BR112022015536A2 - Formulação para um agente de pré-textura, formulação para um agente de gravação, e formulação para uma formulação de decapagem fotorresistente - Google Patents
Formulação para um agente de pré-textura, formulação para um agente de gravação, e formulação para uma formulação de decapagem fotorresistenteInfo
- Publication number
- BR112022015536A2 BR112022015536A2 BR112022015536A BR112022015536A BR112022015536A2 BR 112022015536 A2 BR112022015536 A2 BR 112022015536A2 BR 112022015536 A BR112022015536 A BR 112022015536A BR 112022015536 A BR112022015536 A BR 112022015536A BR 112022015536 A2 BR112022015536 A2 BR 112022015536A2
- Authority
- BR
- Brazil
- Prior art keywords
- formulation
- agent
- etching
- photoresistant
- embossing
- Prior art date
Links
- 238000009472 formulation Methods 0.000 title abstract 8
- 239000000203 mixture Substances 0.000 title abstract 8
- 238000005530 etching Methods 0.000 title abstract 3
- 238000004049 embossing Methods 0.000 title abstract 2
- 239000003795 chemical substances by application Substances 0.000 abstract 5
- 239000004094 surface-active agent Substances 0.000 abstract 3
- 150000001413 amino acids Chemical class 0.000 abstract 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
- C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
- C09K13/06—Etching, surface-brightening or pickling compositions containing an inorganic acid with organic material
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/0834—Compounds having one or more O-Si linkage
- C07F7/0838—Compounds with one or more Si-O-Si sequences
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K13/00—Etching, surface-brightening or pickling compositions
- C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
- C09K13/08—Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K23/00—Use of substances as emulsifying, wetting, dispersing, or foam-producing agents
- C09K23/54—Silicon compounds
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D1/00—Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
- C11D1/38—Cationic compounds
- C11D1/52—Carboxylic amides, alkylolamides or imides or their condensation products with alkylene oxides
- C11D1/528—Carboxylic amides (R1-CO-NR2R3), where at least one of the chains R1, R2 or R3 is interrupted by a functional group, e.g. a -NH-, -NR-, -CO-, or -CON- group
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/20—Organic compounds containing oxygen
- C11D3/2003—Alcohols; Phenols
- C11D3/2065—Polyhydric alcohols
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D3/00—Other compounding ingredients of detergent compositions covered in group C11D1/00
- C11D3/16—Organic compounds
- C11D3/34—Organic compounds containing sulfur
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0041—Photosensitive materials providing an etching agent upon exposure
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/426—Stripping or agents therefor using liquids only containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02363—Special surface textures of the semiconductor body itself, e.g. textured active layers
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Wood Science & Technology (AREA)
- Computer Hardware Design (AREA)
- Electromagnetism (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Health & Medical Sciences (AREA)
- Emergency Medicine (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Detergent Compositions (AREA)
- Weting (AREA)
- Emulsifying, Dispersing, Foam-Producing Or Wetting Agents (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
FORMULAÇÃO PARA UM AGENTE DE PRÉ-TEXTURA, FORMULAÇÃO PARA UM AGENTE DE GRAVAÇÃO, E FORMULAÇÃO PARA UMA FORMULAÇÃO DE DECAPAGEM FOTORRESISTENTE. Agentes de pré-texturização, agentes de gravação e agentes de decapagem fotorresistentes podem ser formulados para incluir um ou mais tensoativos, de uma ou mais classes de tensoativos, tais como derivados de siloxano de aminoácidos que têm propriedades tensoativas.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US202062970356P | 2020-02-05 | 2020-02-05 | |
PCT/US2020/066031 WO2021158301A1 (en) | 2020-02-05 | 2020-12-18 | Surfactants for electronics |
Publications (1)
Publication Number | Publication Date |
---|---|
BR112022015536A2 true BR112022015536A2 (pt) | 2022-10-04 |
Family
ID=74186950
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BR112022015536A BR112022015536A2 (pt) | 2020-02-05 | 2020-12-18 | Formulação para um agente de pré-textura, formulação para um agente de gravação, e formulação para uma formulação de decapagem fotorresistente |
Country Status (11)
Country | Link |
---|---|
US (2) | US11427760B2 (pt) |
EP (1) | EP4101009B1 (pt) |
JP (1) | JP2023513523A (pt) |
KR (1) | KR20220137703A (pt) |
CN (1) | CN115428169A (pt) |
AU (1) | AU2020427412B2 (pt) |
BR (1) | BR112022015536A2 (pt) |
CA (1) | CA3165634A1 (pt) |
DK (1) | DK4101009T3 (pt) |
MX (1) | MX2022009562A (pt) |
WO (1) | WO2021158301A1 (pt) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20220045042A (ko) * | 2019-08-22 | 2022-04-12 | 어드밴식스 레진즈 앤드 케미컬즈 엘엘씨 | 표면-활성 특성을 갖는 아미노산의 실록산 유도체 |
US11905304B2 (en) | 2019-12-19 | 2024-02-20 | Advansix Resins & Chemicals Llc | Surfactants for agricultural products |
AU2020408132B2 (en) | 2019-12-19 | 2024-02-29 | Advansix Resins & Chemicals Llc | Surfactants for use in personal care and cosmetic products |
MY196955A (en) | 2019-12-20 | 2023-05-12 | Advansix Resins & Chemicals Llc | Surfactants for use in healthcare products |
KR20220117910A (ko) | 2019-12-20 | 2022-08-24 | 어드밴식스 레진즈 앤드 케미컬즈 엘엘씨 | 클리닝 제품용 계면활성제 |
MX2022008077A (es) | 2019-12-31 | 2022-07-11 | Advansix Resins & Chemicals Llc | Tensioactivos para produccion de petroleo y gas. |
US11427760B2 (en) * | 2020-02-05 | 2022-08-30 | Advansix Resins & Chemicals Llc | Surfactants for electronics |
Family Cites Families (47)
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US3624120A (en) | 1969-12-22 | 1971-11-30 | Procter & Gamble | Quaternary ammonium salts of cyclic siloxane polymers |
AT330930B (de) | 1973-04-13 | 1976-07-26 | Henkel & Cie Gmbh | Verfahren zur herstellung von festen, schuttfahigen wasch- oder reinigungsmitteln mit einem gehalt an calcium bindenden substanzen |
US4605509A (en) | 1973-05-11 | 1986-08-12 | The Procter & Gamble Company | Detergent compositions containing sodium aluminosilicate builders |
DE2433485A1 (de) | 1973-07-16 | 1975-02-06 | Procter & Gamble | Zur verwendung in waschmitteln geeignete aluminosilikat-ionenaustauscher |
US3929678A (en) | 1974-08-01 | 1975-12-30 | Procter & Gamble | Detergent composition having enhanced particulate soil removal performance |
DE3413571A1 (de) | 1984-04-11 | 1985-10-24 | Hoechst Ag, 6230 Frankfurt | Verwendung von kristallinen schichtfoermigen natriumsilikaten zur wasserenthaertung und verfahren zur wasserenthaertung |
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US6521580B2 (en) | 2000-02-22 | 2003-02-18 | General Electric Company | Siloxane dry cleaning composition and process |
US20100063310A1 (en) | 2004-07-02 | 2010-03-11 | Knepper Jeffrey A | Functionalized silicon compounds |
US7632796B2 (en) | 2005-10-28 | 2009-12-15 | Dynaloy, Llc | Dynamic multi-purpose composition for the removal of photoresists and method for its use |
WO2007056424A2 (en) | 2005-11-07 | 2007-05-18 | Penwest Pharmaceuticals, Co. | Controlled-release emulsion compositions |
DE102005056620A1 (de) | 2005-11-25 | 2007-06-06 | Merck Patent Gmbh | Amphiphile Silane |
US7622512B2 (en) | 2005-12-21 | 2009-11-24 | Bausch & Lomb Incorporated | Cationic hydrophilic siloxanyl monomers |
GB0611217D0 (en) | 2006-06-08 | 2006-07-19 | Dow Corning | Amino-acid functional siloxanes,methods of preparation and applications |
US20080152540A1 (en) | 2006-12-22 | 2008-06-26 | Bausch & Lomb Incorporated | Packaging solutions |
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JP5760921B2 (ja) | 2010-10-14 | 2015-08-12 | 信越化学工業株式会社 | アミノ酸変性オルガノポリシロキサンの製造方法 |
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FI127433B (fi) | 2011-06-14 | 2018-05-31 | Pibond Oy | Menetelmä siloksaanimonomeerien syntetisoimiseksi sekä näiden käyttö |
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US10053619B2 (en) | 2013-03-14 | 2018-08-21 | Flotek Chemistry, Llc | Siloxane surfactant additives for oil and gas applications |
DE102013106906A1 (de) * | 2013-07-01 | 2015-01-08 | Evonik Industries Ag | Siloxan-Polymere mit zentralem Polysiloxan-Polymerblock mit terminalen organofunktionellen Resten umfassend Harnstoff- und/oder Carbamat-Gruppen sowie Aminosäure-Reste |
CN105518834B (zh) | 2013-09-19 | 2018-02-16 | 摄津制油株式会社 | 半导体基板用蚀刻液 |
KR20150108143A (ko) * | 2014-03-17 | 2015-09-25 | 동우 화인켐 주식회사 | 결정성 실리콘 웨이퍼의 텍스쳐 에칭액 조성물 및 텍스쳐 에칭방법 |
CN104826140B (zh) | 2015-04-08 | 2018-07-03 | 中山大学 | 一种载药硅脂质超声造影剂的制备方法和应用 |
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JP2017105753A (ja) | 2015-12-04 | 2017-06-15 | 信越化学工業株式会社 | 両末端に異なる官能基を有する直鎖オルガノポリシロキサン、及びその製造方法 |
US10829718B2 (en) | 2016-04-27 | 2020-11-10 | Dow Silicones Corporation | Detergent composition comprising a carbinol functional trisiloxane |
US10577533B2 (en) | 2016-08-28 | 2020-03-03 | Linde Aktiengesellschaft | Unconventional enhanced oil recovery |
JP6990982B2 (ja) | 2017-04-10 | 2022-01-12 | 信越化学工業株式会社 | ポリシロキサンモノマー及びその製造方法 |
JP6803304B2 (ja) | 2017-08-01 | 2020-12-23 | 信越化学工業株式会社 | シロキサン化合物及びその製造方法 |
CN107522726A (zh) | 2017-09-13 | 2017-12-29 | 常熟理工学院 | 一种氨基酸改性三硅氧烷表面活性剂及其制备方法 |
CN107497365A (zh) | 2017-09-13 | 2017-12-22 | 常熟理工学院 | 一种Gemini型氨基酸改性有机硅表面活性剂及其制备方法 |
CN107602862A (zh) | 2017-09-13 | 2018-01-19 | 常熟理工学院 | 一种氨基酸改性聚硅氧烷表面活性剂及其制备方法 |
CN107698615A (zh) | 2017-09-13 | 2018-02-16 | 常熟理工学院 | 一种氨基酸改性四硅氧烷表面活性剂及其制备方法 |
KR20220045042A (ko) | 2019-08-22 | 2022-04-12 | 어드밴식스 레진즈 앤드 케미컬즈 엘엘씨 | 표면-활성 특성을 갖는 아미노산의 실록산 유도체 |
US11905304B2 (en) | 2019-12-19 | 2024-02-20 | Advansix Resins & Chemicals Llc | Surfactants for agricultural products |
US20210187460A1 (en) | 2019-12-19 | 2021-06-24 | Advansix Resins & Chemicals Llc | Surfactants for inks, paints, and adhesives |
AU2020408132B2 (en) | 2019-12-19 | 2024-02-29 | Advansix Resins & Chemicals Llc | Surfactants for use in personal care and cosmetic products |
KR20220117910A (ko) | 2019-12-20 | 2022-08-24 | 어드밴식스 레진즈 앤드 케미컬즈 엘엘씨 | 클리닝 제품용 계면활성제 |
MY196955A (en) | 2019-12-20 | 2023-05-12 | Advansix Resins & Chemicals Llc | Surfactants for use in healthcare products |
MX2022008077A (es) * | 2019-12-31 | 2022-07-11 | Advansix Resins & Chemicals Llc | Tensioactivos para produccion de petroleo y gas. |
US11427760B2 (en) * | 2020-02-05 | 2022-08-30 | Advansix Resins & Chemicals Llc | Surfactants for electronics |
-
2020
- 2020-12-18 US US17/127,048 patent/US11427760B2/en active Active
- 2020-12-18 JP JP2022547839A patent/JP2023513523A/ja active Pending
- 2020-12-18 AU AU2020427412A patent/AU2020427412B2/en active Active
- 2020-12-18 MX MX2022009562A patent/MX2022009562A/es unknown
- 2020-12-18 DK DK20842490.3T patent/DK4101009T3/da active
- 2020-12-18 EP EP20842490.3A patent/EP4101009B1/en active Active
- 2020-12-18 WO PCT/US2020/066031 patent/WO2021158301A1/en unknown
- 2020-12-18 CN CN202080099375.1A patent/CN115428169A/zh active Pending
- 2020-12-18 BR BR112022015536A patent/BR112022015536A2/pt unknown
- 2020-12-18 CA CA3165634A patent/CA3165634A1/en active Pending
- 2020-12-18 KR KR1020227030448A patent/KR20220137703A/ko unknown
-
2022
- 2022-07-22 US US17/871,208 patent/US11999890B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
MX2022009562A (es) | 2022-09-09 |
AU2020427412B2 (en) | 2024-04-04 |
WO2021158301A1 (en) | 2021-08-12 |
US20220380669A1 (en) | 2022-12-01 |
KR20220137703A (ko) | 2022-10-12 |
CA3165634A1 (en) | 2021-08-12 |
US20210238479A1 (en) | 2021-08-05 |
DK4101009T3 (da) | 2024-06-10 |
US11427760B2 (en) | 2022-08-30 |
CN115428169A (zh) | 2022-12-02 |
US11999890B2 (en) | 2024-06-04 |
JP2023513523A (ja) | 2023-03-31 |
AU2020427412A1 (en) | 2022-09-22 |
EP4101009A1 (en) | 2022-12-14 |
EP4101009B1 (en) | 2024-04-17 |
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