BR112022015536A2 - Formulação para um agente de pré-textura, formulação para um agente de gravação, e formulação para uma formulação de decapagem fotorresistente - Google Patents

Formulação para um agente de pré-textura, formulação para um agente de gravação, e formulação para uma formulação de decapagem fotorresistente

Info

Publication number
BR112022015536A2
BR112022015536A2 BR112022015536A BR112022015536A BR112022015536A2 BR 112022015536 A2 BR112022015536 A2 BR 112022015536A2 BR 112022015536 A BR112022015536 A BR 112022015536A BR 112022015536 A BR112022015536 A BR 112022015536A BR 112022015536 A2 BR112022015536 A2 BR 112022015536A2
Authority
BR
Brazil
Prior art keywords
formulation
agent
etching
photoresistant
embossing
Prior art date
Application number
BR112022015536A
Other languages
English (en)
Inventor
Asirvatham Edward
Original Assignee
Advansix Resins & Chemicals Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advansix Resins & Chemicals Llc filed Critical Advansix Resins & Chemicals Llc
Publication of BR112022015536A2 publication Critical patent/BR112022015536A2/pt

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00Etching, surface-brightening or pickling compositions
    • C09K13/04Etching, surface-brightening or pickling compositions containing an inorganic acid
    • C09K13/06Etching, surface-brightening or pickling compositions containing an inorganic acid with organic material
    • CCHEMISTRY; METALLURGY
    • C07ORGANIC CHEMISTRY
    • C07FACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F7/00Compounds containing elements of Groups 4 or 14 of the Periodic Table
    • C07F7/02Silicon compounds
    • C07F7/08Compounds having one or more C—Si linkages
    • C07F7/0834Compounds having one or more O-Si linkage
    • C07F7/0838Compounds with one or more Si-O-Si sequences
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00Etching, surface-brightening or pickling compositions
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00Etching, surface-brightening or pickling compositions
    • C09K13/04Etching, surface-brightening or pickling compositions containing an inorganic acid
    • C09K13/08Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K23/00Use of substances as emulsifying, wetting, dispersing, or foam-producing agents
    • C09K23/54Silicon compounds
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D1/00Detergent compositions based essentially on surface-active compounds; Use of these compounds as a detergent
    • C11D1/38Cationic compounds
    • C11D1/52Carboxylic amides, alkylolamides or imides or their condensation products with alkylene oxides
    • C11D1/528Carboxylic amides (R1-CO-NR2R3), where at least one of the chains R1, R2 or R3 is interrupted by a functional group, e.g. a -NH-, -NR-, -CO-, or -CON- group
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16Organic compounds
    • C11D3/20Organic compounds containing oxygen
    • C11D3/2003Alcohols; Phenols
    • C11D3/2065Polyhydric alcohols
    • CCHEMISTRY; METALLURGY
    • C11ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11DDETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D3/00Other compounding ingredients of detergent compositions covered in group C11D1/00
    • C11D3/16Organic compounds
    • C11D3/34Organic compounds containing sulfur
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0041Photosensitive materials providing an etching agent upon exposure
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/42Stripping or agents therefor
    • G03F7/422Stripping or agents therefor using liquids only
    • G03F7/425Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26Processing photosensitive materials; Apparatus therefor
    • G03F7/42Stripping or agents therefor
    • G03F7/422Stripping or agents therefor using liquids only
    • G03F7/426Stripping or agents therefor using liquids only containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0236Special surface textures
    • H01L31/02363Special surface textures of the semiconductor body itself, e.g. textured active layers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Wood Science & Technology (AREA)
  • Computer Hardware Design (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Health & Medical Sciences (AREA)
  • Emergency Medicine (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Detergent Compositions (AREA)
  • Weting (AREA)
  • Emulsifying, Dispersing, Foam-Producing Or Wetting Agents (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

FORMULAÇÃO PARA UM AGENTE DE PRÉ-TEXTURA, FORMULAÇÃO PARA UM AGENTE DE GRAVAÇÃO, E FORMULAÇÃO PARA UMA FORMULAÇÃO DE DECAPAGEM FOTORRESISTENTE. Agentes de pré-texturização, agentes de gravação e agentes de decapagem fotorresistentes podem ser formulados para incluir um ou mais tensoativos, de uma ou mais classes de tensoativos, tais como derivados de siloxano de aminoácidos que têm propriedades tensoativas.
BR112022015536A 2020-02-05 2020-12-18 Formulação para um agente de pré-textura, formulação para um agente de gravação, e formulação para uma formulação de decapagem fotorresistente BR112022015536A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US202062970356P 2020-02-05 2020-02-05
PCT/US2020/066031 WO2021158301A1 (en) 2020-02-05 2020-12-18 Surfactants for electronics

Publications (1)

Publication Number Publication Date
BR112022015536A2 true BR112022015536A2 (pt) 2022-10-04

Family

ID=74186950

Family Applications (1)

Application Number Title Priority Date Filing Date
BR112022015536A BR112022015536A2 (pt) 2020-02-05 2020-12-18 Formulação para um agente de pré-textura, formulação para um agente de gravação, e formulação para uma formulação de decapagem fotorresistente

Country Status (11)

Country Link
US (2) US11427760B2 (pt)
EP (1) EP4101009B1 (pt)
JP (1) JP2023513523A (pt)
KR (1) KR20220137703A (pt)
CN (1) CN115428169A (pt)
AU (1) AU2020427412B2 (pt)
BR (1) BR112022015536A2 (pt)
CA (1) CA3165634A1 (pt)
DK (1) DK4101009T3 (pt)
MX (1) MX2022009562A (pt)
WO (1) WO2021158301A1 (pt)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220045042A (ko) * 2019-08-22 2022-04-12 어드밴식스 레진즈 앤드 케미컬즈 엘엘씨 표면-활성 특성을 갖는 아미노산의 실록산 유도체
US11905304B2 (en) 2019-12-19 2024-02-20 Advansix Resins & Chemicals Llc Surfactants for agricultural products
AU2020408132B2 (en) 2019-12-19 2024-02-29 Advansix Resins & Chemicals Llc Surfactants for use in personal care and cosmetic products
MY196955A (en) 2019-12-20 2023-05-12 Advansix Resins & Chemicals Llc Surfactants for use in healthcare products
KR20220117910A (ko) 2019-12-20 2022-08-24 어드밴식스 레진즈 앤드 케미컬즈 엘엘씨 클리닝 제품용 계면활성제
MX2022008077A (es) 2019-12-31 2022-07-11 Advansix Resins & Chemicals Llc Tensioactivos para produccion de petroleo y gas.
US11427760B2 (en) * 2020-02-05 2022-08-30 Advansix Resins & Chemicals Llc Surfactants for electronics

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US11905304B2 (en) 2019-12-19 2024-02-20 Advansix Resins & Chemicals Llc Surfactants for agricultural products
US20210187460A1 (en) 2019-12-19 2021-06-24 Advansix Resins & Chemicals Llc Surfactants for inks, paints, and adhesives
AU2020408132B2 (en) 2019-12-19 2024-02-29 Advansix Resins & Chemicals Llc Surfactants for use in personal care and cosmetic products
KR20220117910A (ko) 2019-12-20 2022-08-24 어드밴식스 레진즈 앤드 케미컬즈 엘엘씨 클리닝 제품용 계면활성제
MY196955A (en) 2019-12-20 2023-05-12 Advansix Resins & Chemicals Llc Surfactants for use in healthcare products
MX2022008077A (es) * 2019-12-31 2022-07-11 Advansix Resins & Chemicals Llc Tensioactivos para produccion de petroleo y gas.
US11427760B2 (en) * 2020-02-05 2022-08-30 Advansix Resins & Chemicals Llc Surfactants for electronics

Also Published As

Publication number Publication date
MX2022009562A (es) 2022-09-09
AU2020427412B2 (en) 2024-04-04
WO2021158301A1 (en) 2021-08-12
US20220380669A1 (en) 2022-12-01
KR20220137703A (ko) 2022-10-12
CA3165634A1 (en) 2021-08-12
US20210238479A1 (en) 2021-08-05
DK4101009T3 (da) 2024-06-10
US11427760B2 (en) 2022-08-30
CN115428169A (zh) 2022-12-02
US11999890B2 (en) 2024-06-04
JP2023513523A (ja) 2023-03-31
AU2020427412A1 (en) 2022-09-22
EP4101009A1 (en) 2022-12-14
EP4101009B1 (en) 2024-04-17

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