BG111754A - CONTACT MICROELECTROMECHANICAL SENSOR AND METHOD FOR DETERMINING A POSITION WITH HIM - Google Patents

CONTACT MICROELECTROMECHANICAL SENSOR AND METHOD FOR DETERMINING A POSITION WITH HIM

Info

Publication number
BG111754A
BG111754A BG111754A BG11175414A BG111754A BG 111754 A BG111754 A BG 111754A BG 111754 A BG111754 A BG 111754A BG 11175414 A BG11175414 A BG 11175414A BG 111754 A BG111754 A BG 111754A
Authority
BG
Bulgaria
Prior art keywords
sensor
control
fixed
determining
microconsole
Prior art date
Application number
BG111754A
Other languages
Bulgarian (bg)
Other versions
BG66806B1 (en
Inventor
Владимир СТАВРОВ
Original Assignee
"Амг Технолоджи" Оод
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by "Амг Технолоджи" Оод filed Critical "Амг Технолоджи" Оод
Priority to BG111754A priority Critical patent/BG66806B1/en
Priority to PCT/BG2015/000011 priority patent/WO2015164931A2/en
Publication of BG111754A publication Critical patent/BG111754A/en
Publication of BG66806B1 publication Critical patent/BG66806B1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
    • B81C99/002—Apparatus for assembling MEMS, e.g. micromanipulators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

Изобретението се отнася до микроелектромеханични (МЕМС) сензори за контактно измерване на позиция на микро- и макроразмерни обекти с работен диапазон до 5 mm и до метод за определяне на позиция с разделителна способност от порядъка на нанометри и по-добра. Сензорът намира приложение в позициониращи системи с много висока разделителна способност, за измервания и контрол в областта на микро-/нанотехнологиите. Чрез използване на преобразуващи механизми, сензорът и методът са приложими във всички области, където контролът на специфични величини се свежда до контрол на позиция. Сензорът се състои от неподвижно тяло (1) с разпростираща се от него измерителна микроконзола (2), в основата на която са вградени пиезорезистори (4), и подвижен елемент (1'), който се закрепва неподвижно към подвижен обект, на който се определя позицията. Тялото (1), закрепено към неподвижен обект, и елементът (1') са свързани посредством поне един еластичен предавателен механизъм (5), включващ микроконзолата (2), към подвижния край на която е присъединена верига от допълнителни гъвкави елементи (6, 7, 8, 14 или 10). Сензорът е изработен монолитно от една подложка, с плоска горна повърхност. 10 претенции, 6 фигуриThe invention relates to microelectromechanical (MEMS) sensors for contact position measurement of micro- and macro-sized objects with a working range of up to 5 mm and to a method for determining a position with a resolution of the order of nanometers and better. The sensor is used in highly variable positioning systems for measurement and control in the field of micro / nanotechnology. By using conversion mechanisms, the sensor and the method are applicable in all areas where control of specific quantities is limited to position control. The sensor consists of a fixed body (1) with a measuring microconsole (2) extending therefrom, at the base of which there are piezo resistors (4), and a movable element (1 ') which is fixed to a movable object on which determines the position. The body (1) attached to the fixed object and the element (1 ') are connected by means of at least one resilient transmission mechanism (5) comprising the microconsole (2), to the movable end of which is a chain of additional flexible elements , 8, 14 or 10). The sensor is molded monolithically from one pad, with a flat top surface. 10 claims, 6 figures

BG111754A 2014-04-29 2014-04-29 Contact microelectromechanical sensor and position determining method with it BG66806B1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
BG111754A BG66806B1 (en) 2014-04-29 2014-04-29 Contact microelectromechanical sensor and position determining method with it
PCT/BG2015/000011 WO2015164931A2 (en) 2014-04-29 2015-04-28 Contact microelectromechanical sensor and method for position monitoring therewith

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
BG111754A BG66806B1 (en) 2014-04-29 2014-04-29 Contact microelectromechanical sensor and position determining method with it

Publications (2)

Publication Number Publication Date
BG111754A true BG111754A (en) 2015-10-30
BG66806B1 BG66806B1 (en) 2018-12-31

Family

ID=53373221

Family Applications (1)

Application Number Title Priority Date Filing Date
BG111754A BG66806B1 (en) 2014-04-29 2014-04-29 Contact microelectromechanical sensor and position determining method with it

Country Status (2)

Country Link
BG (1) BG66806B1 (en)
WO (1) WO2015164931A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105643592B (en) * 2016-03-15 2017-06-06 河北工业大学 A kind of symmetrical decoupling single-freedom and flexible operating mechanism
CN105690358B (en) * 2016-04-18 2017-08-01 河北工业大学 A kind of flexible micro operating mechanism
CN109909976B (en) * 2019-03-18 2021-12-24 天津大学 Symmetrical space stereo micro-manipulator with three-stage motion amplifying mechanism
CN111953945B (en) * 2020-08-17 2022-04-29 合肥德泰科通测控技术有限公司 Comprehensive track detection device based on unmanned driving
CN113790736B (en) * 2021-08-03 2023-10-13 北京自动化控制设备研究所 Power tuning gyroscope installation error angle compensation method and circuit

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007033000B4 (en) * 2007-07-16 2016-02-04 Robert Bosch Gmbh Micromechanical component with a position detection component for position determination and amplitude determination of a vibratable element
BG66424B1 (en) * 2009-09-29 2014-03-31 "Амг Технолоджи" Оод Sensors for scanning probing microscopy, a method of three-dimensional measuing and a method for producing such sensors

Also Published As

Publication number Publication date
BG66806B1 (en) 2018-12-31
WO2015164931A3 (en) 2015-12-23
WO2015164931A2 (en) 2015-11-05

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