BR112014012376A2 - sistema hf, dispositivo de acoplamento de sinal e processo para operação de um dispositivo hf - Google Patents
sistema hf, dispositivo de acoplamento de sinal e processo para operação de um dispositivo hfInfo
- Publication number
- BR112014012376A2 BR112014012376A2 BR112014012376A BR112014012376A BR112014012376A2 BR 112014012376 A2 BR112014012376 A2 BR 112014012376A2 BR 112014012376 A BR112014012376 A BR 112014012376A BR 112014012376 A BR112014012376 A BR 112014012376A BR 112014012376 A2 BR112014012376 A2 BR 112014012376A2
- Authority
- BR
- Brazil
- Prior art keywords
- signal
- operating
- oscillator
- producing
- signal coupling
- Prior art date
Links
- 230000008878 coupling Effects 0.000 title abstract 3
- 238000010168 coupling process Methods 0.000 title abstract 3
- 238000005859 coupling reaction Methods 0.000 title abstract 3
- 238000000034 method Methods 0.000 title abstract 2
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B47/00—Circuit arrangements for operating light sources in general, i.e. where the type of light source is not relevant
- H05B47/10—Controlling the light source
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/32174—Circuits specially adapted for controlling the RF discharge
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03L—AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES
- H03L7/00—Automatic control of frequency or phase; Synchronisation
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B41/00—Circuit arrangements or apparatus for igniting or operating discharge lamps
- H05B41/14—Circuit arrangements
- H05B41/24—Circuit arrangements in which the lamp is fed by high frequency ac, or with separate oscillator frequency
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B20/00—Energy efficient lighting technologies, e.g. halogen lamps or gas discharge lamps
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Plasma Technology (AREA)
- Circuit Arrangements For Discharge Lamps (AREA)
- Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
- Input Circuits Of Receivers And Coupling Of Receivers And Audio Equipment (AREA)
- Circuits Of Receivers In General (AREA)
Abstract
resumo sistema hf, dispositivo de acoplamento de sinal e processo para operação de um dispositivo hf é proposto um sistema hf (1) compreendendo um dispositivo hf (5), particularmente uma lâmpada hf, uma vela de ignição hf ou aplicação de plasma hf similar, assim como um dispositivo de acoplamento de sinal (3) para operação do dispositivo hf (5). o sistema hf apresenta um oscilador (7) para a produção de um sinal hf para operação do dispositivo hf (5). o sistema hf se caracteriza por um meio (15) para produção de um sinal de tensão proporcional (uprop) ao grau de ajuste do dispositivo hf (5) com base no sinal hf produzido pelo oscilador (7) e de um sinal hf refletido pelo dispositivo hf, e um dispositivo preferivelmente sem microprocessador (27) para produção de um sinal de regulagem (ua) para ajuste da frequência de saída do oscilador (7) com base no sinal de tensão proporcional (uprop) ao grau de ajuste do dispositivo hf (5). 1/1
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102011055624A DE102011055624A1 (de) | 2011-11-23 | 2011-11-23 | HF-System |
PCT/EP2012/073292 WO2013076174A1 (de) | 2011-11-23 | 2012-11-22 | Hf-system für eine hochfrequenzlampe |
Publications (1)
Publication Number | Publication Date |
---|---|
BR112014012376A2 true BR112014012376A2 (pt) | 2017-05-30 |
Family
ID=47326082
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BR112014012376A BR112014012376A2 (pt) | 2011-11-23 | 2012-11-22 | sistema hf, dispositivo de acoplamento de sinal e processo para operação de um dispositivo hf |
Country Status (14)
Country | Link |
---|---|
US (1) | US9155164B2 (pt) |
EP (2) | EP2783553B1 (pt) |
JP (1) | JP2014533879A (pt) |
KR (1) | KR20140096149A (pt) |
CN (1) | CN103947298A (pt) |
BR (1) | BR112014012376A2 (pt) |
CA (1) | CA2854589A1 (pt) |
DE (1) | DE102011055624A1 (pt) |
ES (1) | ES2942568T3 (pt) |
HK (1) | HK1199162A1 (pt) |
MX (1) | MX2014006111A (pt) |
RU (1) | RU2014118753A (pt) |
TW (1) | TW201338631A (pt) |
WO (1) | WO2013076174A1 (pt) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102013103670A1 (de) | 2013-04-11 | 2014-10-30 | Dritte Patentportfolio Beteiligungsgesellschaft Mbh & Co.Kg | HF-Lampe mit dielektrischem Wellenleiter |
DE102013226537B4 (de) | 2013-12-18 | 2022-12-29 | TRUMPF Hüttinger GmbH + Co. KG | Leistungsversorgungssystem mit mehreren Verstärkerpfaden sowie Verfahren zur Anregung eines Plasmas |
DE102013226511B4 (de) | 2013-12-18 | 2016-12-15 | TRUMPF Hüttinger GmbH + Co. KG | Leistungsversorgungssystem und Verfahren zur Erzeugung einer Leistung |
DE102016220349A1 (de) | 2016-10-18 | 2018-04-19 | Trumpf Schweiz Ag | Hochfrequenztreiberschaltung für eine akustooptische Komponente und Verfahren zum Betrieb einer HF-Treiberschaltung |
DE102017206132B3 (de) | 2017-04-10 | 2018-07-12 | TRUMPF Hüttinger GmbH + Co. KG | Verfahren zur Erzeugung einer Hochfrequenzleistung mit einer vorgegebenen Frequenz und Leistungswandler |
DE102017115438A1 (de) | 2017-06-06 | 2018-12-06 | Fricke Und Mallah Microwave Technology Gmbh | Vorrichtung zum erzeugen eines plasmastrahls im mhz- und ghzbereich mit tem- und hohlleitermoden |
EP3747241A1 (de) | 2018-02-02 | 2020-12-09 | Ionics SA | Atmosphärenplasmajet mit geradem kanülenrohr |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4044308A (en) * | 1976-09-20 | 1977-08-23 | Gte Sylvania Incorporated | Communication transmitting apparatus with carrier level control |
US4375051A (en) * | 1981-02-19 | 1983-02-22 | The Perkin-Elmer Corporation | Automatic impedance matching between source and load |
US5688357A (en) * | 1995-02-15 | 1997-11-18 | Applied Materials, Inc. | Automatic frequency tuning of an RF power source of an inductively coupled plasma reactor |
US6313587B1 (en) * | 1998-01-13 | 2001-11-06 | Fusion Lighting, Inc. | High frequency inductive lamp and power oscillator |
KR20020026528A (ko) * | 1999-07-02 | 2002-04-10 | 키플링 켄트 | 고휘도를 가진 고출력 램프 |
DE19934473A1 (de) * | 1999-07-27 | 2001-02-01 | Thomson Brandt Gmbh | Gerät zum Beschreiben optischer Aufzeichnungsträger |
JP2001284078A (ja) * | 2000-03-30 | 2001-10-12 | Toshiba Lighting & Technology Corp | 無電極放電ランプ装置 |
DE10243271A1 (de) * | 2002-09-18 | 2003-12-04 | Bosch Gmbh Robert | Vorrichtung zum Zünden eines Luft-Kraftstoff-Gemischs in einem Verbrennungsmotor |
US7263344B2 (en) * | 2002-10-15 | 2007-08-28 | Sirific Wireless Corporation | Method for reducing IM2 noise in a down conversion circuit |
US20060252283A1 (en) * | 2003-08-07 | 2006-11-09 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and sustrate processing method |
JP2006128075A (ja) * | 2004-10-01 | 2006-05-18 | Seiko Epson Corp | 高周波加熱装置、半導体製造装置および光源装置 |
JP4799947B2 (ja) * | 2005-02-25 | 2011-10-26 | 株式会社ダイヘン | 高周波電源装置および高周波電源の制御方法 |
WO2007126899A2 (en) * | 2006-03-28 | 2007-11-08 | Topanga Technologies | Coaxial waveguide electrodeless lamp |
US20100253231A1 (en) * | 2006-10-16 | 2010-10-07 | Devincentis Marc | Electrodeless plasma lamp systems and methods |
DE102007057581A1 (de) * | 2007-11-28 | 2009-06-04 | Fachhochschule Aachen | Hochfrequenzlampe und Verfahren zu deren Betrieb |
JP2009181771A (ja) * | 2008-01-30 | 2009-08-13 | Seiko Epson Corp | 光源装置、光源装置の発光制御方法、およびプロジェクタ |
WO2010080828A1 (en) * | 2009-01-06 | 2010-07-15 | Luxim Corporation | Low frequency electrodeless plasma lamp |
US8723531B2 (en) * | 2009-03-12 | 2014-05-13 | Sige Semiconductor, Inc. | Integrated VSWR detector for monolithic microwave integrated circuits |
US8670730B2 (en) * | 2011-08-24 | 2014-03-11 | Spectralux Corporation | Power efficient radio frequency transmitter |
US8878432B2 (en) * | 2012-08-20 | 2014-11-04 | Varian Medical Systems, Inc. | On board diagnosis of RF spectra in accelerators |
-
2011
- 2011-11-23 DE DE102011055624A patent/DE102011055624A1/de not_active Withdrawn
-
2012
- 2012-10-30 TW TW101140032A patent/TW201338631A/zh unknown
- 2012-11-22 BR BR112014012376A patent/BR112014012376A2/pt not_active IP Right Cessation
- 2012-11-22 EP EP12798646.1A patent/EP2783553B1/de active Active
- 2012-11-22 MX MX2014006111A patent/MX2014006111A/es not_active Application Discontinuation
- 2012-11-22 US US14/360,189 patent/US9155164B2/en active Active
- 2012-11-22 WO PCT/EP2012/073292 patent/WO2013076174A1/de active Application Filing
- 2012-11-22 CN CN201280056820.1A patent/CN103947298A/zh active Pending
- 2012-11-22 JP JP2014542819A patent/JP2014533879A/ja active Pending
- 2012-11-22 EP EP22216065.7A patent/EP4181628A1/de active Pending
- 2012-11-22 KR KR1020147017184A patent/KR20140096149A/ko not_active Application Discontinuation
- 2012-11-22 RU RU2014118753/07A patent/RU2014118753A/ru not_active Application Discontinuation
- 2012-11-22 CA CA2854589A patent/CA2854589A1/en not_active Abandoned
- 2012-11-22 ES ES12798646T patent/ES2942568T3/es active Active
-
2014
- 2014-12-11 HK HK14112477.1A patent/HK1199162A1/xx unknown
Also Published As
Publication number | Publication date |
---|---|
WO2013076174A1 (de) | 2013-05-30 |
TW201338631A (zh) | 2013-09-16 |
EP2783553A1 (de) | 2014-10-01 |
US20150115842A1 (en) | 2015-04-30 |
US9155164B2 (en) | 2015-10-06 |
DE102011055624A1 (de) | 2013-05-23 |
CA2854589A1 (en) | 2013-05-30 |
JP2014533879A (ja) | 2014-12-15 |
EP2783553B1 (de) | 2023-01-25 |
KR20140096149A (ko) | 2014-08-04 |
EP4181628A1 (de) | 2023-05-17 |
ES2942568T3 (es) | 2023-06-02 |
RU2014118753A (ru) | 2015-12-27 |
MX2014006111A (es) | 2014-09-01 |
HK1199162A1 (en) | 2015-06-19 |
CN103947298A (zh) | 2014-07-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
B06F | Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette] | ||
B08F | Application dismissed because of non-payment of annual fees [chapter 8.6 patent gazette] |
Free format text: REFERENTE A 7A ANUIDADE. |
|
B08K | Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette] |
Free format text: EM VIRTUDE DO ARQUIVAMENTO PUBLICADO NA RPI 2541 DE 17-09-2019 E CONSIDERANDO AUSENCIA DE MANIFESTACAO DENTRO DOS PRAZOS LEGAIS, INFORMO QUE CABE SER MANTIDO O ARQUIVAMENTO DO PEDIDO DE PATENTE, CONFORME O DISPOSTO NO ARTIGO 12, DA RESOLUCAO 113/2013. |