BG111754A - CONTACT MICROELECTROMECHANICAL SENSOR AND METHOD FOR DETERMINING A POSITION WITH HIM - Google Patents
CONTACT MICROELECTROMECHANICAL SENSOR AND METHOD FOR DETERMINING A POSITION WITH HIMInfo
- Publication number
- BG111754A BG111754A BG111754A BG11175414A BG111754A BG 111754 A BG111754 A BG 111754A BG 111754 A BG111754 A BG 111754A BG 11175414 A BG11175414 A BG 11175414A BG 111754 A BG111754 A BG 111754A
- Authority
- BG
- Bulgaria
- Prior art keywords
- sensor
- control
- fixed
- determining
- microconsole
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
- B81C99/002—Apparatus for assembling MEMS, e.g. micromanipulators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Изобретението се отнася до микроелектромеханични (МЕМС) сензори за контактно измерване на позиция на микро- и макроразмерни обекти с работен диапазон до 5 mm и до метод за определяне на позиция с разделителна способност от порядъка на нанометри и по-добра. Сензорът намира приложение в позициониращи системи с много висока разделителна способност, за измервания и контрол в областта на микро-/нанотехнологиите. Чрез използване на преобразуващи механизми, сензорът и методът са приложими във всички области, където контролът на специфични величини се свежда до контрол на позиция. Сензорът се състои от неподвижно тяло (1) с разпростираща се от него измерителна микроконзола (2), в основата на която са вградени пиезорезистори (4), и подвижен елемент (1'), който се закрепва неподвижно към подвижен обект, на който се определя позицията. Тялото (1), закрепено към неподвижен обект, и елементът (1') са свързани посредством поне един еластичен предавателен механизъм (5), включващ микроконзолата (2), към подвижния край на която е присъединена верига от допълнителни гъвкави елементи (6, 7, 8, 14 или 10). Сензорът е изработен монолитно от една подложка, с плоска горна повърхност. 10 претенции, 6 фигуриThe invention relates to microelectromechanical (MEMS) sensors for contact position measurement of micro- and macro-sized objects with a working range of up to 5 mm and to a method for determining a position with a resolution of the order of nanometers and better. The sensor is used in highly variable positioning systems for measurement and control in the field of micro / nanotechnology. By using conversion mechanisms, the sensor and the method are applicable in all areas where control of specific quantities is limited to position control. The sensor consists of a fixed body (1) with a measuring microconsole (2) extending therefrom, at the base of which there are piezo resistors (4), and a movable element (1 ') which is fixed to a movable object on which determines the position. The body (1) attached to the fixed object and the element (1 ') are connected by means of at least one resilient transmission mechanism (5) comprising the microconsole (2), to the movable end of which is a chain of additional flexible elements , 8, 14 or 10). The sensor is molded monolithically from one pad, with a flat top surface. 10 claims, 6 figures
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
BG111754A BG66806B1 (en) | 2014-04-29 | 2014-04-29 | Contact microelectromechanical sensor and position determining method with it |
PCT/BG2015/000011 WO2015164931A2 (en) | 2014-04-29 | 2015-04-28 | Contact microelectromechanical sensor and method for position monitoring therewith |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
BG111754A BG66806B1 (en) | 2014-04-29 | 2014-04-29 | Contact microelectromechanical sensor and position determining method with it |
Publications (2)
Publication Number | Publication Date |
---|---|
BG111754A true BG111754A (en) | 2015-10-30 |
BG66806B1 BG66806B1 (en) | 2018-12-31 |
Family
ID=53373221
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BG111754A BG66806B1 (en) | 2014-04-29 | 2014-04-29 | Contact microelectromechanical sensor and position determining method with it |
Country Status (2)
Country | Link |
---|---|
BG (1) | BG66806B1 (en) |
WO (1) | WO2015164931A2 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105643592B (en) * | 2016-03-15 | 2017-06-06 | 河北工业大学 | A kind of symmetrical decoupling single-freedom and flexible operating mechanism |
CN105690358B (en) * | 2016-04-18 | 2017-08-01 | 河北工业大学 | A kind of flexible micro operating mechanism |
CN109909976B (en) * | 2019-03-18 | 2021-12-24 | 天津大学 | Symmetrical space stereo micro-manipulator with three-stage motion amplifying mechanism |
CN111953945B (en) * | 2020-08-17 | 2022-04-29 | 合肥德泰科通测控技术有限公司 | Comprehensive track detection device based on unmanned driving |
CN113790736B (en) * | 2021-08-03 | 2023-10-13 | 北京自动化控制设备研究所 | Power tuning gyroscope installation error angle compensation method and circuit |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007033000B4 (en) * | 2007-07-16 | 2016-02-04 | Robert Bosch Gmbh | Micromechanical component with a position detection component for position determination and amplitude determination of a vibratable element |
BG66424B1 (en) * | 2009-09-29 | 2014-03-31 | "Амг Технолоджи" Оод | Sensors for scanning probing microscopy, a method of three-dimensional measuing and a method for producing such sensors |
-
2014
- 2014-04-29 BG BG111754A patent/BG66806B1/en unknown
-
2015
- 2015-04-28 WO PCT/BG2015/000011 patent/WO2015164931A2/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
BG66806B1 (en) | 2018-12-31 |
WO2015164931A3 (en) | 2015-12-23 |
WO2015164931A2 (en) | 2015-11-05 |
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