures for free-standing electromechanical devices |
US7385744B2 (en) * | 2006-06-28 | 2008-06-10 | Qualcomm Mems Technologies, Inc. | Support structure for free-standing MEMS device and methods for forming the same |
US7566664B2 (en) * | 2006-08-02 | 2009-07-28 | Qualcomm Mems Technologies, Inc. | Selective etching of MEMS using gaseous halides and reactive co-etchants |
JP2010525379A (ja) * | 2007-04-04 | 2010-07-22 | クォルコム・メムズ・テクノロジーズ・インコーポレーテッド | 犠牲層における界面改変によるリリースエッチアタックの排除 |
US7719752B2 (en) | 2007-05-11 | 2010-05-18 | Qualcomm Mems Technologies, Inc. | MEMS structures, methods of fabricating MEMS components on separate substrates and assembly of same |
US7773286B2 (en) * | 2007-09-14 | 2010-08-10 | Qualcomm Mems Technologies, Inc. | Periodic dimple array |
US7848003B2 (en) | 2007-09-17 | 2010-12-07 | Qualcomm Mems Technologies, Inc. | Semi-transparent/transflective lighted interferometric devices |
US8058549B2 (en) | 2007-10-19 | 2011-11-15 | Qualcomm Mems Technologies, Inc. | Photovoltaic devices with integrated color interferometric film stacks |
WO2009052324A2 (en) | 2007-10-19 | 2009-04-23 | Qualcomm Mems Technologies, Inc. | Display with integrated photovoltaic device |
JP5513813B2 (ja) * | 2009-08-31 | 2014-06-04 | 新日本無線株式会社 | Memsマイクロフォンおよびその製造方法 |
EP2327659B1 (en) * | 2009-11-30 | 2018-07-11 | IMEC vzw | Method of manufacturing a semiconductor device and semiconductor devices resulting therefrom |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7460291B2 (en) | 1994-05-05 | 2008-12-02 | Idc, Llc | Separable modulator |
-
2005
- 2005-09-14 EP EP05255694A patent/EP1640317A2/en not_active Withdrawn
- 2005-09-14 EP EP05255695A patent/EP1640318A2/en not_active Withdrawn
- 2005-09-20 AU AU2005211604A patent/AU2005211604A1/en not_active Abandoned
- 2005-09-20 AU AU2005211603A patent/AU2005211603A1/en not_active Abandoned
- 2005-09-21 CA CA002520623A patent/CA2520623A1/en not_active Abandoned
- 2005-09-21 CA CA002520374A patent/CA2520374A1/en not_active Abandoned
- 2005-09-21 SG SG200506079A patent/SG121160A1/en unknown
- 2005-09-21 SG SG200506085A patent/SG121161A1/en unknown
- 2005-09-22 JP JP2005275060A patent/JP4394626B2/ja not_active Expired - Fee Related
- 2005-09-22 JP JP2005275059A patent/JP4422665B2/ja not_active Expired - Fee Related
- 2005-09-27 KR KR1020050089756A patent/KR20060092912A/ko not_active Application Discontinuation
- 2005-09-27 KR KR1020050089757A patent/KR20060092913A/ko not_active Application Discontinuation
- 2005-09-27 BR BRPI0503945-2A patent/BRPI0503945A/pt not_active Application Discontinuation
- 2005-09-27 BR BRPI0503888-0A patent/BRPI0503888A/pt not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
SG121161A1 (en) | 2006-04-26 |
CA2520374A1 (en) | 2006-03-27 |
KR20060092913A (ko) | 2006-08-23 |
JP2006099112A (ja) | 2006-04-13 |
JP2006106733A (ja) | 2006-04-20 |
JP4394626B2 (ja) | 2010-01-06 |
AU2005211604A1 (en) | 2006-04-13 |
JP4422665B2 (ja) | 2010-02-24 |
KR20060092912A (ko) | 2006-08-23 |
EP1640317A2 (en) | 2006-03-29 |
SG121160A1 (en) | 2006-04-26 |
CA2520623A1 (en) | 2006-03-27 |
AU2005211603A1 (en) | 2006-04-13 |
EP1640318A2 (en) | 2006-03-29 |
BRPI0503945A (pt) | 2006-05-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
B11A | Dismissal acc. art.33 of ipl - examination not requested within 36 months of filing | ||
B11Y | Definitive dismissal acc. article 33 of ipl - extension of time limit for request of examination expired |