BG45024A1 - - Google Patents

Info

Publication number
BG45024A1
BG45024A1 BG8673938A BG7393886A BG45024A1 BG 45024 A1 BG45024 A1 BG 45024A1 BG 8673938 A BG8673938 A BG 8673938A BG 7393886 A BG7393886 A BG 7393886A BG 45024 A1 BG45024 A1 BG 45024A1
Authority
BG
Bulgaria
Application number
BG8673938A
Inventor
Vasil B Penchev
Lkov Vencislav I V
Vencislav G Dimitrov
Rski Vladimir S Et
Original Assignee
Vasil B Penchev
Lkov Vencislav I V
Vencislav G Dimitrov
Rski Vladimir S
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vasil B Penchev, Lkov Vencislav I V, Vencislav G Dimitrov, Rski Vladimir S filed Critical Vasil B Penchev
Priority to BG8673938A priority Critical patent/BG45024A1/xx
Priority to DD87300087A priority patent/DD274347A7/de
Priority to HU87729A priority patent/HUT43910A/hu
Priority to DE19873706269 priority patent/DE3706269A1/de
Priority to JP62051176A priority patent/JPS62219444A/ja
Priority to FR8703100A priority patent/FR2595505B3/fr
Publication of BG45024A1 publication Critical patent/BG45024A1/xx
Priority to US07/357,396 priority patent/US4980615A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Physical Vapour Deposition (AREA)
BG8673938A 1986-03-06 1986-03-06 BG45024A1 (no)

Priority Applications (7)

Application Number Priority Date Filing Date Title
BG8673938A BG45024A1 (no) 1986-03-06 1986-03-06
DD87300087A DD274347A7 (de) 1986-03-06 1987-02-20 Steuerschaltung eines elektronenstrahls bei elektronenbeschleunigung in einem elektrischen wechselfeld
HU87729A HUT43910A (en) 1986-03-06 1987-02-25 Circuit arrangement for controlling electron-beam of the evaporators of electron-beam
DE19873706269 DE3706269A1 (de) 1986-03-06 1987-02-26 Schaltung zur steuerung eines elektronenstrahls in elektronenstrahl-verdampfern
JP62051176A JPS62219444A (ja) 1986-03-06 1987-03-05 エレクトロンビ−ム蒸着器のエレクトロンビ−ム制御回路
FR8703100A FR2595505B3 (fr) 1986-03-06 1987-03-06 Circuit de commande de faisceaux d'electrons pour des evaporateurs a faisceaux d'electrons
US07/357,396 US4980615A (en) 1986-03-06 1989-05-25 Electron beam control circuit in electron beam evaporators with alternating acceleration voltages

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BG8673938A BG45024A1 (no) 1986-03-06 1986-03-06

Publications (1)

Publication Number Publication Date
BG45024A1 true BG45024A1 (no) 1989-03-15

Family

ID=3916884

Family Applications (1)

Application Number Title Priority Date Filing Date
BG8673938A BG45024A1 (no) 1986-03-06 1986-03-06

Country Status (7)

Country Link
US (1) US4980615A (no)
JP (1) JPS62219444A (no)
BG (1) BG45024A1 (no)
DD (1) DD274347A7 (no)
DE (1) DE3706269A1 (no)
FR (1) FR2595505B3 (no)
HU (1) HUT43910A (no)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3706495A1 (de) * 1987-04-29 1988-09-15 Vtu Angel Kancev Stromversorgungsschaltung fuer elektronenstrahl-verdampfer
US6707429B1 (en) * 2002-12-09 2004-03-16 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Self-contained sub-millimeter wave rectifying antenna integrated circuit
CN115464246B (zh) * 2022-09-26 2023-12-22 河北众航高能科技有限公司 一种电子束聚焦磁透镜驱动电路及其电子束焊接设备

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3371185A (en) * 1964-10-05 1968-02-27 United Aircraft Corp Electron beam maintenance device
DE1639010A1 (de) * 1967-09-04 1971-01-21 Elektromat Veb Verfahren zur Regelung eines magnetisch fokussierten und ablenkbaren Ladungstraegerstrahles,insbesondere groesserer Leistung
US3714505A (en) * 1970-12-01 1973-01-30 Bell Telephone Labor Inc Dynamic focus correction apparatus for a rectilinearly raster scanned electron beam
US3952228A (en) * 1974-11-18 1976-04-20 Ion Tech, Inc. Electron-bombardment ion source including alternating potential means for cyclically varying the focussing of ion beamlets
US4039899A (en) * 1976-05-03 1977-08-02 Tektronix, Inc. Geometry and focus correction circuit
SU1050011A1 (ru) * 1982-07-16 1983-10-23 Институт Проблем Литья Усср Устройство стабилизации фокусировки электронного луча в электронно-лучевой установке

Also Published As

Publication number Publication date
FR2595505A1 (fr) 1987-09-11
DE3706269A1 (de) 1987-09-17
HUT43910A (en) 1987-12-28
JPS62219444A (ja) 1987-09-26
DD274347A7 (de) 1989-12-20
FR2595505B3 (fr) 1988-08-26
US4980615A (en) 1990-12-25

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